Patent | Date |
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Ion beam apparatus and method employing magnetic scanning Grant 8,436,326 - Glavish , et al. May 7, 2 | 2013-05-07 |
Ion beam apparatus and method for ion implantation Grant 8,110,820 - Glavish , et al. February 7, 2 | 2012-02-07 |
Ion Beam Apparatus And Method Employing Magnetic Scanning App 20110089321 - Glavish; Hilton F. ;   et al. | 2011-04-21 |
Ion beam apparatus and method employing magnetic scanning Grant 7,851,773 - Glavish , et al. December 14, 2 | 2010-12-14 |
Ion Beam Apparatus And Method Employing Magnetic Scanning App 20090261248 - Glavish; Hilton F. ;   et al. | 2009-10-22 |
Magnetic Analyzer Apparatus And Method For Ion Implantation App 20090250603 - Glavish; Hilton F. | 2009-10-08 |
Ion implanting apparatus Grant 7,078,714 - Maeno , et al. July 18, 2 | 2006-07-18 |
Ion implanting apparatus App 20050253089 - Maeno, Syuichi ;   et al. | 2005-11-17 |
Method of using a magnetic field furnace to manufacture semiconductor substrates Grant 6,673,148 - Glavish , et al. January 6, 2 | 2004-01-06 |
Magnetic field furnace and a method of using the same to manufacture semiconductor substrates Grant 6,669,776 - Glavish , et al. December 30, 2 | 2003-12-30 |
Method of using a magnetic field furnace to manufacture semiconductor substrates App 20030097978 - Glavish, Hilton F. ;   et al. | 2003-05-29 |
Magnetic field furnace and a method of using the same to manufacture semiconductor substrates App 20030010282 - Glavish, Hilton F. ;   et al. | 2003-01-16 |
Magnetic field furnace and a method of using the same to manufacture semiconductor substrates App 20020121237 - Glavish, Hilton F. ;   et al. | 2002-09-05 |
Ion implanter and a method of implanting ions Grant 6,423,976 - Glavish , et al. July 23, 2 | 2002-07-23 |
Broad range ion implanter Grant 5,907,158 - Nasser-Ghodsi , et al. May 25, 1 | 1999-05-25 |
System and method for producing superimposed static and time-varying magnetic fields Grant 5,672,879 - Glavish September 30, 1 | 1997-09-30 |
Producing RF electric fields suitable for accelerating atomic and molecular ions in an ion implantation system Grant 5,504,341 - Glavish April 2, 1 | 1996-04-02 |
Magnetic system and method for uniformly scanning heavy ion beams Grant 5,481,116 - Glavish , et al. January 2, 1 | 1996-01-02 |
System and method for unipolar magnetic scanning of heavy ion beams Grant 5,438,203 - Glavish , et al. August 1, 1 | 1995-08-01 |
Magnetic deflection system for ion beam implanters Grant 5,393,984 - Glavish February 28, 1 | 1995-02-28 |
System and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions Grant 5,311,028 - Glavish May 10, 1 | 1994-05-10 |
System for irradiating a surface with atomic and molecular ions using two dimensional magnetic scanning Grant 5,132,544 - Glavish July 21, 1 | 1992-07-21 |
Ion beam lithography Grant 4,985,634 - Stengl , et al. January 15, 1 | 1991-01-15 |
Method and apparatus for image alignment in ion lithography Grant 4,967,088 - Stengl , et al. October 30, 1 | 1990-10-30 |
Arrangement for stabilizing an irradiated mask Grant 4,916,322 - Glavish , et al. April 10, 1 | 1990-04-10 |