Patent | Date |
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Lithographic apparatus and device manufacturing method Grant 9,581,916 - Ottens , et al. February 28, 2 | 2017-02-28 |
Chuck, a chuck control system, a lithography apparatus and a method of using a chuck Grant 9,494,875 - Cornelissen , et al. November 15, 2 | 2016-11-15 |
Lithographic apparatus and device manufacturing method Grant 9,366,973 - Ockwell , et al. June 14, 2 | 2016-06-14 |
Lithographic Apparatus And Device Manufacturing Method App 20160139514 - OTTENS; Joost Jeroen ;   et al. | 2016-05-19 |
Lithographic apparatus and device manufacturing method Grant 9,188,882 - Ottens , et al. November 17, 2 | 2015-11-17 |
Chuck, a Chuck Control System, a Lithography Apparatus and a Method of Using a Chuck App 20140253900 - Cornelissen; Sebastiaan Maria Johannes ;   et al. | 2014-09-11 |
Lithographic apparatus, a method for removing material of one or more protrusions on a support surface, and an article support system Grant 8,810,777 - Cadee , et al. August 19, 2 | 2014-08-19 |
Lithographic Apparatus and Device Manufacturing Method App 20130321788 - Ockwell; David Christopher ;   et al. | 2013-12-05 |
Actuator Grant 8,597,014 - Cadee , et al. December 3, 2 | 2013-12-03 |
Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate Grant 8,570,487 - Khuat Duy , et al. October 29, 2 | 2013-10-29 |
Support, Lithographic Apparatus And Device Manufacturing Method App 20130146785 - GILISSEN; Noud Jan ;   et al. | 2013-06-13 |
Lithographic apparatus and positioning apparatus Grant 8,411,247 - Gilissen , et al. April 2, 2 | 2013-04-02 |
Substrate table, lithographic apparatus and device manufacturing method Grant 8,274,641 - Mondt , et al. September 25, 2 | 2012-09-25 |
Lithographic Apparatus, Device Manufacturing Method, And Method Of Applying A Pattern To A Substrate App 20120058434 - KHUAT DUY; Laurent ;   et al. | 2012-03-08 |
Lithographic Apparatus And Device Manufacturing Method App 20110241259 - OTTENS; Joost Jeroen ;   et al. | 2011-10-06 |
Lithographic apparatus and device manufacturing method Grant 7,978,306 - Ottens , et al. July 12, 2 | 2011-07-12 |
Support Or Table For Lithographic Apparatus, Method Of Manufacturing Such Support Or Table And Lithographic Apparatus Comprising Such Support Or Table App 20110069298 - DONDERS; Sjoerd Nicolaas Lambertus ;   et al. | 2011-03-24 |
Actuator App 20100272846 - Cadee; Theodorus Petrus Maria ;   et al. | 2010-10-28 |
Lithographic Apparatus, A Method For Removing Material Of One Or More Protrusions On A Support Surface, And An Article Support System App 20100214549 - Cadee; Theodorus Petrus Maria ;   et al. | 2010-08-26 |
Lithographic Apparatus And Device Manufacturing Method App 20100165319 - Jacobs; Hernes ;   et al. | 2010-07-01 |
Lithographic Apparatus And Positioning Apparatus App 20100141914 - GILISSEN; Noud Jan ;   et al. | 2010-06-10 |
Lithographic apparatus and device manufacturing method Grant 7,656,502 - Van Der Schoot , et al. February 2, 2 | 2010-02-02 |
Substrate Table, Lithographic Apparatus And Device Manufacturing Method App 20090296056 - Mondt; Eva ;   et al. | 2009-12-03 |
Lithographic apparatus and device manufacturing method Grant 7,492,440 - Zaal , et al. February 17, 2 | 2009-02-17 |
Lithographic apparatus and device manufacturing method App 20080278697 - Ottens; Joost Jeroen ;   et al. | 2008-11-13 |
Lithographic apparatus and device manufacturing method Grant 7,411,657 - Ottens , et al. August 12, 2 | 2008-08-12 |
Lithographic apparatus and device manufacturing method App 20080073602 - Jacobs; Hernes ;   et al. | 2008-03-27 |
Lithographic apparatus and device manufacturing method Grant 7,119,884 - Ottens , et al. October 10, 2 | 2006-10-10 |
Lithographic apparatus and device manufacturing method Grant 7,106,416 - Box , et al. September 12, 2 | 2006-09-12 |
Substrate carrier and method for making a substrate carrier Grant 7,064,808 - Gilissen , et al. June 20, 2 | 2006-06-20 |
Lithographic apparatus and device manufacturing method App 20060103831 - Ottens; Joost Jeroen ;   et al. | 2006-05-18 |
Lithographic apparatus, device manufacturing method and device manufactured thereby, control system Grant 7,015,491 - Eurlings , et al. March 21, 2 | 2006-03-21 |
Lithographic apparatus and device manufacturing method App 20060049698 - Maria Zaal; Koen Jacobus Johannes ;   et al. | 2006-03-09 |
Lithographic apparatus and method of manufacturing a device Grant 6,956,222 - Gilissen , et al. October 18, 2 | 2005-10-18 |
Lithographic apparatus and device manufacturing method App 20050140962 - Ottens, Joost Jeroen ;   et al. | 2005-06-30 |
Lithographic apparatus and device manufacturing method App 20050128448 - Box, Wilhelmus Josephus ;   et al. | 2005-06-16 |
Lithographic apparatus and method of manufacturing a device App 20040178362 - Gilissen, Noud Jan ;   et al. | 2004-09-16 |
Lithographic apparatus, device manufacturing method and device manufactured thereby, control system App 20040108467 - Eurlings, Markus Franciscus Antonius ;   et al. | 2004-06-10 |
Lithographic apparatus and device manufacturing method Grant 6,741,329 - Leenders , et al. May 25, 2 | 2004-05-25 |
Lithographic apparatus and device manufacturing method App 20030063266 - Leenders, Martinus Hendrikue Antonius ;   et al. | 2003-04-03 |