Patent applications and USPTO patent grants for Gibson; John A..The latest application filed is for "methods and apparatus for detecting and compensating for focus errors in a photolithography tool".
Patent | Date |
---|---|
Methods and apparatus for detecting and compensating for focus errors in a photolithography tool Grant 5,883,703 - Knirck , et al. March 16, 1 | 1999-03-16 |
Current harmonic, current form factor and power factor modification unit for rectifier supplied loads Grant 5,430,364 - Gibson July 4, 1 | 1995-07-04 |
Method and apparatus for transfer of a reticle pattern onto a substrate by scanning Grant 5,298,939 - Swanson , et al. March 29, 1 | 1994-03-29 |
Deep ultraviolet (UV) lens for use in a photolighography system Grant 5,031,977 - Gibson July 16, 1 | 1991-07-16 |
Touch control adaptor Grant 4,701,676 - Gibson October 20, 1 | 1987-10-20 |
Laser system and its method of use Grant 4,396,285 - Presta , et al. August 2, 1 | 1983-08-02 |
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