Gianoulakis; Steven
Patent Applications and Registrations
Patent applications and USPTO patent grants for Gianoulakis; Steven.The latest application filed is for "gas distribution showerhead featuring exhaust apertures".
- Gianoulakis; Steven - Pleasanton CA
| Patent | Date |
|---|---|
| Gas distribution showerhead featuring exhaust apertures Grant 7,452,827 - Gianoulakis , et al. November 18, 2 | 2008-11-18 |
| Gas distribution showerhead featuring exhaust apertures App 20060234514 - Gianoulakis; Steven ; et al. | 2006-10-19 |
| Gas distribution showerhead featuring exhaust apertures App 20050103265 - Gianoulakis, Steven ; et al. | 2005-05-19 |
| Gas distribution showerhead Grant 6,793,733 - Janakiraman , et al. September 21, 2 | 2004-09-21 |
| Gas distribution showerhead App 20040060514 - Janakiraman, Karthik ; et al. | 2004-04-01 |
| Particle removal apparatus Grant 6,684,523 - Bailey , et al. February 3, 2 | 2004-02-03 |
| Method for achieving a desired process uniformity by modifying surface topography of substrate heater App 20040011780 - Sun, David P. ; et al. | 2004-01-22 |
| Gas distribution showerhead App 20030140851 - Janakiraman, Karthik ; et al. | 2003-07-31 |
| Particle removal apparatus App 20030037457 - Bailey, Joel Brad ; et al. | 2003-02-27 |
| Substrate support apparatus to facilitate particle removal App 20030039087 - Gianoulakis, Steven ; et al. | 2003-02-27 |
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