Ghanayem; Steve G.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ghanayem; Steve G..The latest application filed is for "methods for depositing fluorine/carbon-free conformal tungsten".

Company Profile

1.17.19

Ghanayem; Steve G. - Los Altos CA
Ghanayem; Steve G. - Sunnyvale CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten App 20210225655 - Fu; Xinyu ; et al.	2021-07-22
Methods for depositing fluorine/carbon-free conformal tungsten Grant 10,985,023 - Fu , et al. April 20, 2	2021-04-20
Hybrid laser and implant treatment for overlay error correction Grant 10,429,747 - Bangar , et al. O	2019-10-01
Hybrid Laser And Implant Treatment For Overlay Error Correction App 20180136569 - BANGAR; Mangesh ; et al.	2018-05-17
Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten App 20170194156 - Fu; Xinyu ; et al.	2017-07-06
Methods for depositing fluorine/carbon-free conformal tungsten Grant 9,601,339 - Fu , et al. March 21, 2	2017-03-21
Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten App 20160104624 - Fu; Xinyu ; et al.	2016-04-14
Methods for depositing fluorine/carbon-free conformal tungsten Grant 9,230,815 - Fu , et al. January 5, 2	2016-01-05
Methods For Depositing Fluorine/carbon-free Conformal Tungsten App 20140120723 - Fu; Xinyu ; et al.	2014-05-01
Substrate Processing Apparatus Using A Batch Processing Chamber App 20120210937 - THAKUR; RANDHIR ; et al.	2012-08-23
Scrubber box and methods for using the same Grant 7,774,887 - Yudovsky , et al. August 17, 2	2010-08-17
Substrate Processing Apparatus Using A Batch Processing Chamber App 20100173495 - Thakur; Randhir ; et al.	2010-07-08
Method for treating substrates and films with photoexcitation Grant 7,601,652 - Singh , et al. October 13, 2	2009-10-13
Scrubber Box And Methods For Using The Same App 20080210258 - Yudovsky; Joseph ; et al.	2008-09-04
Scrubber box Grant 7,377,002 - Yudovsky , et al. May 27, 2	2008-05-27
Method And Apparatus For Photo-excitation Of Chemicals For Atomic Layer Deposition Of Dielectric Film App 20070259111 - Singh; Kaushal K. ; et al.	2007-11-08
Reaction chamber with opposing pockets for gas injection and exhaust App 20070084406 - Yudovsky; Joseph ; et al.	2007-04-19
Batch Processing Chamber With Diffuser Plate And Injector Assembly App 20070084408 - Yudovsky; Joseph ; et al.	2007-04-19
Method of treating films using UV-generated active species App 20070042130 - Ghanayem; Steve G.	2007-02-22
Method for silicon based dielectric deposition and clean with photoexcitation App 20060286819 - Seutter; Sean M. ; et al.	2006-12-21
Method for treating substrates and films with photoexcitation App 20060286820 - Singh; Kaushal K. ; et al.	2006-12-21
Substrate processing apparatus using a batch processing chamber App 20060156979 - Thakur; Randhir ; et al.	2006-07-20
Scrubber box and methods for using the same App 20050087212 - Yudovsky, Joseph ; et al.	2005-04-28
Tantalum nitride CVD deposition by tantalum oxide densification Grant 6,638,810 - Bakli , et al. October 28, 2	2003-10-28
Silicon layer to improve plug filling by CVD Grant 6,602,770 - Desai , et al. August 5, 2	2003-08-05
Tantalum nitride CVD deposition by tantalum oxide densification App 20030008501 - Bakli, Mouloud ; et al.	2003-01-09
Substrate support member for a processing chamber Grant 6,464,795 - Sherstinsky , et al. October 15, 2	2002-10-15
Silicon layer to improve plug filling by CVD App 20020090796 - Desai, Sandeep A. ; et al.	2002-07-11
Method of tantalum nitride deposition by tantalum oxide densification Grant 6,319,766 - Bakli , et al. November 20, 2	2001-11-20
Gate electrode connection structure by in situ chemical vapor deposition of tungsten and tungsten nitride Grant 6,251,190 - Mak , et al. June 26, 2	2001-06-26
Method and apparatus for reducing particle contamination during wafer transport Grant 6,192,601 - Ghanayem , et al. February 27, 2	2001-02-27
Method of forming gate electrode connection structure by in situ chemical vapor deposition of tungsten and tungsten nitride Grant 6,162,715 - Mak , et al. December 19, 2	2000-12-19
Methods and apparatus for reducing particle contamination during wafer transport Grant 6,106,634 - Ghanayem , et al. August 22, 2	2000-08-22
Method and apparatus for etchback endpoint detection Grant 5,552,016 - Ghanayem September 3, 1	1996-09-03
Deposition apparatus using a perforated pumping plate Grant 5,292,554 - Sinha , et al. March 8, 1	1994-03-08

Company Registrations

SEC

0001721736

Ghanayem Steve G.

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