| Patent | Date |
|---|
Supporting an optical element
Grant 11,314,177 - Kugler , et al. April 26, 2 | 2022-04-26 |
Supporting An Optical Element
App 20210181644 - Kugler; Jens ; et al. | 2021-06-17 |
Optical imaging arrangement with actively adjustable metrology support units
Grant 10,890,850 - Hembacher , et al. January 12, 2 | 2021-01-12 |
Lithography system and method
Grant 10,635,003 - Geuppert | 2020-04-28 |
Projection exposure apparatus, and method for reducing deformations, resulting from dynamic accelerations, of components of the projection exposure apparatus
Grant 10,599,051 - Hembacher , et al. | 2020-03-24 |
Lithography System And Method
App 20190310557 - Geuppert; Bernhard | 2019-10-10 |
Optical imaging arrangement with a piezoelectric device
Grant 10,416,570 - Kugler , et al. Sept | 2019-09-17 |
Projection Exposure Apparatus, And Method For Reducing Deformations, Resulting From Dynamic Accelerations, Of Components Of The
App 20190219926 - Hembacher; Stefan ; et al. | 2019-07-18 |
Microlithographic projection exposure apparatus and measuring device for a projection lens
Grant 10,345,710 - Ehrmann , et al. July 9, 2 | 2019-07-09 |
Projection Exposure System For Microlithography With A Measurement Device
App 20190129318 - Mueller; Ulrich ; et al. | 2019-05-02 |
Optical Imaging Arrangement With A Piezoelectric Device
App 20190094705 - Kugler; Jens ; et al. | 2019-03-28 |
Optical Imaging Arrangement With Actively Adjustable Metrology Support Units
App 20180275527 - Hembacher; Stefan ; et al. | 2018-09-27 |
Optical Projection System
App 20180259856 - Rau; Johannes ; et al. | 2018-09-13 |
Projection exposure system for microlithography with a measurement device
Grant 10,042,271 - Mueller , et al. August 7, 2 | 2018-08-07 |
Optical projection system
Grant 9,891,535 - Rau , et al. February 13, 2 | 2018-02-13 |
Projection Exposure System For Microlithography With A Measurement Device
App 20180024445 - Mueller; Ulrich ; et al. | 2018-01-25 |
Optical Projection System
App 20170219929 - Rau; Johannes ; et al. | 2017-08-03 |
Lithographic apparatus and device manufacturing method
Grant 9,696,630 - Van Der Wijst , et al. July 4, 2 | 2017-07-04 |
Projection exposure system for microlithography with a measurement device
Grant 9,696,639 - Mueller , et al. July 4, 2 | 2017-07-04 |
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens
App 20170082930 - Ehrmann; Albrecht ; et al. | 2017-03-23 |
Optical projection system
Grant 9,557,653 - Rau , et al. January 31, 2 | 2017-01-31 |
Method for replacing objective parts
Grant 9,551,944 - Geuppert , et al. January 24, 2 | 2017-01-24 |
Exposure apparatus and measuring device for a projection lens
Grant 9,436,095 - Ehrmann , et al. September 6, 2 | 2016-09-06 |
Arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus
Grant 9,410,662 - Geuppert , et al. August 9, 2 | 2016-08-09 |
Arrangement for actuating an element in a microlithographic projection exposure apparatus
Grant 9,304,404 - Fischer , et al. April 5, 2 | 2016-04-05 |
Lithographic Apparatus and Device Manufacturing Method
App 20160004170 - VAN DER WIJST; Marc Wilhelmus Maria ; et al. | 2016-01-07 |
Optical Projection System
App 20150323873 - Rau; Johannes ; et al. | 2015-11-12 |
Lithographic apparatus and device manufacturing method
Grant 9,134,632 - Van Der Wijst , et al. September 15, 2 | 2015-09-15 |
Projection exposure apparatus with multiple sets of piezoelectric elements moveable in different directions and related method
Grant 9,110,388 - Bleidistel , et al. August 18, 2 | 2015-08-18 |
Optical projection system
Grant 9,104,016 - Rau , et al. August 11, 2 | 2015-08-11 |
Projection Exposure System For Microlithography With A Measurement Device
App 20150212431 - Mueller; Ulrich ; et al. | 2015-07-30 |
Lithography Apparatus With Restricted Movement Relative To Floor And Related Method
App 20150168853 - Schumacher; Mathias ; et al. | 2015-06-18 |
Projection exposure system for microlithography with a measurement device
Grant 9,001,304 - Mueller , et al. April 7, 2 | 2015-04-07 |
Method and Device for Replacing Objective Parts
App 20140359990 - Geuppert; Bernhard ; et al. | 2014-12-11 |
Optical element
Grant 8,705,185 - Rau , et al. April 22, 2 | 2014-04-22 |
Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations
Grant 8,659,745 - Limbach , et al. February 25, 2 | 2014-02-25 |
Arrangement For Actuating An Element In A Microlithographic Projection Exposure Apparatus
App 20140043596 - Fischer; Juergen ; et al. | 2014-02-13 |
Lithography Apparatus And Method
App 20140021324 - Schumacher; Mathias ; et al. | 2014-01-23 |
Arrangement For Mounting An Optical Element, In Particular In An Euv Projection Exposure Apparatus
App 20130314771 - Geuppert; Bernhard ; et al. | 2013-11-28 |
Optical System With An Exchangeable, Manipulable Correction Arrangement For Reducing Image Aberrations
App 20130278911 - Limbach; Guido ; et al. | 2013-10-24 |
Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations
Grant 8,542,346 - Limbach , et al. September 24, 2 | 2013-09-24 |
Exposure Apparatus And Measuring Device For A Projection Lens
App 20130120723 - Ehrmann; Albrecht ; et al. | 2013-05-16 |
Optical module with minimized overrun of the optical element
Grant 8,441,747 - Heintel , et al. May 14, 2 | 2013-05-14 |
Optical Projection System
App 20130044304 - Rau; Johannes ; et al. | 2013-02-21 |
Projection Exposure Apparatus And Optical System
App 20120320353 - Bleidistel; Sascha ; et al. | 2012-12-20 |
Exposure apparatus and measuring device for a projection lens
Grant 8,330,935 - Ehrmann , et al. December 11, 2 | 2012-12-11 |
Optical projection system
Grant 8,300,210 - Rau , et al. October 30, 2 | 2012-10-30 |
Projection exposure apparatus and optical system
Grant 8,269,948 - Bleidistel , et al. September 18, 2 | 2012-09-18 |
Optical Element
App 20120194795 - Rau; Johannes ; et al. | 2012-08-02 |
Lithographic Apparatus and Device Manufacturing Method
App 20120154774 - VAN DER WIJST; Marc Wilhelmus Maria ; et al. | 2012-06-21 |
Optical apparatus and method for modifying the imaging behavior of such apparatus
Grant 8,169,595 - Schriever , et al. May 1, 2 | 2012-05-01 |
Projection Exposure System For Microlithography With A Measurement Device
App 20110013171 - Mueller; Ulrich ; et al. | 2011-01-20 |
Vibration damping for photolithographic lens mount
Grant 7,826,155 - Geuppert , et al. November 2, 2 | 2010-11-02 |
Reflecting optical element with eccentric optical passageway
Grant 7,760,327 - Scherle , et al. July 20, 2 | 2010-07-20 |
Exposure Apparatus And Measuring Device For A Projection Lens
App 20100141912 - Ehrmann; Albrecht ; et al. | 2010-06-10 |
Lithographic apparatus, device manufacturing method and exchangeable optical element
Grant 7,724,351 - Loopstra , et al. May 25, 2 | 2010-05-25 |
Structure for use in a projection exposure system for manufacturing semiconductors
Grant 7,692,881 - Kwan , et al. April 6, 2 | 2010-04-06 |
Method And Device For Replacing Objective Parts
App 20090260654 - Geuppert; Bernhard ; et al. | 2009-10-22 |
Optical System With An Exchangeable, Manipulable Correction Arrangement For Reducing Image Aberrations
App 20090244509 - Limbach; Guido ; et al. | 2009-10-01 |
Projection Exposure Apparatus And Optical System
App 20090225297 - Bleidistel; Sascha ; et al. | 2009-09-10 |
Method of manufacturing an optical component
Grant 7,581,305 - Geuppert , et al. September 1, 2 | 2009-09-01 |
Optical Apparatus And Method For Modifying The Imaging Behavior Of Such Apparatus
App 20090174876 - Schriever; Martin ; et al. | 2009-07-09 |
Optical Projection System
App 20090174874 - Rau; Johannes ; et al. | 2009-07-09 |
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens
App 20080309894 - Ehrmann; Albrecht ; et al. | 2008-12-18 |
Vibration Damping For Photolithographic Lens Mount
App 20080285161 - Geuppert; Bernhard ; et al. | 2008-11-20 |
Optical Element
App 20080278828 - Rau; Johannes ; et al. | 2008-11-13 |
Optical module with minimized overrun of the optical element
App 20080204689 - Heintel; Willi ; et al. | 2008-08-28 |
Focusing-device for the radiation from a light source
Grant 7,410,265 - Antoni , et al. August 12, 2 | 2008-08-12 |
Collector with fastening devices for fastening mirror shells
App 20080042079 - Singer; Wolfgang ; et al. | 2008-02-21 |
Collector with fastening devices for fastening mirror shells
Grant 7,321,126 - Singer , et al. January 22, 2 | 2008-01-22 |
Lithographic apparatus, device manufacturing method and exchangeable optical element
App 20070177122 - Loopstra; Erik Roelof ; et al. | 2007-08-02 |
Housing structure for mounting optical elements
App 20070165311 - Kwan; Yim-Bun Patrick ; et al. | 2007-07-19 |
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens
App 20070070316 - Ehrmann; Albrecht ; et al. | 2007-03-29 |
Collector with fastening devices for fastening mirror shells
App 20060291062 - Singer; Wolfgang ; et al. | 2006-12-28 |
Reflecting optical element with eccentric optical passageway
App 20060262704 - Scherle; Hans-Jurgen ; et al. | 2006-11-23 |
Collector with fastening devices for fastening mirror shells
Grant 7,091,505 - Singer , et al. August 15, 2 | 2006-08-15 |
Device for receiving an optical module in an imaging unit
App 20060126195 - Rau; Johannes ; et al. | 2006-06-15 |
Method of manufacturing an optical component and optical system using the same
App 20050223539 - Geuppert, Bernhard ; et al. | 2005-10-13 |
Collector with fastening devices for fastening mirror shells
App 20040227103 - Singer, Wolfgang ; et al. | 2004-11-18 |
Adjustable assembly
Grant 6,259,571 - Holderer , et al. July 10, 2 | 2001-07-10 |
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