Gerber; Kevin
Patent Applications and Registrations
Patent applications and USPTO patent grants for Gerber; Kevin.The latest application filed is for "rapid chamber clean using concurrent in-situ and remote plasma sources".
- Gerber; Kevin - Portland OR
| Patent | Date |
|---|---|
| Rapid chamber clean using concurrent in-situ and remote plasma sources Grant 10,161,034 - Fox , et al. Dec | 2018-12-25 |
| Rapid Chamber Clean Using Concurrent In-situ And Remote Plasma Sources App 20180305814 - Fox; Keith ; et al. | 2018-10-25 |
| Method and apparatus for purging and plasma suppression in a process chamber Grant 9,399,228 - Breiling , et al. July 26, 2 | 2016-07-26 |
| Method And Apparatus For Purging And Plasma Suppression In A Process Chamber App 20140217193 - Breiling; Patrick ; et al. | 2014-08-07 |
| Method of eliminating small bin defects in high throughput TEOS films Grant 8,034,725 - Henri , et al. October 11, 2 | 2011-10-11 |
| Method of eliminating small bin defects in high throughput TEOS films Grant 7,704,894 - Henri , et al. April 27, 2 | 2010-04-27 |
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