| Patent | Date |
|---|
Automated Transfer Of Edge Ring Requiring Rotational Alignment
App 20220246408 - Genetti; Damon Tyrone ; et al. | 2022-08-04 |
Fiducial-filtering automatic wafer centering process and associated system
Grant 10,790,237 - Mooring , et al. September 29, 2 | 2020-09-29 |
Automated replacement of consumable parts using interfacing chambers
Grant 10,770,339 - Genetti , et al. Sep | 2020-09-08 |
Fiducial-Filtering Automatic Wafer Centering Process and Associated System
App 20200091085 - Mooring; Benjamin W. ; et al. | 2020-03-19 |
Edge ring centering method using ring dynamic alignment data
Grant 10,541,168 - Tan , et al. Ja | 2020-01-21 |
Automated replacement of consumable parts using end effectors interfacing with plasma processing system
Grant 10,427,307 - Genetti , et al. October 1, 2 | 2019-10-01 |
Automated Replacement of Consumable Parts Using Interfacing Chambers
App 20190252234 - Genetti; Damon Tyrone ; et al. | 2019-08-15 |
Automated replacement of consumable parts using interfacing chambers
Grant 10,304,717 - Genetti , et al. | 2019-05-28 |
Verifying end effector flatness using electrical continuity
Grant 10,190,865 - Aguilar Amaya , et al. Ja | 2019-01-29 |
Automated replacement of consumable parts using end effectors interfacing with plasma processing system
Grant 10,124,492 - Genetti , et al. November 13, 2 | 2018-11-13 |
Front opening ring pod
Grant 10,062,589 - Wong , et al. August 28, 2 | 2018-08-28 |
Front opening ring pod
Grant 10,062,590 - Wong , et al. August 28, 2 | 2018-08-28 |
Automated replacement of consumable parts using interfacing chambers
Grant 10,062,599 - Genetti , et al. August 28, 2 | 2018-08-28 |
Edge Ring Centering Method Using Ring Dynamic Alignment Data
App 20180138069 - Tan; Ali Sucipto ; et al. | 2018-05-17 |
Front Opening Ring Pod
App 20180068879 - Wong; Scott ; et al. | 2018-03-08 |
Front Opening Ring Pod
App 20180040492 - Wong; Scott ; et al. | 2018-02-08 |
Front opening ring pod
Grant 9,881,820 - Wong , et al. January 30, 2 | 2018-01-30 |
Front Opening Ring Pod
App 20180019142 - Wong; Scott ; et al. | 2018-01-18 |
Automated Replacement of Consumable Parts Using End Effectors Interfacing with Plasma Processing System
App 20170334074 - Genetti; Damon Tyrone ; et al. | 2017-11-23 |
Automated Replacement of Consumable Parts Using Interfacing Chambers
App 20170330786 - Genetti; Damon Tyrone ; et al. | 2017-11-16 |
Detection System for Tunable/Replaceable Edge Coupling Ring
App 20170263478 - McCHESNEY; Jon ; et al. | 2017-09-14 |
Verifying End Effector Flatness Using Electrical Continuity
App 20170211922 - Aguilar Amaya; Silvia Rocio ; et al. | 2017-07-27 |
Automated Replacement of Consumable Parts Using End Effectors Interfacing with Plasma Processing System
App 20170113355 - Genetti; Damon Tyrone ; et al. | 2017-04-27 |
Front Opening Ring Pod
App 20170117170 - Wong; Scott ; et al. | 2017-04-27 |
Automated Replacement of Consumable Parts Using Interfacing Chambers
App 20170117172 - Genetti; Damon Tyrone ; et al. | 2017-04-27 |
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