Gellrich; Bernhard
Patent Applications and Registrations
Patent applications and USPTO patent grants for Gellrich; Bernhard.The latest application filed is for "support of an optical unit".
Company Profile
4.61.61
- Gellrich; Bernhard - Aalen DE
- Gellrich, Bernhard - Aaelen DE
Patent Activity
| Patent | Date |
|---|---|
| Support Of An Optical Unit App 20220283509 - Pnini; Boaz ; et al. | 2022-09-08 |
| Projection exposure apparatus for semiconductor lithography Grant 11,281,114 - Kugler , et al. March 22, 2 | 2022-03-22 |
| Projection Exposure Apparatus For Semiconductor Lithography App 20210080841 - Kugler; Jens ; et al. | 2021-03-18 |
| Optical arrangement, in particular lithography system Grant 10,809,636 - Gellrich , et al. October 20, 2 | 2020-10-20 |
| Imaging optical system for microlithography Grant 10,754,132 - Rogalsky , et al. A | 2020-08-25 |
| Connection arrangement for a force-fit connection between ceramic components Grant 10,571,813 - Siegmanski , et al. Feb | 2020-02-25 |
| Optical Arrangement, In Particular Lithography System App 20190339626 - Gellrich; Bernhard ; et al. | 2019-11-07 |
| Optical element unit for exposure processes Grant 10,203,607 - Schwertner , et al. Feb | 2019-02-12 |
| Optical Projection System App 20180259856 - Rau; Johannes ; et al. | 2018-09-13 |
| Optical Imaging Device With Thermal Attenuation App 20180181007 - Gellrich; Bernhard ; et al. | 2018-06-28 |
| Mirror module, in particular for a microlithographic projection exposure appararatus Grant 9,996,015 - Prochnau , et al. June 12, 2 | 2018-06-12 |
| Optical projection system Grant 9,891,535 - Rau , et al. February 13, 2 | 2018-02-13 |
| Optical imaging device and method for reducing dynamic fluctuations in pressure difference Grant 9,817,322 - Hembacher , et al. November 14, 2 | 2017-11-14 |
| Optical imaging device with thermal attenuation Grant 9,810,996 - Gellrich , et al. November 7, 2 | 2017-11-07 |
| Optical Projection System App 20170219929 - Rau; Johannes ; et al. | 2017-08-03 |
| Connection Arrangement For A Force-fit Connection Between Ceramic Components App 20170184982 - Siegmanski; Karsten ; et al. | 2017-06-29 |
| Mirror Module, In Particular For A Microlithographic Projection Exposure Appararatus App 20170153552 - Prochnau; Jens ; et al. | 2017-06-01 |
| Optical projection system Grant 9,557,653 - Rau , et al. January 31, 2 | 2017-01-31 |
| Optical Imaging Device App 20160147159 - Hembacher; Stefan ; et al. | 2016-05-26 |
| Optical arrangement in a projection exposure apparatus for EUV lithography Grant 9,298,111 - Kulitzki , et al. March 29, 2 | 2016-03-29 |
| Optical Projection System App 20150323873 - Rau; Johannes ; et al. | 2015-11-12 |
| Lithographic apparatus and device manufacturing method Grant 9,182,679 - Hoogendam , et al. November 10, 2 | 2015-11-10 |
| Optical projection system Grant 9,104,016 - Rau , et al. August 11, 2 | 2015-08-11 |
| Optical Element Unit For Exposure Processes App 20150168846 - Schwertner; Tilman ; et al. | 2015-06-18 |
| Lithography Apparatus With Restricted Movement Relative To Floor And Related Method App 20150168853 - Schumacher; Mathias ; et al. | 2015-06-18 |
| Optical element unit for exposure processes having sealing element Grant 9,046,795 - Schwertner , et al. June 2, 2 | 2015-06-02 |
| Holding Device for an Optical Element in an Objective App 20150138520 - Gellrich; Bernhard ; et al. | 2015-05-21 |
| Optical Imaging Device With Thermal Attenuation App 20150109591 - Gellrich; Bernhard ; et al. | 2015-04-23 |
| Lithographic Apparatus And Device Manufacturing Method App 20150015858 - HOOGENDAM; Christiaan Alexander ; et al. | 2015-01-15 |
| Optical imaging device with thermal attenuation Grant 8,902,401 - Gellrich , et al. December 2, 2 | 2014-12-02 |
| Lithographic apparatus and device manufacturing method Grant 8,860,922 - Hoogendam , et al. October 14, 2 | 2014-10-14 |
| Holding device for an optical element in an objective Grant 8,854,602 - Gellrich , et al. October 7, 2 | 2014-10-07 |
| Lithographic apparatus and device manufacturing method Grant 8,810,771 - Hoogendam , et al. August 19, 2 | 2014-08-19 |
| Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations Grant 8,659,745 - Limbach , et al. February 25, 2 | 2014-02-25 |
| Lithography Apparatus And Method App 20140021324 - Schumacher; Mathias ; et al. | 2014-01-23 |
| Optical System With An Exchangeable, Manipulable Correction Arrangement For Reducing Image Aberrations App 20130278911 - Limbach; Guido ; et al. | 2013-10-24 |
| Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations Grant 8,542,346 - Limbach , et al. September 24, 2 | 2013-09-24 |
| Imaging Optical System for Microlithography App 20130188246 - Rogalsky; Olaf ; et al. | 2013-07-25 |
| Optical system for microlithography Grant 8,456,616 - Kraehmer , et al. June 4, 2 | 2013-06-04 |
| Optical Imaging Device With Thermal Attenuation App 20130114057 - Gellrich; Bernhard ; et al. | 2013-05-09 |
| Optical Projection System App 20130044304 - Rau; Johannes ; et al. | 2013-02-21 |
| Optical imaging device with thermal attenuation Grant 8,363,206 - Gellrich , et al. January 29, 2 | 2013-01-29 |
| Optical projection system Grant 8,300,210 - Rau , et al. October 30, 2 | 2012-10-30 |
| Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same Grant 8,279,402 - Six , et al. October 2, 2 | 2012-10-02 |
| Optical Arrangement In A Projection Exposure Apparatus For Euv Lithography App 20120188523 - Kulitsky; Viktor ; et al. | 2012-07-26 |
| Lithographic Apparatus And Device Manufacturing Method App 20120120377 - HOOGENDAM; Christiaan Alexander ; et al. | 2012-05-17 |
| Optical Imaging Device And Method For Reducing Dynamic Fluctuations In Pressure Difference App 20120026479 - Hembacher; Stefan ; et al. | 2012-02-02 |
| Lithographic apparatus and device manufacturing method Grant 8,102,502 - Hoogendam , et al. January 24, 2 | 2012-01-24 |
| Lithographic appararus and method Grant 8,094,287 - Van Empel , et al. January 10, 2 | 2012-01-10 |
| Replacement device for an optical element Grant 8,027,024 - Gellrich , et al. September 27, 2 | 2011-09-27 |
| Optical imaging device and method for reducing dynamic fluctuations in pressure difference Grant 8,027,023 - Hembacher , et al. September 27, 2 | 2011-09-27 |
| Optical imaging device having at least one system diaphragm Grant 8,009,343 - Gellrich , et al. August 30, 2 | 2011-08-30 |
| Optical element module Grant 7,986,472 - Kugler , et al. July 26, 2 | 2011-07-26 |
| Optical System For Microlithography App 20110069295 - Kraehmer; Daniel ; et al. | 2011-03-24 |
| Reflecting optical element with eccentric optical passageway Grant 7,760,327 - Scherle , et al. July 20, 2 | 2010-07-20 |
| Adjustment arrangement of an optical element Grant 7,656,595 - Beck , et al. February 2, 2 | 2010-02-02 |
| Immersion lithography objective Grant 7,649,702 - Gellrich , et al. January 19, 2 | 2010-01-19 |
| Optical System With An Exchangeable, Manipulable Correction Arrangement For Reducing Image Aberrations App 20090244509 - Limbach; Guido ; et al. | 2009-10-01 |
| Optical Arrangement For Immersion Lithography With A Hydrophobic Coating, As Well As Projection Exposure Apparatus Comprising The Same App 20090233233 - SIX; Stephan ; et al. | 2009-09-17 |
| Lithographic Apparatus And Device Manufacturing Method App 20090197211 - HOOGENDAM; Christiaan Alexander ; et al. | 2009-08-06 |
| Microlithographic projection exposure apparatus Grant 7,570,343 - Dodoc , et al. August 4, 2 | 2009-08-04 |
| Optical Projection System App 20090174874 - Rau; Johannes ; et al. | 2009-07-09 |
| Optical element unit for exposure processes Grant 7,545,483 - Gellrich , et al. June 9, 2 | 2009-06-09 |
| Optical Imaging Device With Thermal Attenuation App 20090135385 - Gellrich; Bernhard ; et al. | 2009-05-28 |
| Lithographic appararus and method App 20090027638 - Van Empel; Tjarko Adriaan Rudolf ; et al. | 2009-01-29 |
| Optical Imaging Device Having At Least One System Diaphragm App 20090021820 - Gellrich; Bernhard ; et al. | 2009-01-22 |
| Adjustment Arrangement of an Optical Element App 20090009892 - Beck; Klaus ; et al. | 2009-01-08 |
| Adjustment arrangement of an optical element Grant 7,457,059 - Beck , et al. November 25, 2 | 2008-11-25 |
| Optical Element Unit For Exposure Processes App 20080225247 - Schwertner; Tilman ; et al. | 2008-09-18 |
| Immersion Lithography Objective App 20080212211 - Gellrich; Bernhard ; et al. | 2008-09-04 |
| Optical element unit for exposure processes App 20080192215 - Gellrich; Bernhard ; et al. | 2008-08-14 |
| Focusing-device for the radiation from a light source Grant 7,410,265 - Antoni , et al. August 12, 2 | 2008-08-12 |
| Optical imaging device App 20080186467 - Hembacher; Stefan ; et al. | 2008-08-07 |
| Replacement Device For An Optical Element App 20080174758 - Gellrich; Bernhard ; et al. | 2008-07-24 |
| Method for connection of an optical element to a mount structure Grant 7,400,460 - Holderer , et al. July 15, 2 | 2008-07-15 |
| Optical measuring system, and a projection objective App 20080100930 - Holderer; Hubert ; et al. | 2008-05-01 |
| Collector with fastening devices for fastening mirror shells App 20080042079 - Singer; Wolfgang ; et al. | 2008-02-21 |
| Collector with fastening devices for fastening mirror shells Grant 7,321,126 - Singer , et al. January 22, 2 | 2008-01-22 |
| Optical imaging device App 20080013063 - Hembacher; Stefan ; et al. | 2008-01-17 |
| Holding Device for an Optical Element in an Objective App 20080002170 - Gellrich; Bernhard ; et al. | 2008-01-03 |
| Optical element with an optical axis Grant 7,295,331 - Petasch , et al. November 13, 2 | 2007-11-13 |
| Method for connection of an optical element to a mount structure App 20070171552 - Holderer; Hubert ; et al. | 2007-07-26 |
| Optical element module App 20070146906 - Kugler; Jens ; et al. | 2007-06-28 |
| Microlithographic projection exposure apparatus and method for introducing an immersion liquid into an immersion space App 20070132969 - Gellrich; Bernhard ; et al. | 2007-06-14 |
| Adjustment arrangement of an optical element Grant 7,193,794 - Beck , et al. March 20, 2 | 2007-03-20 |
| Adjustment Arrangement Of An Optical Element App 20070014038 - Beck; Klaus ; et al. | 2007-01-18 |
| Collector with fastening devices for fastening mirror shells App 20060291062 - Singer; Wolfgang ; et al. | 2006-12-28 |
| Reflecting optical element with eccentric optical passageway App 20060262704 - Scherle; Hans-Jurgen ; et al. | 2006-11-23 |
| Microlithographic projection exposure apparatus App 20060187430 - Dodoc; Aurelian ; et al. | 2006-08-24 |
| Collector with fastening devices for fastening mirror shells Grant 7,091,505 - Singer , et al. August 15, 2 | 2006-08-15 |
| System for setting and maintaining a gas atmosphere in an optical system App 20060061886 - Gellrich; Bernhard ; et al. | 2006-03-23 |
| Lithographic apparatus and device manufacturing method App 20060017894 - Van Empel; Tjarko Adriaan Rudolf ; et al. | 2006-01-26 |
| System for damping oscillations Grant 6,897,599 - Sorg , et al. May 24, 2 | 2005-05-24 |
| Optical element deformation system Grant 6,844,994 - Melzer , et al. January 18, 2 | 2005-01-18 |
| Catadioptric objective Grant 6,842,294 - Holderer , et al. January 11, 2 | 2005-01-11 |
| Optical measuring system, and a projection objective App 20040257675 - Holderer, Hubert ; et al. | 2004-12-23 |
| Optical element with an optical axis App 20040257683 - Petasch, Thomas ; et al. | 2004-12-23 |
| Collector with fastening devices for fastening mirror shells App 20040227103 - Singer, Wolfgang ; et al. | 2004-11-18 |
| Mounting apparatus for an optical element Grant 6,816,325 - Becker , et al. November 9, 2 | 2004-11-09 |
| Adjustment arrangement of an optical element App 20040174619 - Beck, Klaus ; et al. | 2004-09-09 |
| Mount for an optical element in an optical imaging device Grant 6,744,574 - Weber , et al. June 1, 2 | 2004-06-01 |
| Oscillation damping system Grant 6,700,715 - Sorg , et al. March 2, 2 | 2004-03-02 |
| Mounting apparatus for an optical element Grant 6,580,570 - Becker , et al. June 17, 2 | 2003-06-17 |
| Mount for an optical element in an optical imaging device App 20030058551 - Weber, Ulrich ; et al. | 2003-03-27 |
| Catadioptric objective App 20020181125 - Holderer, Hubert ; et al. | 2002-12-05 |
| Optical imaging device, in particular lens system, with at least one system diaphragm Grant 6,445,510 - Schuster , et al. September 3, 2 | 2002-09-03 |
| System for damping oscillations App 20020109437 - Sorg, Franz ; et al. | 2002-08-15 |
| Adjusting apparatus for an optical element in a lens system App 20020089766 - Moeller, Timo ; et al. | 2002-07-11 |
| Mounting apparatus for an optical element App 20020085292 - Becker, Jochen ; et al. | 2002-07-04 |
| Oscillation damping system App 20020075574 - Sorg, Franz ; et al. | 2002-06-20 |
| Assembly comprising an optical element and a mount Grant 6,392,825 - Trunz , et al. May 21, 2 | 2002-05-21 |
| Optical element deformation system App 20020048096 - Melzer, Frank ; et al. | 2002-04-25 |
| Method of straightening the supporting surfaces of supporting elements for optical elements Grant 6,366,413 - Trunz , et al. April 2, 2 | 2002-04-02 |
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