Gellineau; Antonio Arion

Patent Applications and Registrations

Patent applications and USPTO patent grants for Gellineau; Antonio Arion.The latest application filed is for "full beam metrology for x-ray scatterometry systems".

Company Profile

12.8.14

Gellineau; Antonio Arion - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Full Beam Metrology For X-Ray Scatterometry Systems App 20220268714 - Gellineau; Antonio Arion ; et al.	2022-08-25
Full beam metrology for x-ray scatterometry systems Grant 11,313,816 - Gellineau , et al. April 26, 2	2022-04-26
Process Monitoring Of Deep Structures With X-Ray Scatterometry App 20210407864 - Gellineau; Antonio Arion ; et al.	2021-12-30
Process monitoring of deep structures with X-ray scatterometry Grant 11,145,559 - Gellineau , et al. October 12, 2	2021-10-12
Methods And Systems For Overlay Measurement Based On Soft X-Ray Scatterometry App 20210207956 - Shchegrov; Andrei V. ; et al.	2021-07-08
On-device metrology using target decomposition Grant 10,983,227 - Hench , et al. April 20, 2	2021-04-20
Transmission Small-Angle X-Ray Scattering Metrology System App 20210088325 - Shchegrov; Andrei V. ; et al.	2021-03-25
Methods And Systems For Combining X-Ray Metrology Data Sets To Improve Parameter Estimation App 20200335406 - Liman; Christopher ; et al.	2020-10-22
Full Beam Metrology For X-Ray Scatterometry Systems App 20200300790 - Gellineau; Antonio Arion ; et al.	2020-09-24
Process Monitoring Of Deep Structures With X-Ray Scatterometry App 20200303265 - Gellineau; Antonio Arion ; et al.	2020-09-24
Full beam metrology for X-ray scatterometry systems Grant 10,775,323 - Gellineau , et al. Sept	2020-09-15
Transmission small-angle X-ray scattering metrology system Grant 10,767,978 - Shchegrov , et al. Sep	2020-09-08
Process monitoring of deep structures with X-ray scatterometry Grant 10,727,142 - Gellineau , et al.	2020-07-28
Semiconductor metrology with information from multiple processing steps Grant 10,504,759 - Kuznetsov , et al. Dec	2019-12-10
Methods And Systems For Real Time Measurement Control App 20190293578 - Gellineau; Antonio Arion	2019-09-26
X-ray scatterometry metrology for high aspect ratio structures Grant 10,352,695 - Dziura , et al. July 16, 2	2019-07-16
On-Device Metrology Using Target Decomposition App 20190049602 - Hench; John ; et al.	2019-02-14
Process Monitoring Of Deep Structures With X-Ray Scatterometry App 20180350699 - Gellineau; Antonio Arion ; et al.	2018-12-06
Transmission Small-Angle X-Ray Scattering Metrology System App 20180299259 - Shchegrov; Andrei V. ; et al.	2018-10-18
Full Beam Metrology For X-Ray Scatterometry Systems App 20180106735 - Gellineau; Antonio Arion ; et al.	2018-04-19
Semiconductor Metrology With Information From Multiple Processing Steps App 20170287751 - Kuznetsov; Alexander ; et al.	2017-10-05
X-Ray Scatterometry Metrology For High Aspect Ratio Structures App 20170167862 - Dziura; Thaddeus Gerard ; et al.	2017-06-15

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