Gelatos; Avgerinos V.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Gelatos; Avgerinos V..The latest application filed is for "multi-step pre-clean for selective metal gap fill".

Company Profile

20.56.67

Gelatos; Avgerinos V. - Scotts Valley CA
Gelatos; Avgerinos V. - Redwood City CA
- Redwood City CA US
Gelatos; Avgerinos V. - Austin TX

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition Grant 11,430,661 - Kuratomi , et al. August 30, 2	2022-08-30
Multi-step Pre-clean For Selective Metal Gap Fill App 20220270871 - Cen; Xi ; et al.	2022-08-25
Metal Cap For Contact Resistance Reduction App 20220231137 - Mebarki; Bencherki ; et al.	2022-07-21
Ruthenium Reflow For Via Fill App 20220223472 - Luo; Yi ; et al.	2022-07-14
Process kit for a substrate support Grant 11,387,134 - Mustafa , et al. July 12, 2	2022-07-12
Multi-step pre-clean for selective metal gap fill Grant 11,380,536 - Cen , et al. July 5, 2	2022-07-05
Method for forming a metal gapfill Grant 11,355,391 - Cen , et al. June 7, 2	2022-06-07
Multi-Step Pre-Clean for Selective Metal Gap Fill App 20210351032 - Cen; Xi ; et al.	2021-11-11
Apparatuses And Methods Of Protecting Nickel And Nickel Containing Components With Thin Films App 20210319983 - LEI; Pingyan ; et al.	2021-10-14
Processing system and method of forming a contact Grant 11,114,320 - Thareja , et al. September 7, 2	2021-09-07
Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten App 20210225655 - Fu; Xinyu ; et al.	2021-07-22
Methods for depositing fluorine/carbon-free conformal tungsten Grant 10,985,023 - Fu , et al. April 20, 2	2021-04-20
Method For Forming A Metal Gapfill App 20200303250 - CEN; Xi ; et al.	2020-09-24
Remote hydrogen plasma titanium deposition to enhance selectivity and film uniformity Grant 10,770,300 - Kuratomi , et al. Sep	2020-09-08
Methods And Apparatus For Filling A Feature Disposed In A Substrate App 20200251340 - Kind Code	2020-08-06
Methods And Apparatus For Enhancing Selectivity Of Titanium And Titanium Silicides During Chemical Vapor Deposition App 20200211852 - KURATOMI; TAKASHI ; et al.	2020-07-02
Method of enabling seamless cobalt gap-fill Grant 10,699,946 - Zope , et al.	2020-06-30
Processing System And Method Of Forming A Contact App 20200203481 - THAREJA; Gaurav ; et al.	2020-06-25
Pre-clean of silicon germanium for pre-metal contact at source and drain and pre-high K at channel Grant 10,615,034 - Zheng , et al.	2020-04-07
Methods for depositing semiconductor films Grant 10,535,527 - Xu , et al. Ja	2020-01-14
Remote Hydrogen Plasma Titanium Deposition to Enhance Selectivity and Film Uniformity App 20200013627 - Kuratomi; Takashi ; et al.	2020-01-09
Pre-clean Of Silicon Germanium For Pre-metal Contact At Source And Drain And Pre-high K At Channel App 20190326115 - Zheng; Bo ; et al.	2019-10-24
Remote hydrogen plasma titanium deposition to enhance selectivity and film uniformity Grant 10,418,246 - Kuratomi , et al. Sept	2019-09-17
Process Kit For A Substrate Support App 20190229007 - MUSTAFA; MUHANNAD ; et al.	2019-07-25
Method of enabling seamless cobalt gap-fill Grant 10,269,633 - Zope , et al.	2019-04-23
Substrate processing apparatus and methods Grant 10,256,076 - Toh , et al.	2019-04-09
Substrate Processing Chamber Having Heated Showerhead Assembly App 20190078210 - GUNGOR; FARUK ; et al.	2019-03-14
Methods for selective deposition of metal silicides via atomic layer deposition cycles Grant 10,199,230 - Ganguli , et al. Fe	2019-02-05
Methods For Depositing Semiconductor Films App 20190019684 - Xu; Yi ; et al.	2019-01-17
Pre-clean of silicon germanium for pre-metal contact at source and drain and pre-high k at channel Grant 10,163,630 - Zheng , et al. Dec	2018-12-25
Methods for dry etching cobalt metal using fluorine radicals Grant 10,163,656 - Zope , et al. Dec	2018-12-25
Methods for thermally forming a selective cobalt layer Grant 10,043,709 - Ai , et al. August 7, 2	2018-08-07
Device conformity control by low temperature, low pressure, inductively coupled ammonia-nitrogen trifluoride plasma Grant 10,008,388 - Hsieh , et al. June 26, 2	2018-06-26
Deposition Of Metal Films App 20180158686 - Gelatos; Avgerinos V. ; et al.	2018-06-07
Methods of treating nitride films Grant 9,966,275 - Biggs , et al. May 8, 2	2018-05-08
Remote Hydrogen Plasma Titanium Deposition to Enhance Selectivity and Film Uniformity App 20180122647 - Kuratomi; Takashi ; et al.	2018-05-03
Method Of Enabling Seamless Cobalt Gap-fill App 20180068890 - ZOPE; Bhushan N. ; et al.	2018-03-08
Pre-clean Of Silicon Germanium For Pre-metal Contact At Source And Drain And Pre-high K At Channel App 20170365468 - ZHENG; Bo ; et al.	2017-12-21
Method of enabling seamless cobalt gap-fill Grant 9,842,769 - Zope , et al. December 12, 2	2017-12-12
Device Conformity Control By Low Temperature, Low Pressure, Inductively Coupled Ammonia-nitrogen Trifluoride Plasma App 20170301556 - HSIEH; Ping Han ; et al.	2017-10-19
Apparatus for variable substrate temperature control Grant 9,783,889 - Tzu , et al. October 10, 2	2017-10-10
Pre-clean of silicon germanium for pre-metal contact at source and drain and pre-high K at channel Grant 9,735,009 - Zheng , et al. August 15, 2	2017-08-15
Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten App 20170194156 - Fu; Xinyu ; et al.	2017-07-06
Methods Of Treating Nitride Films App 20170178927 - Biggs; Brent ; et al.	2017-06-22
Method of enabling seamless cobalt gap-fill Grant 9,685,371 - Zope , et al. June 20, 2	2017-06-20
Methods for preferential growth of cobalt within substrate features Grant 9,637,819 - Zope , et al. May 2, 2	2017-05-02
Substrate Processing Apparatus And Methods App 20170117118 - TOH; Shi Wei ; et al.	2017-04-27
Method Of Enabling Seamless Cobalt Gap-fill App 20170084486 - ZOPE; Bhushan N. ; et al.	2017-03-23
Methods for depositing fluorine/carbon-free conformal tungsten Grant 9,601,339 - Fu , et al. March 21, 2	2017-03-21
Method of reducing tungsten film roughness and resistivity Grant 9,546,419 - Khandelwal , et al. January 17, 2	2017-01-17
Cobalt removal for chamber clean or pre-clean process Grant 9,528,183 - Wu , et al. December 27, 2	2016-12-27
Methods For Selective Deposition Of Metal Silicides Via Atomic Layer Deposition Cycles App 20160322229 - GANGULI; Seshadri ; et al.	2016-11-03
Method Of Enabling Seamless Cobalt Gap-fill App 20160247718 - ZOPE; Bhushan N. ; et al.	2016-08-25
Methods For Thermally Forming A Selective Cobalt Layer App 20160133563 - AI; HUA ; et al.	2016-05-12
Method of enabling seamless cobalt gap-fill Grant 9,330,939 - Zope , et al. May 3, 2	2016-05-03
Surface Treatment To Improve Cctba Based Cvd Co Nucleation On Dielectric Substrate App 20160104639 - Zope; Bhushan N. ; et al.	2016-04-14
Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten App 20160104624 - Fu; Xinyu ; et al.	2016-04-14
Pre-clean Of Silicon Germanium For Pre-metal Contact At Source And Drain And Pre-high K At Channel App 20160079062 - ZHENG; Bo ; et al.	2016-03-17
Plasma treatment of film for impurity removal Grant 9,275,865 - Wang , et al. March 1, 2	2016-03-01
Integrated platform for fabricating n-type metal oxide semiconductor (NMOS) devices Grant 9,230,835 - Gelatos , et al. January 5, 2	2016-01-05
Methods for depositing fluorine/carbon-free conformal tungsten Grant 9,230,815 - Fu , et al. January 5, 2	2016-01-05
Surface treatment to improve CCTBA based CVD co nucleation on dielectric substrate Grant 9,218,980 - Zope , et al. December 22, 2	2015-12-22
Methods For Preferential Growth Of Cobalt Within Substrate Features App 20150140233 - ZOPE; BHUSHAN N. ; et al.	2015-05-21
Methods For Dry Etching Cobalt Metal Using Fluorine Radicals App 20150140812 - ZOPE; BHUSHAN N. ; et al.	2015-05-21
Method Of Enabling Seamless Cobalt Gap-fill App 20150093891 - ZOPE; Bhushan N. ; et al.	2015-04-02
Surface Treatment To Improve Cctba Based Cvd Co Nucleation On Dielectric Substrate App 20150079784 - ZOPE; Bhushan N. ; et al.	2015-03-19
Cobalt Substrate Processing Systems, Apparatus, And Methods App 20150030771 - Gelatos; Avgerinos V. ; et al.	2015-01-29
Methods and apparatus for thermal based substrate processing with variable temperature capability Grant 08920564 -	2014-12-30
Methods and apparatus for thermal based substrate processing with variable temperature capability Grant 8,920,564 - Tzu , et al. December 30, 2	2014-12-30
Cobalt Removal For Chamber Clean Or Pre-clean Process App 20140326276 - WU; Kai ; et al.	2014-11-06
Integrated Platform For Fabricating N-type Metal Oxide Semiconductor (nmos) Devices App 20140273515 - GELATOS; AVGERINOS V. ; et al.	2014-09-18
High temperature tungsten metallization process Grant 8,835,311 - Collins , et al. September 16, 2	2014-09-16
Temperature controlled lid assembly for tungsten nitride deposition Grant 8,821,637 - Gelatos , et al. September 2, 2	2014-09-02
High Temperature Tungsten Metallization Process App 20140187038 - COLLINS; Joshua ; et al.	2014-07-03
Method Of Reducing Tungsten Film Roughness And Resistivity App 20140147589 - KHANDELWAL; AMIT ; et al.	2014-05-29
Methods For Depositing Fluorine/carbon-free Conformal Tungsten App 20140120723 - Fu; Xinyu ; et al.	2014-05-01
Plasma Treatment Of Film For Impurity Removal App 20140120700 - WANG; Benjamin C. ; et al.	2014-05-01
Method For Removing Native Oxide And Residue From A Germanium Or Iii-v Group Containing Surface App 20140011339 - ZHENG; Bo ; et al.	2014-01-09
High temperature tungsten metallization process Grant 8,617,985 - Collins , et al. December 31, 2	2013-12-31
Method Of Enabling Seamless Cobalt Gap-fill App 20130260555 - ZOPE; Bhushan N. ; et al.	2013-10-03
Apparatus For Variable Substrate Temperature Control App 20130247826 - TZU; GWO-CHUAN ; et al.	2013-09-26
Atomic layer deposition of tungsten materials Grant 8,513,116 - Khandelwal , et al. August 20, 2	2013-08-20
High Temperature Tungsten Metallization Process App 20130109172 - COLLINS; JOSHUA ; et al.	2013-05-02
Atomic Layer Deposition Of Tungsten Materials App 20120244699 - KHANDELWAL; AMIT ; et al.	2012-09-27
Atomic layer deposition of tungsten materials Grant 8,211,799 - Khandelwal , et al. July 3, 2	2012-07-03
Apparatus for cyclical depositing of thin films Grant 8,123,860 - Thakur , et al. February 28, 2	2012-02-28
Methods And Apparatus For Thermal Based Substrate Processing With Variable Temperature Capability App 20120003388 - TZU; GWO-CHUAN ; et al.	2012-01-05
Methods For Forming Tungsten-containing Layers App 20120003833 - KHANDELWAL; AMIT ; et al.	2012-01-05
Atomic Layer Deposition Of Tungsten Materials App 20110244682 - KHANDELWAL; AMIT ; et al.	2011-10-06
Deposition and densification process for titanium nitride barrier layers Grant 7,838,441 - Khandelwal , et al. November 23, 2	2010-11-23
Methods for depositing tungsten layers employing atomic layer deposition techniques Grant 7,745,333 - Lai , et al. June 29, 2	2010-06-29
Vapor deposition of tungsten materials Grant 7,732,327 - Lee , et al. June 8, 2	2010-06-08
Ruthenium or cobalt as an underlayer for tungsten film deposition Grant 7,691,442 - Gandikota , et al. April 6, 2	2010-04-06
Deposition And Densification Process For Titanium Nitride Barrier Layers App 20090280640 - KHANDELWAL; AMIT ; et al.	2009-11-12
Ruthenium As An Underlayer For Tungsten Film Deposition App 20090142474 - Gandikota; Srinivas ; et al.	2009-06-04
Deposition and densification process for titanium nitride barrier layers Grant 7,521,379 - Khandelwal , et al. April 21, 2	2009-04-21
Vapor Deposition Of Tungsten Materials App 20090081866 - LEE; SANG-HYEOB ; et al.	2009-03-26
Apparatus For Cyclical Depositing Of Thin Films App 20090056626 - THAKUR; RANDHIR P.S. ; et al.	2009-03-05
Atomic Layer Deposition Of Tungsten Materials App 20090053893 - Khandelwal; Amit ; et al.	2009-02-26
Ruthenium as an underlayer for tungsten film deposition Grant 7,429,402 - Gandikota , et al. September 30, 2	2008-09-30
Process For Tungsten Nitride Deposition By A Temperature Controlled Lid Assembly App 20080206987 - Gelatos; Avgerinos V. ; et al.	2008-08-28
Temperature Controlled Lid Assembly For Tungsten Nitride Deposition App 20080202425 - Gelatos; Avgerinos V. ; et al.	2008-08-28
Deposition And Densification Process For Titanium Nitride Barrier Layers App 20080085611 - KHANDELWAL; AMIT ; et al.	2008-04-10
Apparatus For Cyclical Depositing Of Thin Films App 20070095285 - Thakur; Randhir P.S. ; et al.	2007-05-03
Apparatus for cyclical deposition of thin films Grant 7,175,713 - Thakur , et al. February 13, 2	2007-02-13
Electroless deposition process on a silicide contact App 20060246217 - Weidman; Timothy W. ; et al.	2006-11-02
Ruthenium as an underlayer for tungsten film deposition App 20060128150 - Gandikota; Srinivas ; et al.	2006-06-15
Heated ceramic substrate support with protective coating App 20050194374 - Gelatos, Avgerinos V. ; et al.	2005-09-08
Metal nitride formation App 20030224217 - Byun, Jeong Soo ; et al.	2003-12-04
Apparatus for cyclical deposition of thin films App 20030172872 - Thakur, Randhir P.S. ; et al.	2003-09-18
Copper interconnect structure and method of formation Grant 6,174,810 - Islam , et al. January 16, 2	2001-01-16
Process for forming copper interconnect structure Grant 5,391,517 - Gelatos , et al. February 21, 1	1995-02-21
Semiconductor device having a ternary boron nitride film and a method for forming the same Grant 5,324,690 - Gelatos , et al. June 28, 1	1994-06-28
Method for forming metallization in an integrated circuit Grant 5,275,973 - Gelatos January 4, 1	1994-01-04
Method for polish planarizing a semiconductor substrate by using a boron nitride polish stop Grant 5,064,683 - Poon , et al. November 12, 1	1991-11-12

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