loadpatents
Patent applications and USPTO patent grants for Gehl; Bernhard.The latest application filed is for "method for closing openings in a flexible diaphragm of a mems element".
Patent | Date |
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Method For Closing Openings In A Flexible Diaphragm Of A Mems Element App 20210229983 - Gehl; Bernhard ;   et al. | 2021-07-29 |
MEMS microphone system Grant 11,012,789 - Hermes , et al. May 18, 2 | 2021-05-18 |
MEMS transducer system for pressure and acoustic sensing Grant 10,981,777 - Doller , et al. April 20, 2 | 2021-04-20 |
System of non-acoustic sensor combined with MEMS microphone Grant 10,934,160 - Doller , et al. March 2, 2 | 2021-03-02 |
Method for producing thin MEMS wafers Grant 10,793,430 - Loiseau , et al. October 6, 2 | 2020-10-06 |
MEMS microphone system having an electrode assembly Grant 10,555,088 - Meisel , et al. Fe | 2020-02-04 |
Microphone with encapsulated moving electrode Grant 10,555,090 - Reinmuth , et al. Fe | 2020-02-04 |
MEMS Transducer System for Pressure and Acoustic Sensing App 20190389721 - Doller; Andrew ;   et al. | 2019-12-26 |
System of Non-Acoustic Sensor Combined with MEMS Microphone App 20190352176 - Doller; Andrew ;   et al. | 2019-11-21 |
MEMS microphone system and method Grant 10,349,188 - Meisel , et al. July 9, 2 | 2019-07-09 |
MEMS Microphone System and Method App 20190116429 - Meisel; Daniel C. ;   et al. | 2019-04-18 |
Method For Producing Thin Mems Wafers App 20190092631 - Loiseau; Sebastien ;   et al. | 2019-03-28 |
MEMS Microphone System App 20190098418 - Hermes; Christoph ;   et al. | 2019-03-28 |
MEMS pressure sensor with multiple membrane electrodes Grant 10,183,857 - Graham , et al. Ja | 2019-01-22 |
Microphone with Encapsulated Moving Electrode App 20180352341 - Reinmuth; Jochen ;   et al. | 2018-12-06 |
MEMS Microphone System having an Electrode Assembly App 20180146296 - Meisel; Daniel ;   et al. | 2018-05-24 |
Method for manufacturing a microphone structure and a pressure sensor structure in the layer structure of a MEMS element Grant 9,758,369 - Schoen , et al. September 12, 2 | 2017-09-12 |
Capacitive MEMS-sensor element having bond pads for the electrical contacting of the measuring capacitor electrodes Grant 9,725,300 - Stahl , et al. August 8, 2 | 2017-08-08 |
Method for manufacturing a microphone structure and a pressure sensor structure in the layer structure of a mems element App 20160304336 - Schoen; Florian ;   et al. | 2016-10-20 |
Capacitive Mems-sensor Element Having Bond Pads For The Electrical Contacting Of The Measuring Capacitor Electrodes App 20160280534 - Stahl; Heiko ;   et al. | 2016-09-29 |
MEMS membrane overtravel stop Grant 9,369,804 - Buck , et al. June 14, 2 | 2016-06-14 |
MEMS Membrane Overtravel Stop App 20160029126 - Buck; Thomas ;   et al. | 2016-01-28 |
Component having a micromechanical microphone structure, and method for manufacturing same Grant 9,042,581 - Zoellin , et al. May 26, 2 | 2015-05-26 |
Microphone component Grant 9,035,307 - Gehl , et al. May 19, 2 | 2015-05-19 |
Microphone Component App 20140191233 - GEHL; Bernhard ;   et al. | 2014-07-10 |
Mems Pressure Sensor With Multiple Membrane Electrodes App 20140054731 - Graham; Andrew ;   et al. | 2014-02-27 |
Component Having A Micromechanical Microphone Structure, And Method For Manufacturing Same App 20130010989 - Zoellin; Jochen ;   et al. | 2013-01-10 |
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