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Capacitor having tantalum oxynitride film and method for making same Grant 6,864,527 - DeBoer , et al. March 8, 2 | 2005-03-08 |
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Method for controlling deposition of dielectric films App 20050019493 - Basceri, Cem ;   et al. | 2005-01-27 |
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Memory cell with tight coupling App 20040102002 - Sandhu, Sukesh ;   et al. | 2004-05-27 |
Methods to form rhodium-rich oxygen barriers Grant 6,740,554 - Yang , et al. May 25, 2 | 2004-05-25 |
Method and apparatus for delivering precursors App 20040083963 - Dando, Ross S. ;   et al. | 2004-05-06 |
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Memory cell capacitor structure and method of formation App 20030062558 - Yang, Sam ;   et al. | 2003-04-03 |
Dielectric films and capacitor structures including same Grant 6,525,365 - Basceri , et al. February 25, 2 | 2003-02-25 |
Rhodium-rich oxygen barriers Grant 6,518,610 - Yang , et al. February 11, 2 | 2003-02-11 |
Integrated capacitors fabricated with conductive metal oxides App 20030025142 - Rhodes, Howard E. ;   et al. | 2003-02-06 |
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Methods to form rhodium-rich oxygen barriers App 20020190303 - Yang, Haining ;   et al. | 2002-12-19 |
Integrated capacitors fabricated with conductive metal oxides Grant 6,492,241 - Rhodes , et al. December 10, 2 | 2002-12-10 |
Fabrication of dram and other semiconductor devices with an insulating film using a wet rapid thermal oxidation process App 20020151107 - Weimer, Ronald A. ;   et al. | 2002-10-17 |
Capacitor having tantalum oxynitride film and method for making same Grant 6,458,645 - DeBoer , et al. October 1, 2 | 2002-10-01 |
Method for controlling deposition of dielectric films App 20020132374 - Basceri, Cem ;   et al. | 2002-09-19 |
Rhodium-rich oxygen barriers App 20020113260 - Yang, Haining ;   et al. | 2002-08-22 |
Boride electrodes and barriers for cell dielectrics App 20020079531 - Al-Shareef, Husam N. ;   et al. | 2002-06-27 |
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Memory cell capacitor structure and method of formation App 20020036313 - Yang, Sam ;   et al. | 2002-03-28 |
Fabrication Of Dram And Other Semiconductor Devices With An Insulating Film Using A Wet Rapid Thermal Oxidation Process App 20010051406 - WEIMER, RONALD A. ;   et al. | 2001-12-13 |
Capacitor Having Tantalum Oxynitride Film And Method For Making Same App 20010011740 - DEBOER, SCOTT JEFFREY ;   et al. | 2001-08-09 |
Boride electrodes and barriers for cell dielectrics Grant 6,111,285 - Al-Shareef , et al. August 29, 2 | 2000-08-29 |