Ge; Zhenbin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ge; Zhenbin.The latest application filed is for "high pressure rf-dc sputtering and methods to improve film uniformity and step-coverage of this process".

Company Profile

6.28.30

Ge; Zhenbin - San Jose CA
Ge; Zhenbin - Campbell CA
Ge; Zhenbin - Santa Clara CA US
Ge; Zhenbin - San Mateo CA
Ge; Zhenbin - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Displays with direct-lit backlight units Grant 11,333,924 - Lv , et al. May 17, 2	2022-05-17
Methods for reducing material overhang in a feature of a substrate Grant 11,162,170 - Ritchie , et al. November 2, 2	2021-11-02
High Pressure Rf-dc Sputtering And Methods To Improve Film Uniformity And Step-coverage Of This Process App 20200357616 - ALLEN; Adolph Miller ; et al.	2020-11-12
High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process Grant 10,763,090 - Allen , et al. Sep	2020-09-01
Light projector with integrated integrity sensor Grant 10,667,341 - Kriman , et al.	2020-05-26
Electronic devices having scratch-resistant antireflection coatings Grant 10,591,645 - Ge , et al.	2020-03-17
Dual-direction chemical delivery system for ALD/CVD chambers Grant 10,400,335 - Ge , et al. Sep	2019-09-03
Counter based time compensation to reduce process shifting in reactive magnetron sputtering reactor Grant 10,400,327 - Chowdhury , et al. Sep	2019-09-03
Electronic device with light diffuser Grant 10,334,184 - Wang , et al.	2019-06-25
Auto capacitance tuner current compensation to control one or more film properties through target life Grant 10,266,940 - Ge , et al.	2019-04-23
RF power compensation to control film stress, density, resistivity, and/or uniformity through target life Grant 10,242,873 - Allen , et al.	2019-03-26
Process kit for deposition and etching Grant 10,099,245 - Forster , et al. October 16, 2	2018-10-16
Target profile for a physical vapor deposition chamber target Grant D825,505 - Hanson , et al. August 14, 2	2018-08-14
Electronic Devices Having Scratch-Resistant Antireflection Coatings App 20180081085 - Ge; Zhenbin ; et al.	2018-03-22
Electronic Devices Having Scratch-Resistant Antireflection Coatings App 20180081086 - Wang; Ligang ; et al.	2018-03-22
Electronic Device With Light Diffuser App 20180081093 - Wang; Ligang ; et al.	2018-03-22
Dual-Direction Chemical Delivery System For ALD/CVD Chambers App 20170362710 - Ge; Zhenbin ; et al.	2017-12-21
Target profile for a physical vapor deposition chamber target Grant D798,248 - Hanson , et al. September 26, 2	2017-09-26
Dual-direction chemical delivery system for ALD/CVD chambers Grant 9,765,432 - Ge , et al. September 19, 2	2017-09-19
Adjustable solid film camera aperture Grant 9,759,984 - Xu , et al. September 12, 2	2017-09-12
Methods And Apparatus For Stable Substrate Processing With Multiple Rf Power Supplies App 20170183768 - GE; ZHENBIN ; et al.	2017-06-29
Crystalline orientation and overhang control in collision based RF plasmas Grant 9,611,539 - Ge , et al. April 4, 2	2017-04-04
Methods and apparatus for stable substrate processing with multiple RF power supplies Grant 9,593,410 - Ge , et al. March 14, 2	2017-03-14
High Pressure Rf-dc Sputtering And Methods To Improve Film Uniformity And Step-coverage Of This Process App 20170029941 - ALLEN; Adolph Miller ; et al.	2017-02-02
Selectively groundable cover ring for substrate process chambers Grant 9,472,443 - Rasheed , et al. October 18, 2	2016-10-18
Dual-Direction Chemical Delivery System For ALD/CVD Chambers App 20160273108 - Ge; Zhenbin ; et al.	2016-09-22
Auto Capacitance Tuner Current Compensation To Control One Or More Film Properties Through Target Life App 20160244874 - GE; Zhenbin ; et al.	2016-08-25
Counter Based Time Compensation To Reduce Process Shifting In Reactive Magnetron Sputtering Reactor App 20160222503 - Chowdhury; Mohammad Kamruzzaman ; et al.	2016-08-04
Dual-direction chemical delivery system for ALD/CVD chambers Grant 9,353,440 - Ge , et al. May 31, 2	2016-05-31
Methods of forming a metal containing layer on a substrate with high uniformity and good profile control Grant 9,218,961 - Ge , et al. December 22, 2	2015-12-22
Rf Power Compensation To Control Film Stress, Density, Resistivity, And/or Uniformity Through Target Life App 20150252467 - ALLEN; ADOLPH MILLER ; et al.	2015-09-10
Methods For Reducing Material Overhang In A Feature Of A Substrate App 20150221486 - RITCHIE; ALAN A. ; et al.	2015-08-06
Dual-Direction Chemical Delivery System for ALD/CVD Chambers App 20150176126 - Ge; Zhenbin ; et al.	2015-06-25
Magnetron design for extended target life in radio frequency (RF) plasmas Grant 9,028,659 - Ritchie , et al. May 12, 2	2015-05-12
Methods for processing a substrate using a selectively grounded and movable process kit ring Grant 8,865,012 - Ge , et al. October 21, 2	2014-10-21
Methods For Processing A Substrate Using A Selectively Grounded And Movable Process Kit Ring App 20140273483 - GE; ZHENBIN ; et al.	2014-09-18
Selectively Groundable Cover Ring For Substrate Process Chambers App 20140262763 - RASHEED; MUHAMMAD M. ; et al.	2014-09-18
Process Kit For Deposition And Etching App 20140262026 - FORSTER; JOHN ; et al.	2014-09-18
Methods And Apparatus For Stable Substrate Processing With Multiple Rf Power Supplies App 20140251788 - GE; Zhenbin ; et al.	2014-09-11
Magnetron Design For Extended Target Life In Radio Frequency (rf) Plasmas App 20140042023 - RITCHIE; ALAN ; et al.	2014-02-13
Crystalline Orientation And Overhang Control In Collision Based Rf Plasmas App 20130192980 - GE; ZHENBIN ; et al.	2013-08-01
Methods Of Forming A Metal Containing Layer On A Substrate With High Uniformity And Good Profile Control App 20130075246 - Ge; Zhenbin ; et al.	2013-03-28
Method and apparatus for trench and via profile modification Grant 8,268,684 - Chang , et al. September 18, 2	2012-09-18
Selective etching of silicon nitride Grant 8,252,696 - Lu , et al. August 28, 2	2012-08-28
Method And Apparatus For Trench And Via Profile Modification App 20110294258 - CHANG; MEI ; et al.	2011-12-01
Integration sequences with top surface profile modification Grant 8,043,933 - Kao , et al. October 25, 2	2011-10-25
Method and apparatus for trench and via profile modification Grant 7,994,002 - Chang , et al. August 9, 2	2011-08-09
Methods Of Thin Film Process App 20110151676 - Ingle; Nitin K. ; et al.	2011-06-23
Methods of thin film process Grant 7,939,422 - Ingle , et al. May 10, 2	2011-05-10
High Pressure Rf-dc Sputtering And Methods To Improve Film Uniformity And Step-coverage Of This Process App 20100252417 - Allen; Adolph Miller ; et al.	2010-10-07
Integration Sequences With Top Surface Profile Modification App 20100129982 - Kao; Chien-Teh ; et al.	2010-05-27
Method And Apparatus For Trench And Via Profile Modification App 20100129958 - Chang; Mei ; et al.	2010-05-27
Nf3/h2 Remote Plasma Process With High Etch Selectivity Of Psg/bpsg Over Thermal Oxide And Low Density Surface Defects App 20100099263 - Kao; Chien-Teh ; et al.	2010-04-22
Process With Saturation At Low Etch Amount For High Contact Bottom Cleaning Efficiency For Chemical Dry Clean Process App 20090191703 - Lu; Xinliang ; et al.	2009-07-30
Selective Etching Of Silicon Nitride App 20090104782 - LU; XINLAING ; et al.	2009-04-23
Methods Of Thin Film Process App 20080182382 - Ingle; Nitin K. ; et al.	2008-07-31

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