Gayazov; Robert Rafilevitch

Patent Applications and Registrations

Patent applications and USPTO patent grants for Gayazov; Robert Rafilevitch.The latest application filed is for "electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby".

Company Profile

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Gayazov; Robert Rafilevitch - Troitsk RU

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Lithographic apparatus, radiation system and device manufacturing method Grant 8,018,574 - Gayazov , et al. September 13, 2	2011-09-13
Radiation source, lithographic apparatus and device manufacturing method Grant 7,528,395 - Koshelev , et al. May 5, 2	2009-05-05
Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,462,851 - Banine , et al. December 9, 2	2008-12-09
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,335,900 - Koshelev , et al. February 26, 2	2008-02-26
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,208,746 - Koshelev , et al. April 24, 2	2007-04-24
Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby App 20070069159 - Banine; Vadim Yevgenyevich ; et al.	2007-03-29
Lithographic apparatus, radiation system and device manufacturing method App 20070001126 - Gayazov; Robert Rafilevitch ; et al.	2007-01-04
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby App 20060071180 - Koshelev; Konstantin Nikolaevitch ; et al.	2006-04-06
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby App 20060011864 - Koshelev; Konstantin Nikolaevitch ; et al.	2006-01-19
Radiation source, lithographic apparatus and device manufacturing method App 20040105082 - Koshelev, Konstantin Nikolaevitch ; et al.	2004-06-03

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