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Lithography Apparatus And Device Manufacturing Method
App 20220308459 - EUMMELEN; Erik Henricus Egidius Catharina ; et al. | 2022-09-29 |
Fluid handling structure for lithographic apparatus
Grant 11,454,892 - Van Den Eijnden , et al. September 27, 2 | 2022-09-27 |
Device manufacturing method and computer program
Grant 11,372,339 - Gattobigio , et al. June 28, 2 | 2022-06-28 |
Lithography apparatus and device manufacturing method
Grant 11,372,336 - Eummelen , et al. June 28, 2 | 2022-06-28 |
Device Manufacturing Method And Computer Program
App 20220187717 - GATTOBIGIO; Giovanni Luca ; et al. | 2022-06-16 |
Fluid Handling Structure And Lithographic Apparatus
App 20220137519 - Eummelen; Erik Henricus Egidius Catharina ; et al. | 2022-05-05 |
Fluid Handling Structure, A Lithographic Apparatus, A Method Of Using A Fluid Handling Structure And A Method Of Using A Lithographic Apparatus
App 20220035254 - STEGEN; Raphael Nico Johan ; et al. | 2022-02-03 |
Fluid handling structure and lithographic apparatus
Grant 11,231,653 - Eummelen , et al. January 25, 2 | 2022-01-25 |
A Process Tool And An Inspection Method
App 20210349397 - STEGEN; Raphael Nico Johan ; et al. | 2021-11-11 |
Fluid handling structure, lithographic apparatus, and method of using a fluid handling structure
Grant 11,156,921 - Stegen , et al. October 26, 2 | 2021-10-26 |
Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus
Grant 11,143,969 - Gattobigio , et al. October 12, 2 | 2021-10-12 |
Fluid Handling Structure For Lithographic Apparatus
App 20210263424 - VAN DEN EIJNDEN; Pepijn ; et al. | 2021-08-26 |
Cleaning device and method of cleaning
Grant 11,086,239 - Yu , et al. August 10, 2 | 2021-08-10 |
Fluid Handling Structure, Lithographic Apparatus, And Method Of Using A Fluid Handling Structure
App 20210191275 - STEGEN; Raphael Nico Johan ; et al. | 2021-06-24 |
Fluid Handling Structure And Lithographic Apparatus
App 20210181641 - EUMMELEN; Erik Henricus Egidius Catharina ; et al. | 2021-06-17 |
Fluid handling structure for lithographic apparatus
Grant 11,029,607 - Van Den Eijnden , et al. June 8, 2 | 2021-06-08 |
Cleaning Device And Method Of Cleaning
App 20210116824 - YU; Miao ; et al. | 2021-04-22 |
Fluid handling structure and lithographic apparatus
Grant 10,969,695 - Eummelen , et al. April 6, 2 | 2021-04-06 |
Lithography Apparatus And Device Manufacturing Method
App 20210096471 - EUMMELEN; Erik Henricus Egidius Catharina ; et al. | 2021-04-01 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method
App 20210088912 - ROPS; Cornelius Maria ; et al. | 2021-03-25 |
Fluid Handling Structure For Lithographic Apparatus
App 20200409270 - VAN DEN EIJNDEN; Pepijn ; et al. | 2020-12-31 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method
Grant 10,859,919 - Rops , et al. December 8, 2 | 2020-12-08 |
Inspection substrate and an inspection method
Grant 10,725,390 - Saeed , et al. | 2020-07-28 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method
App 20200166851 - ROPS; Cornelius Maria ; et al. | 2020-05-28 |
Method Of Performance Testing Working Parameters Of A Fluid Handling Structure And A Method Of Detecting Loss Of Immersion Liqui
App 20200150545 - GATTOBIGIO; Giovanni Luca ; et al. | 2020-05-14 |
Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus
Grant 10,571,810 - Van Sommeren , et al. Feb | 2020-02-25 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method
Grant 10,551,748 - Rops , et al. Fe | 2020-02-04 |
Fluid Handling Structure And Lithographic Apparatus
App 20200004162 - EUMMELEN; Erik Henricus Egidius Catharina ; et al. | 2020-01-02 |
Fluid handling structure and lithographic apparatus
Grant 10,416,571 - Eummelen , et al. Sept | 2019-09-17 |
Substrate Table, A Lithographic Apparatus And A Method Of Operating A Lithographic Apparatus
App 20190265597 - VAN SOMMEREN; Daan Daniel Johannes Antonius ; et al. | 2019-08-29 |
Substrate table, lithographic apparatus and method of operating a lithographic apparatus
Grant 10,317,804 - Van Sommeren , et al. | 2019-06-11 |
Inspection Substrate and an Inspection Method
App 20190146352 - Saeed; Seerwan ; et al. | 2019-05-16 |
Inspection substrate and an inspection method
Grant 10,216,100 - Saeed , et al. Feb | 2019-02-26 |
Fluid Handling Structure And Lithographic Apparatus
App 20190004434 - EUMMELEN; Erik Henricus Egidius Catharina ; et al. | 2019-01-03 |
Substrate Table, Lithographic Apparatus And Method Of Operating A Lithographic Apparatus
App 20180364584 - VAN SOMMEREN; Daan Daniel Johannes Antonius ; et al. | 2018-12-20 |
Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus
Grant 10,095,129 - Gattobigio , et al. October 9, 2 | 2018-10-09 |
Inspection Substrate and an Inspection Method
App 20180181004 - SAEED; Seerwan ; et al. | 2018-06-28 |
A Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method
App 20170363948 - ROPS; Cornelius Maria ; et al. | 2017-12-21 |
Lithographic Apparatus And A Method Of Manufacturing A Device Using A Lithographic Apparatus
App 20170131644 - GATTOBIGIO; Giovanni Luca ; et al. | 2017-05-11 |
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