| Patent | Date |
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Lanthanide precursors and deposition of lanthanide-containing films using the same
Grant 11,242,597 - Gatineau , et al. February 8, 2 | 2022-02-08 |
Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same
Grant 10,895,012 - Gatineau , et al. January 19, 2 | 2021-01-19 |
Lanthanide Precursors And Deposition Of Lanthanide-containing Films Using The Same
App 20200149156 - GATINEAU; Satoko ; et al. | 2020-05-14 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same
App 20200149165 - NOH; Wontae ; et al. | 2020-05-14 |
Etching reactants and plasma-free etching processes using the same
Grant 10,648,087 - Lansalot-Matras , et al. | 2020-05-12 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same
App 20200032397 - GATINEAU; Satoko ; et al. | 2020-01-30 |
Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same
Grant 10,465,289 - Gatineau , et al. No | 2019-11-05 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same
App 20190249305 - GATINEAU; Satoko ; et al. | 2019-08-15 |
Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same
Grant 10,364,259 - Kim , et al. | 2019-07-30 |
Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same
Grant 10,337,104 - Gatineau , et al. | 2019-07-02 |
Cobalt-containing compounds, their synthesis, and use in cobalt-containing film deposition
Grant 10,309,010 - Gatineau , et al. | 2019-06-04 |
Method for purification and storage of Til.sub.4 for Ti-containing film deposition
Grant 10,287,175 - Gatineau , et al. | 2019-05-14 |
Etching Reactants And Plasma-free Etching Processes Using The Same
App 20180327913 - LANSALOT-MATRAS; Clement ; et al. | 2018-11-15 |
Lanthanide Precursors And Deposition Of Lanthanide-containing Films Using The Same
App 20180187303 - GATINEAU; Satoko ; et al. | 2018-07-05 |
Manganese-containing film forming compositions, their synthesis, and use in film deposition
Grant 10,011,903 - Wiese , et al. July 3, 2 | 2018-07-03 |
Cobalt-containing compounds, their synthesis, and use in cobalt-containing film deposition
Grant 9,790,247 - Gatineau , et al. October 17, 2 | 2017-10-17 |
Vapor deposition methods to form group 8-containing films
Grant 9,738,971 - Nikiforov , et al. August 22, 2 | 2017-08-22 |
Cobalt-containing film forming compositions, their synthesis, and use in film deposition
Grant 9,719,167 - Gatineau , et al. August 1, 2 | 2017-08-01 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same
App 20170107618 - GATINEAU; Satoko ; et al. | 2017-04-20 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same
App 20170107623 - KIM; Daehyeon ; et al. | 2017-04-20 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same
App 20170107617 - GATINEAU; Satoko ; et al. | 2017-04-20 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same
App 20170107612 - NOH; Wontae ; et al. | 2017-04-20 |
Method for forming cobalt containing films
Grant 9,487,860 - Gatineau , et al. November 8, 2 | 2016-11-08 |
Manganese-containing Film Forming Compositions, Their Synthesis, And Use In Film Deposition
App 20160194755 - WIESE; Stefan ; et al. | 2016-07-07 |
Method For Forming Cobalt Containing Films
App 20160130699 - GATINEAU; Satoko ; et al. | 2016-05-12 |
Cobalt-containing Film Forming Compositions, Their Synthesis, And Use In Film Deposition
App 20160115588 - GATINEAU; Satoko ; et al. | 2016-04-28 |
Group 8-containing Film Forming Compositions, Their Synthesis, And Use In Film Deposition
App 20160115586 - Nikiforov; Grigory ; et al. | 2016-04-28 |
Cobalt-containing Compounds, Their Synthesis, And Use In Cobalt-containing Film Deposition
App 20160010204 - GATINEAU; Satoko ; et al. | 2016-01-14 |
Cobalt-containing Compounds, Their Synthesis, And Use In Cobalt-containing Film Deposition
App 20150368282 - GATINEAU; Satoko ; et al. | 2015-12-24 |
Titanium-aluminum alloy deposition with titanium-tetrahydroaluminate bimetallic molecules
Grant 9,187,511 - Gatineau , et al. November 17, 2 | 2015-11-17 |
Method for forming a titanium-containing layer on a substrate using an atomic layer deposition (ALD) process
Grant 8,853,075 - Gatineau , et al. October 7, 2 | 2014-10-07 |
Titanium-aluminum Alloy Deposition With Titanium-tetrahydroaluminate Bimetallic Molecules
App 20130295298 - GATINEAU; Julien ; et al. | 2013-11-07 |
Ruthenium-containing precursors for CVD and ALD
Grant 8,357,614 - Gatineau January 22, 2 | 2013-01-22 |
Deposition Of Ternary Oxide Films Containing Ruthenium And Alkali Earth Metals
App 20120070582 - GATINEAU; Satoko ; et al. | 2012-03-22 |
Deposition of ternary oxide films containing ruthenium and alkali earth metals
Grant 8,092,721 - Gatineau , et al. January 10, 2 | 2012-01-10 |
Method For Forming A Titanium-containing Layer On A Substrate Using An Atomic Layer Deposition (ald) Process
App 20110275215 - Gatineau; Satoko ; et al. | 2011-11-10 |
Ruthenium-containing Precursors For Cvd And Ald
App 20110256721 - GATINEAU; Satoko | 2011-10-20 |
Deposition Of Ternary Oxide Films Containing Ruthenium And Alkali Earth Metals
App 20090242852 - GATINEAU; Satoko ; et al. | 2009-10-01 |
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