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Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same Grant 10,895,012 - Gatineau , et al. January 19, 2 | 2021-01-19 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same App 20200032397 - GATINEAU; Satoko ;   et al. | 2020-01-30 |
Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same Grant 10,465,289 - Gatineau , et al. No | 2019-11-05 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same App 20190249305 - GATINEAU; Satoko ;   et al. | 2019-08-15 |
Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same Grant 10,364,259 - Kim , et al. | 2019-07-30 |
Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same Grant 10,337,104 - Gatineau , et al. | 2019-07-02 |
Cobalt-containing compounds, their synthesis, and use in cobalt-containing film deposition Grant 10,309,010 - Gatineau , et al. | 2019-06-04 |
Vapor Disposition Of Silicon-containing Films Using Penta-substituted Disilanes App 20190027357 - Girard; Jean-Marc ;   et al. | 2019-01-24 |
Titanium-containing film forming compositions for vapor deposition of titanium-containing films Grant 9,790,591 - Ko , et al. October 17, 2 | 2017-10-17 |
Vapor Deposition Of Silicon-containing Films Using Penta-substituted Disilanes App 20170186597 - GIRARD; Jean-Marc ;   et al. | 2017-06-29 |
Vapor deposition of silicon-containing films using penta-substituted disilanes Grant 9,633,838 - Girard , et al. April 25, 2 | 2017-04-25 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same App 20170107623 - KIM; Daehyeon ;   et al. | 2017-04-20 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same App 20170107617 - GATINEAU; Satoko ;   et al. | 2017-04-20 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same App 20170107618 - GATINEAU; Satoko ;   et al. | 2017-04-20 |
Vapor deposition of chalcogenide-containing films Grant 9,543,144 - Ishii , et al. January 10, 2 | 2017-01-10 |
Method for the deposition of a ruthenium containing film using arene diazadiene ruthenium(0) precursors Grant 9,416,443 - Gatineau , et al. August 16, 2 | 2016-08-16 |
Titanium-containing Film Forming Compositions For Vapor Deposition Of Titanium-containing Films App 20160137675 - KO; Changhee ;   et al. | 2016-05-19 |
Vapor Deposition Of Silicon-containing Films Using Penta-substituted Disilanes App 20160111272 - GIRARD; Jean-Marc ;   et al. | 2016-04-21 |
Bis(alkylimido)-bis(alkylamido)molybdenum Molecules For Deposition Of Molybdenum-containing Films App 20160040289 - GATINEAU; Julien ;   et al. | 2016-02-11 |
Bis(alkylimido)-bis(alkylamido)tungsten Molecules For Deposition Of Tungsten-containing Films App 20160032454 - GATINEAU; Julien ;   et al. | 2016-02-04 |
Chalcogenide-containing precursors, methods of making, and methods of using the same for thin film deposition Grant 9,240,319 - Gatineau , et al. January 19, 2 | 2016-01-19 |
Cobalt-containing Compounds, Their Synthesis, And Use In Cobalt-containing Film Deposition App 20160010204 - GATINEAU; Satoko ;   et al. | 2016-01-14 |
Bis(alkylimido)-bis(alkylamido)molybdenum Molecules For Deposition Of Molybdenum-containing Films App 20160002786 - GATINEAU; Julien ;   et al. | 2016-01-07 |
Nickel bis diazabutadiene precursors, their synthesis, and their use for nickel containing films depositions Grant 9,206,507 - Lansalot-Matras , et al. December 8, 2 | 2015-12-08 |
Titanium-aluminum alloy deposition with titanium-tetrahydroaluminate bimetallic molecules Grant 9,187,511 - Gatineau , et al. November 17, 2 | 2015-11-17 |
Metal heterocyclic compounds for deposition of thin films Grant 9,109,281 - Gatineau , et al. August 18, 2 | 2015-08-18 |
Chalcogenide-containing Film Forming Compositions And Vapor Deposition Of Chalcogenide-containing Films App 20150111392 - ISHII; Hana ;   et al. | 2015-04-23 |
Method For The Deposition Of A Ruthenium Containing Film Using Arene Diazadiene Ruthenium(0) Precursors App 20150056384 - Gatineau; Julien ;   et al. | 2015-02-26 |
Use of ruthenium tetroxide as a precursor and reactant for thin film depositions Grant 8,859,047 - Gatineau , et al. October 14, 2 | 2014-10-14 |
Nickel Bis Diazabutadiene Precursors, Their Synthesis, And Their Use For Nickel Containing Films Depositions App 20140242298 - Lansalot-Matras; Clement ;   et al. | 2014-08-28 |
Tellurium precursors for film deposition Grant 8,802,194 - Ishii , et al. August 12, 2 | 2014-08-12 |
Method for the deposition of a ruthenium-containing film Grant 8,753,718 - Dussarrat , et al. June 17, 2 | 2014-06-17 |
Metal Heterocyclic Compounds For Deposition Of Thin Films App 20140119977 - GATINEAU; Julien ;   et al. | 2014-05-01 |
Dihalide germanium(II) precursors for germanium-containing film depositions Grant 8,691,668 - Gatineau , et al. April 8, 2 | 2014-04-08 |
Heteroleptic iridium precursors to be used for the deposition of iridium-containing films Grant 8,658,249 - Gatineau , et al. February 25, 2 | 2014-02-25 |
Metal heterocyclic compounds for deposition of thin films Grant 8,636,845 - Gatineau , et al. January 28, 2 | 2014-01-28 |
Method of forming silicon oxide containing films Grant 8,613,976 - Dussarrat , et al. December 24, 2 | 2013-12-24 |
Titanium-aluminum Alloy Deposition With Titanium-tetrahydroaluminate Bimetallic Molecules App 20130295298 - GATINEAU; Julien ;   et al. | 2013-11-07 |
Method for the deposition of a Ruthenium containing film Grant 8,557,339 - Gatineau , et al. October 15, 2 | 2013-10-15 |
Chalcogenide-containing Precursors, Methods Of Making, And Methods Of Using The Same For Thin Film Deposition App 20130267082 - Gatineau; Julien ;   et al. | 2013-10-10 |
Deposition of group IV metal-containing films at high temperature Grant 8,546,276 - Gatineau , et al. October 1, 2 | 2013-10-01 |
Method For The Deposition Of A Ruthenium-containing Film App 20130252438 - DUSSARRAT; Christian ;   et al. | 2013-09-26 |
Method for the deposition of a ruthenium containing film Grant 8,404,306 - Dussarrat , et al. March 26, 2 | 2013-03-26 |
Use Of Ruthenium Tetroxide As A Precursor And Reactant For Thin Film Depositions App 20130059078 - Gatineau; Julien ;   et al. | 2013-03-07 |
Heteroleptic Iridium Precursors To Be Used For The Deposition Of Iridium-containing Films App 20130040056 - GATINEAU; Julien ;   et al. | 2013-02-14 |
Methods For Deposition Of Alkaline Earth Metal Fluoride Films App 20120308739 - LANSALOT-MATRAS; Clement ;   et al. | 2012-12-06 |
Heteroleptic iridium precursors to be used for the deposition of iridium-containing films Grant 8,309,174 - Gatineau , et al. November 13, 2 | 2012-11-13 |
Method Of Forming Silicon Oxide Containing Films App 20120276292 - DUSSARRAT; Christian ;   et al. | 2012-11-01 |
Dihalide Germanium(ii) Precursors For Germanium-containing Film Depositions App 20120231611 - Gatineau; Julien ;   et al. | 2012-09-13 |
Method of forming silicon oxide containing films Grant 8,227,032 - Dussarrat , et al. July 24, 2 | 2012-07-24 |
Deposition Of Group Iv Metal-containing Films At High Temperature App 20120175751 - Gatineau; Julien ;   et al. | 2012-07-12 |
Deposition Of Ternary Oxide Films Containing Ruthenium And Alkali Earth Metals App 20120070582 - GATINEAU; Satoko ;   et al. | 2012-03-22 |
Tellurium Precursors for Film Deposition App 20120021590 - ISHII; Hana ;   et al. | 2012-01-26 |
Tellurium precursors for film deposition Grant 8,101,237 - Okubo , et al. January 24, 2 | 2012-01-24 |
Deposition of ternary oxide films containing ruthenium and alkali earth metals Grant 8,092,721 - Gatineau , et al. January 10, 2 | 2012-01-10 |
Chalcogenide-containing Precursors, Methods Of Making, And Methods Of Using The Same For Thin Film Deposition App 20110262660 - ISHII; Hana ;   et al. | 2011-10-27 |
Titanium Nitride Film Deposition by Vapor Deposition Using Cyclopentadienyl Alkylamino Titanium Precursors App 20110206862 - Gatineau; Julien ;   et al. | 2011-08-25 |
High Dielectric Constant Films Deposited At High Temperature By Atomic Layer Deposition App 20110020547 - GATINEAU; Julien ;   et al. | 2011-01-27 |
Precursors having open ligands for ruthenium containing films deposition Grant 7,807,223 - Dussarrat , et al. October 5, 2 | 2010-10-05 |
Deposition Method Of Ternary Films App 20100104755 - Dussarrat; Christian ;   et al. | 2010-04-29 |
Method For The Deposition Of A Ruthenium Containing Film App 20100034971 - Gatineau; Julien ;   et al. | 2010-02-11 |
Metal Heterocyclic Compounds For Deposition Of Thin Films App 20090321733 - GATINEAU; Julien ;   et al. | 2009-12-31 |
Tellurium Precursors For Film Deposition App 20090299084 - OKUBO; Shingo ;   et al. | 2009-12-03 |
Heteroleptic Iridium Precursors To Be Used For The Deposition Of Iridium-Containing Films App 20090258144 - Gatineau; Julien ;   et al. | 2009-10-15 |
Deposition Of Ternary Oxide Films Containing Ruthenium And Alkali Earth Metals App 20090242852 - GATINEAU; Satoko ;   et al. | 2009-10-01 |
Method Of Forming Silicon Oxide Containing Films App 20090232985 - Dussarrat; Christian ;   et al. | 2009-09-17 |
Germanium Precursors For Gst Film Deposition App 20090162973 - GATINEAU; Julien ;   et al. | 2009-06-25 |
Precursor for film formation and method for forming ruthenium-containing film Grant 7,544,389 - Dussarrat , et al. June 9, 2 | 2009-06-09 |
Ruthenium Precursor With Two Differing Ligands For Use In Semiconductor Applications App 20090028745 - Gatineau; Julien ;   et al. | 2009-01-29 |
Method For The Recycling And Purification Of An Inorganic Metallic Precursor App 20080253948 - GATINEAU; Julien ;   et al. | 2008-10-16 |
Method For The Deposition Of A Ruthenium Containing Film With Aryl And Diene Containing Complexes App 20080152793 - Gatineau; Julien ;   et al. | 2008-06-26 |
Method for Cleaning Film-Forming Apparatuses App 20080121249 - Gatineau; Julien ;   et al. | 2008-05-29 |
Precursors Having Open Ligands For Ruthenium Containing Films Deposition App 20080107812 - DUSSARRAT; Christian ;   et al. | 2008-05-08 |
Precursor For Film Formation And Method For Forming Ruthenium-Containing Film App 20080038465 - Dussarrat; Christian ;   et al. | 2008-02-14 |
Methods for producing ruthenium film and ruthenium oxide film App 20050238808 - Gatineau, Julien ;   et al. | 2005-10-27 |