Patent | Date |
---|
Ultra low .kappa. plasma enhanced chemical vapor deposition processes using a single bifunctional precursor containing both a SiCOH matrix functionality and organic porogen functionality Grant 8,097,932 - Nguyen , et al. January 17, 2 | 2012-01-17 |
Multilayer hardmask scheme for damage-free dual damascene processing of SiCOH dielectrics Grant 7,811,926 - Fuller , et al. October 12, 2 | 2010-10-12 |
Ultralow Dielectric Constant Layer With Controlled Biaxial Stress App 20090304951 - Dimitrakopoulos; Christos Dimitrios ;   et al. | 2009-12-10 |
ULTRA LOW K (ULK) SiCOH FILM AND METHOD App 20090297823 - Gates; Stephen McConnell ;   et al. | 2009-12-03 |
ULTRA LOW k PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION PROCESSES USING A SINGLE BIFUNCTIONAL PRECURSOR CONTAINING BOTH A SiCOH MATRIX FUNCTIONALITY AND ORGANIC POROGEN FUNCTIONALITY App 20090146265 - Nguyen; Son Van ;   et al. | 2009-06-11 |
Ultra low k plasma enhanced chemical vapor deposition processes using a single bifunctional precursor containing both a SiCOH matrix functionality and organic porogen functionality Grant 7,491,658 - Nguyen , et al. February 17, 2 | 2009-02-17 |
MULTILAYER HARDMASK SCHEME FOR DAMAGE-FREE DUAL DAMASCENE PROCESSING OF SiCOH DIELECTRICS App 20080311744 - Fuller; Nicholas C.M. ;   et al. | 2008-12-18 |
Ultralow Dielectric Constant Layer With Controlled Biaxial Stress App 20080286494 - Dimitrakopoulos; Christos Dimitrios ;   et al. | 2008-11-20 |
Multilayer hardmask scheme for damage-free dual damascene processing of SiCOH dielectrics Grant 7,371,461 - Fuller , et al. May 13, 2 | 2008-05-13 |
Ultralow dielectric constant layer with controlled biaxial stress Grant 7,357,977 - Dimitrakopoulos , et al. April 15, 2 | 2008-04-15 |
Ultralow Dielectric Constant Layer With Controlled Biaxial Stress App 20080044668 - Dimitrakopoulos; Christos Dimitrios ;   et al. | 2008-02-21 |
MULTILAYER HARDMASK SCHEME FOR DAMAGE-FREE DUAL DAMASCENE PROCESSING OF SiCOH DIELECTRICS App 20080038917 - Dalton; Timothy J. ;   et al. | 2008-02-14 |
ULTRA LOW K (ULK) SiCOH FILM AND METHOD App 20080026203 - Gates; Stephen McConnell ;   et al. | 2008-01-31 |
Ultra low k (ULK) SiCOH film and method Grant 7,288,292 - Gates , et al. October 30, 2 | 2007-10-30 |
Diffusion Barrier With Low Dielectric Constant And Semiconductor Device Containing Same App 20070237970 - Cohen; Stephan A. ;   et al. | 2007-10-11 |
Method of forming a ceramic diffusion barrier layer Grant 7,256,146 - Cohen , et al. August 14, 2 | 2007-08-14 |
Diffusion barrier with low dielectric constant and semiconductor device containing same Grant 7,252,875 - Cohen , et al. August 7, 2 | 2007-08-07 |
Multilayer hardmask scheme for damage-free dual damascene processing of SiCOH dielectrics App 20060154086 - Fuller; Nicholas C.M. ;   et al. | 2006-07-13 |
Ultra low K (ULK) SiCOH film and method App 20050276930 - Gates, Stephen McConnell ;   et al. | 2005-12-15 |
Electronic structures with reduced capacitance Grant 6,958,526 - Gates , et al. October 25, 2 | 2005-10-25 |
Interconnect structures incorporating low-k dielectric barrier films App 20050206004 - Cohen, Stephan A. ;   et al. | 2005-09-22 |
Semiconductor devices containing a discontinuous cap layer and methods for forming same Grant 6,943,451 - Whitehair , et al. September 13, 2 | 2005-09-13 |
Interconnect structures incorporating low-k dielectric barrier films Grant 6,940,173 - Cohen , et al. September 6, 2 | 2005-09-06 |
Structures and methods for intergration of ultralow-k dielectrics with improved reliability App 20050184397 - Gates, Stephen McConnell ;   et al. | 2005-08-25 |
Interconnect structures incorporating low-k dielectric barrier films App 20050087876 - Cohen, Stephan A. ;   et al. | 2005-04-28 |
Interconnects containing first and second porous low-k dielectrics separated by a porous buried etch stop layer Grant 6,831,366 - Gates , et al. December 14, 2 | 2004-12-14 |
Electronic structures with reduced capacitance App 20040188674 - Gates, Stephen McConnell ;   et al. | 2004-09-30 |
Diffusion barrier layer and semiconductor device containing same Grant 6,784,485 - Cohen , et al. August 31, 2 | 2004-08-31 |
Ordered two-phase dielectric film, and semiconductor device containing the same Grant 6,780,499 - Gates , et al. August 24, 2 | 2004-08-24 |
Low temperature processes for making electronic device structures Grant 6,756,324 - Gates June 29, 2 | 2004-06-29 |
Diffusion barrier with low dielectric constant and semiconductor device containing same App 20040115407 - Cohen, Stephan A. ;   et al. | 2004-06-17 |
Nonoparticles formed with rigid connector compounds Grant 6,737,107 - Gates , et al. May 18, 2 | 2004-05-18 |
Electronic structures with reduced capacitance Grant 6,737,727 - Gates , et al. May 18, 2 | 2004-05-18 |
Laminated diffusion barrier Grant 6,726,996 - Barth , et al. April 27, 2 | 2004-04-27 |
Spin-on cap layer, and semiconductor device containing same Grant 6,724,069 - Dalton , et al. April 20, 2 | 2004-04-20 |
Low-k interconnect structure comprised of a multilayer of spin-on porous dielectrics Grant 6,716,742 - Gates , et al. April 6, 2 | 2004-04-06 |
Interconnect structure with precise conductor resistance and method to form same Grant 6,710,450 - Gates , et al. March 23, 2 | 2004-03-23 |
Semiconductor recessed mask interconnect technology App 20040051178 - Cohen, Stephen Alan ;   et al. | 2004-03-18 |
Hybrid low-k interconnect structure comprised of 2 spin-on dielectric materials Grant 6,677,680 - Gates , et al. January 13, 2 | 2004-01-13 |
Semiconductor recessed mask interconnect technology Grant 6,657,305 - Cohen , et al. December 2, 2 | 2003-12-02 |
Low-k interconnect structure comprised of a multilayer of spin-on porous dielectrics App 20030183937 - Gates, Stephen McConnell ;   et al. | 2003-10-02 |
Merged logic and memory combining thin film and bulk Si transistors Grant 6,620,659 - Emmma , et al. September 16, 2 | 2003-09-16 |
Nonoparticles Formed With Rigid Connector Compounds App 20030170386 - Gates, Stephen McConnell ;   et al. | 2003-09-11 |
Low-k interconnect structure comprised of a multilayer of spin-on porous dielectrics Grant 6,603,204 - Gates , et al. August 5, 2 | 2003-08-05 |
Nanoparticles formed with rigid connector compounds Grant 6,599,623 - Gates , et al. July 29, 2 | 2003-07-29 |
Diode connected to a magnetic tunnel junction and self aligned with a metallic conductor and method of forming the same Grant 6,562,634 - Bronner , et al. May 13, 2 | 2003-05-13 |
Low-k interconnect structure comprised of a multilayer of spin-on porous dielectrics App 20030075803 - Gates, Stephen McConnell ;   et al. | 2003-04-24 |
Semiconductor devices containing a discontinuous cap layer and methods for forming same App 20030001240 - Whitehair, Stanley Joseph ;   et al. | 2003-01-02 |
Integrated circuit over voltage protection App 20020196594 - Cohen, Stephan Alan ;   et al. | 2002-12-26 |
Laminated diffusion barrier App 20020172811 - Barth, Edward Paul ;   et al. | 2002-11-21 |
Multiphase low dielectric constant material and method of deposition Grant 6,479,110 - Grill , et al. November 12, 2 | 2002-11-12 |
Ordered two-phase dielectric film, and semiconductor device containing the same App 20020164891 - Gates, Stephen McConnell ;   et al. | 2002-11-07 |
Spin-on cap layer, and semiconductor device containing same App 20020145200 - Dalton, Timothy Joseph ;   et al. | 2002-10-10 |
Interconnect structure with precise conductor resistance and method to form same App 20020117737 - Gates, Stephen McConnell ;   et al. | 2002-08-29 |
Method for dual-damascene patterning of low-k interconnects using spin-on distributed hardmask App 20020119654 - Fornof, Ann Rhea-Helene ;   et al. | 2002-08-29 |
Hybrid low-k interconnect structure comprised of 2 spin-on dielectric materials App 20020117754 - Gates, Stephen McConnell ;   et al. | 2002-08-29 |
Low-k interconnect structure comprised of a multilayer of spin-on porous dielectrics App 20020117760 - Gates, Stephen McConnell ;   et al. | 2002-08-29 |
Multiphase low dielectric constant material and method of deposition Grant 6,437,443 - Grill , et al. August 20, 2 | 2002-08-20 |
Nanoparticles formed with rigid connector compounds App 20020094438 - Gates, Stephen McConnell ;   et al. | 2002-07-18 |
Electronic structures with reduced capacitance App 20020093075 - Gates, Stephen McConnell ;   et al. | 2002-07-18 |
Multiphase low dielectric constant material and method of deposition App 20020037442 - Grill, Alfred ;   et al. | 2002-03-28 |
Multiphase low dielectric constant material and method of deposition App 20020034625 - Grill, Alfred ;   et al. | 2002-03-21 |
Multiphase low dielectric constant material Grant 6,312,793 - Grill , et al. November 6, 2 | 2001-11-06 |
Merged logic and memory combining thin film and bulk Si transistors App 20010028059 - Emma, Philip George ;   et al. | 2001-10-11 |
Decoupling capacitor structure distributed above an integrated circuit and method for making same Grant 6,285,050 - Emma , et al. September 4, 2 | 2001-09-04 |
Merged logic and memory combining thin film and bulk Si transistors Grant 6,271,542 - Emma , et al. August 7, 2 | 2001-08-07 |
Diode connected to a magnetic tunnel junction and self aligned with a metallic conductor and method of forming the same App 20010010938 - Bronner, Gary Bela ;   et al. | 2001-08-02 |
Diode connected to a magnetic tunnel junction and self aligned with a metallic conductor and method for forming the same Grant 6,242,770 - Bronner , et al. June 5, 2 | 2001-06-05 |
Atomic layer deposition with nitrate containing precursors Grant 6,203,613 - Gates , et al. March 20, 2 | 2001-03-20 |
Semiconductor device having ultra-sharp P-N junction and method of manufacturing the same Grant 6,180,444 - Gates , et al. January 30, 2 | 2001-01-30 |
Method to form a polycrystalline film on a substrate Grant 5,830,538 - Gates , et al. November 3, 1 | 1998-11-03 |
Thin film transistors fabricated on plastic substrates Grant 5,796,121 - Gates August 18, 1 | 1998-08-18 |
Method for forming a single crystal semiconductor on a substrate Grant 5,667,586 - Ek , et al. September 16, 1 | 1997-09-16 |