Patent | Date |
---|
Heating device for heating semiconductor wafers in thermal processing chambers Grant 8,138,451 - Gat , et al. March 20, 2 | 2012-03-20 |
Heating Device For Heating Semiconductor Wafers in Thermal Processing Chambers App 20100018960 - Gat; Arnon ;   et al. | 2010-01-28 |
Heating device for heating semiconductor wafers in thermal processing chambers Grant 7,608,802 - Gat , et al. October 27, 2 | 2009-10-27 |
Fast heating and cooling apparatus for semiconductor wafers Grant 7,226,488 - Gat June 5, 2 | 2007-06-05 |
Heating device for heating semiconductor wafers in thermal processing chambers App 20060201927 - Gat; Arnon ;   et al. | 2006-09-14 |
Heating device for heating semiconductor wafers in thermal processing chambers Grant 7,038,174 - Gat , et al. May 2, 2 | 2006-05-02 |
Fast heating and cooling apparatus for semiconductor wafers App 20050183854 - Gat, Arnon | 2005-08-25 |
Method for rapidly heating and cooling semiconductor wafers Grant 6,919,271 - Gat July 19, 2 | 2005-07-19 |
Heating device for heating semiconductor wafers in thermal processing chambers App 20050008351 - Gat, Arnon ;   et al. | 2005-01-13 |
Heating device for heating semiconductor wafers in thermal processing chambers Grant 6,771,895 - Gat , et al. August 3, 2 | 2004-08-03 |
Rapid thermal processing chamber for processing multiple wafers Grant 6,727,474 - Gat April 27, 2 | 2004-04-27 |
Heating device for heating semiconductor wafers in thermal processing chambers Grant 6,717,158 - Gat , et al. April 6, 2 | 2004-04-06 |
Fast heating and cooling apparatus for semiconductor wafers App 20040035847 - Gat, Arnon | 2004-02-26 |
Rapid thermal processing chamber for processing multiple wafers Grant 6,610,967 - Gat August 26, 2 | 2003-08-26 |
System for controlling the temperature of a reflective substrate during rapid heating Grant 6,403,923 - Tay , et al. June 11, 2 | 2002-06-11 |
System for controlling the temperature of a reflective substrate during rapid heating Grant 6,359,263 - Tay , et al. March 19, 2 | 2002-03-19 |
Rapid thermal processing chamber for processing multiple wafers App 20020005400 - Gat, Arnon | 2002-01-17 |
System For Controlling The Temperature Of A Reflective Substrate During Rapid Heating App 20010040156 - TAY, SING PIN ;   et al. | 2001-11-15 |
Rapid thermal processing chamber for processing multiple wafers Grant 6,310,328 - Gat October 30, 2 | 2001-10-30 |
Rapid thermal processing chamber for processing multiple wafers App 20010002668 - Gat, Arnon | 2001-06-07 |
Apparatus and method for filtering light in a thermal processing chamber Grant 5,960,158 - Gat , et al. September 28, 1 | 1999-09-28 |
Apparatus and method for determining the temperature of a radiating surface Grant 5,874,711 - Champetier , et al. February 23, 1 | 1999-02-23 |
Bichannel radiation detection apparatus Grant 5,165,796 - Gat , et al. November 24, 1 | 1992-11-24 |
Bichannel radiation detection method Grant 5,114,242 - Gat , et al. May 19, 1 | 1992-05-19 |
Method and means for heat treating semiconductor material using high intensity CW lamps Grant 4,356,384 - Gat October 26, 1 | 1982-10-26 |
Method for heat treating semiconductor material using high intensity CW lamps Grant 4,331,485 - Gat May 25, 1 | 1982-05-25 |
Read only memory and integrated circuit and method of programming by laser means Grant 4,233,671 - Gerzberg , et al. November 11, 1 | 1980-11-11 |
Method of forming polycrystalline semiconductor interconnections, resistors and contacts by applying radiation beam Grant 4,214,918 - Gat , et al. July 29, 1 | 1980-07-29 |