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Patent applications and USPTO patent grants for GaSonics International.The latest application filed is for "energy transfer microwave plasma source".
Patent | Date |
---|---|
Energy transfer microwave plasma source Grant 6,211,621 - Caughran , et al. April 3, 2 | 2001-04-03 |
Backside etch process chamber and method Grant 5,914,278 - Boitnott , et al. June 22, 1 | 1999-06-22 |
Modular process system Grant 5,863,170 - Boitnott , et al. January 26, 1 | 1999-01-26 |
Semiconductor wafer processing carousel Grant 5,855,465 - Boitnott , et al. January 5, 1 | 1999-01-05 |
Short-coupled-path extender for plasma source Grant 5,814,154 - Boitnott September 29, 1 | 1998-09-29 |
Process chamber sleeve with ring seals for isolating individual process modules in a common cluster Grant 5,667,592 - Boitnott , et al. September 16, 1 | 1997-09-16 |
Modular gas box system Grant 5,662,143 - Caughran September 2, 1 | 1997-09-02 |
NCAGE Code | 04TK9 | GASONICS INTL |
CAGE Code | 04TK9 | GASONICS INTL |
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