Garofalo; Joseph G.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Garofalo; Joseph G..The latest application filed is for "auxiliary mask features for enhancing the resolution of photolithography".
- Garofalo; Joseph G. - South Orange NJ
| Patent | Date |
|---|---|
| Auxiliary mask features for enhancing the resolution of photolithography Grant 5,636,002 - Garofalo June 3, 1 | 1997-06-03 |
| Fabrication of phase-shifting lithographic masks Grant 5,338,626 - Garofalo , et al. August 16, 1 | 1994-08-16 |
| Self-aligned method of making phase-shifting lithograhic masks having three or more phase-shifts Grant 5,308,721 - Garofalo , et al. May 3, 1 | 1994-05-03 |
| Single-alignment-level lithographic technique for achieving self-aligned features Grant 5,275,896 - Garofalo , et al. January 4, 1 | 1994-01-04 |
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