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Patent applications and USPTO patent grants for Gardner; DelRae H..The latest application filed is for "device and method for compensating a capacitive sensor measurement for variations caused by environmental conditions in a semiconductor processing environment".
Patent | Date |
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Substrate-like particle sensor Grant 8,823,933 - Bonciolini , et al. September 2, 2 | 2014-09-02 |
Capacitive distance sensing in semiconductor processing tools Grant 7,893,697 - Ramsey , et al. February 22, 2 | 2011-02-22 |
Capacitive distance sensing in semiconductor processing tools Grant 7,804,306 - Gardner , et al. September 28, 2 | 2010-09-28 |
Device And Method For Compensating A Capacitive Sensor Measurement For Variations Caused By Environmental Conditions In A Semiconductor Processing Environment App 20090015268 - Gardner; DelRae H. ;   et al. | 2009-01-15 |
Wireless substrate-like sensor Grant 7,456,977 - Ramsey , et al. November 25, 2 | 2008-11-25 |
Semiconductor Processing System With Integrated Showerhead Distance Measuring Device App 20080246493 - Gardner; DelRae H. | 2008-10-09 |
Substrate-like particle sensor App 20080239314 - Bonciolini; Dennis J. ;   et al. | 2008-10-02 |
Capacitive Distance Sensing In Semiconductor Processing Tools App 20080231291 - Ramsey; Craig C. ;   et al. | 2008-09-25 |
Wireless substrate-like sensor Grant 7,289,230 - Ramsey , et al. October 30, 2 | 2007-10-30 |
Wireless substrate-like sensor Grant 7,283,255 - Ramsey , et al. October 16, 2 | 2007-10-16 |
Capacitive distance sensing in semiconductor processing tools App 20070222462 - Gardner; DelRae H. ;   et al. | 2007-09-27 |
Wireless substrate-like sensor App 20060171561 - Ramsey; Craig C. ;   et al. | 2006-08-03 |
Wireless substrate-like sensor App 20060151606 - Ramsey; Craig C. ;   et al. | 2006-07-13 |
Wireless substrate-like sensor App 20050233770 - Ramsey, Craig C. ;   et al. | 2005-10-20 |
Wireless substrate-like sensor App 20050224902 - Ramsey, Craig C. ;   et al. | 2005-10-13 |
Wireless substrate-like sensor App 20050224899 - Ramsey, Craig C. ;   et al. | 2005-10-13 |
Semiconductor wafer location sensing via non contact methods App 20050086024 - Seeberger, Edward D. JR. ;   et al. | 2005-04-21 |
Wireless substrate-like sensor App 20030223057 - Ramsey, Craig C. ;   et al. | 2003-12-04 |
Remultiplexing variable rate bitstreams using a delay buffer and rate estimation Grant 6,327,275 - Gardner , et al. December 4, 2 | 2001-12-04 |
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