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Laser produced plasma light source having a target material coated on a cylindrically-symmetric element
Grant 11,419,202 - Kuritsyn , et al. August 16, 2 | 2022-08-16 |
Droplet generation for a laser produced plasma light source
Grant 11,343,899 - Ahr , et al. May 24, 2 | 2022-05-24 |
Laser Produced Plasma Light Source Having a Target Material Coated on a Cylindrically-Symmetric Element
App 20210136903 - Kuritsyn; Alexey ; et al. | 2021-05-06 |
Droplet Generation For A Laser Produced Plasma Light Source
App 20210105886 - Ahr; Brian ; et al. | 2021-04-08 |
System and method for cleaning optical surfaces of an extreme ultraviolet optical system
Grant 10,953,441 - Delgado , et al. March 23, 2 | 2021-03-23 |
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element
Grant 10,893,599 - Kuritsyn , et al. January 12, 2 | 2021-01-12 |
Droplet generation for a laser produced plasma light source
Grant 10,880,979 - Ahr , et al. December 29, 2 | 2020-12-29 |
System and method for photocathode illumination inspection
Grant 10,840,055 - Delgado , et al. November 17, 2 | 2020-11-17 |
Photocathode designs and methods of generating an electron beam using a photocathode
Grant 10,804,069 - Ioakeimidi , et al. October 13, 2 | 2020-10-13 |
Electron beam generation and measurement
Grant 10,748,737 - Ioakeimidi , et al. A | 2020-08-18 |
Metal encapsulated photocathode electron emitter
Grant 10,714,295 - Delgado , et al. | 2020-07-14 |
Neutral atom imaging system
Grant 10,714,307 - Bezel , et al. | 2020-07-14 |
Metal protective layer for electron emitters with a diffusion barrier
Grant 10,714,294 - Hill , et al. | 2020-07-14 |
Photocathode Designs And Methods Of Generating An Electron Beam Using A Photocathode
App 20200111637 - Ioakeimidi; Katerina ; et al. | 2020-04-09 |
Silicon electron emitter designs
Grant 10,607,806 - Hill , et al. | 2020-03-31 |
Metal Encapsulated Photocathode Electron Emitter
App 20200090895 - Delgado; Gildardo R. ; et al. | 2020-03-19 |
Photocathode designs and methods of generating an electron beam using a photocathode
Grant 10,535,493 - Ioakeimidi , et al. Ja | 2020-01-14 |
Neutral Atom Imaging System
App 20190378684 - Bezel; Ilya ; et al. | 2019-12-12 |
Metal Protective Layer For Electron Emitters With A Diffusion Barrier
App 20190362927 - Hill; Frances ; et al. | 2019-11-28 |
System and Method for Photocathode Illumination Inspection
App 20190295804 - Delgado; Gildardo ; et al. | 2019-09-26 |
Ruthenium encapsulated photocathode electron emitter
Grant 10,395,884 - Delgado , et al. A | 2019-08-27 |
Silicon Electron Emitter Designs
App 20190108963 - Hill; Frances ; et al. | 2019-04-11 |
Electron Beam Generation And Measurement
App 20190108967 - Ioakeimidi; Katerina ; et al. | 2019-04-11 |
Ruthenium Encapsulated Photocathode Electron Emitter
App 20190108966 - Delgado; Gildardo R. ; et al. | 2019-04-11 |
Photocathode Designs And Methods Of Generating An Electron Beam Using A Photocathode
App 20190108964 - Ioakeimidi; Katerina ; et al. | 2019-04-11 |
Laser Produced Plasma Light Source Having a Target Material Coated on a Cylindrically-Symmetric Element
App 20190075641 - Kuritsyn; Alexey ; et al. | 2019-03-07 |
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element
Grant 10,021,773 - Kuritsyn , et al. July 10, 2 | 2018-07-10 |
System and method for cleaning EUV optical elements
Grant 9,810,991 - Chilese , et al. November 7, 2 | 2017-11-07 |
Laser Produced Plasma Light Source Having a Target Material Coated on a Cylindrically-Symmetric Element
App 20170142817 - Kuritsyn; Alexey ; et al. | 2017-05-18 |
Droplet Generation for a Laser Produced Plasma Light Source
App 20170131129 - Ahr; Brian ; et al. | 2017-05-11 |
System and method for generation of extreme ultraviolet light
Grant 9,544,984 - Bykanov , et al. January 10, 2 | 2017-01-10 |
Gas bearing assembly for an EUV light source
Grant 9,422,978 - Chilese , et al. August 23, 2 | 2016-08-23 |
System and Method for Cleaning EUV Optical Elements
App 20150253675 - Chilese; Frank ; et al. | 2015-09-10 |
Gas Bearing Assembly For An Euv Light Source
App 20140376842 - Chilese; Francis C. ; et al. | 2014-12-25 |
System and Method for Cleaning Optical Surfaces of an Extreme Ultraviolet Optical System
App 20140261568 - Delgado; Gildardo ; et al. | 2014-09-18 |
Apparatus and methods for forming an electrical conduction path through an insulating layer
Grant 8,618,513 - Plettner , et al. December 31, 2 | 2013-12-31 |
Apparatus And Methods For Forming An Electrical Conduction Path Through An Insulating Layer
App 20120298879 - PLETTNER; Tomas ; et al. | 2012-11-29 |
Structural modification using electron beam activated chemical etch
Grant 8,052,885 - Naser-Ghodsi , et al. November 8, 2 | 2011-11-08 |
Etch selectivity enhancement in electron beam activated chemical etch
Grant 7,879,730 - Naser-Ghodsi , et al. February 1, 2 | 2011-02-01 |
Auger electron spectrometer with applied magnetic field at target surface
Grant 7,755,042 - Toth , et al. July 13, 2 | 2010-07-13 |
Methods And Systems For Measuring A Characteristic Of A Substrate Or Preparing A Substrate For Analysis
App 20080264905 - Nasser-Ghodsi; Mehran ; et al. | 2008-10-30 |
Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysis
Grant 7,304,302 - Nunan , et al. December 4, 2 | 2007-12-04 |
Etch Selectivity Enhancement In Electron Beam Activated Chemical Etch
App 20070158304 - Nasser-Ghodsi; Mehran ; et al. | 2007-07-12 |
Structural Modification Using Electron Beam Activated Chemical Etch
App 20070158303 - NASSER-GHODSI; MEHRAN ; et al. | 2007-07-12 |
Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis
App 20050221229 - Nasser-Ghodsi, Mehran ; et al. | 2005-10-06 |
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