Garcia Granda; Miguel

Patent Applications and Registrations

Patent applications and USPTO patent grants for Garcia Granda; Miguel.The latest application filed is for "methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing".

Company Profile

9.6.6

Garcia Granda; Miguel - Veldhoven NL
GARCIA GRANDA; Miguel - Veldboven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Metrology apparatus and method for determining a characteristic relating to one or more structures on a substrate Grant 11,385,554 - Garcia Granda , et al. July 12, 2	2022-07-12
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method Grant 10,895,811 - Garcia Granda , et al. January 19, 2	2021-01-19
Metrology robustness based on through-wavelength similarity Grant 10,871,716 - Garcia Granda , et al. December 22, 2	2020-12-22
Methods and Patterning Devices and Apparatuses for Measuring Focus Performance of a Lithographic Apparatus, Device Manufacturing App 20200117101 - GARCIA GRANDA; Miguel ; et al.	2020-04-16
Method of calibrating focus measurements, measurement method and metrology apparatus, lithographic system and device manufacturing method Grant 10,571,812 - Li , et al. Feb	2020-02-25
Metrology Apparatus and Method for Determining a Characteristic Relating to One or More Structures on a Substrate App 20200026182 - GARCIA GRANDA; Miguel ; et al.	2020-01-23
Metrology Robustness Based On Through-wavelength Similarity App 20190377264 - GARCIA GRANDA; Miguel ; et al.	2019-12-12
Metrology robustness based on through-wavelength similarity Grant 10,394,132 - Garcia Granda , et al. A	2019-08-27
Metrology Robustness Based On Through-wavelength Similarity App 20190129319 - GARCIA GRANDA; Miguel ; et al.	2019-05-02
Method of Calibrating Focus Measurements, Measurement Method and Metrology Apparatus, Lithographic System and Device Manufacturing Method App 20190056673 - LI; Fahong ; et al.	2019-02-21
Method and apparatus for determining lithographic quality of a structure Grant 9,518,936 - Grootjans , et al. December 13, 2	2016-12-13
Method and Apparatus for Determining Lithographic Quality of a Structure App 20150308966 - GROOTJANS; Willem Jan ; et al.	2015-10-29

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