Patent | Date |
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Crawling Welding Robot App 20220258291 - FENG; Xiaobing ;   et al. | 2022-08-18 |
Wafer inspection using difference images Grant 11,270,430 - Sezginer , et al. March 8, 2 | 2022-03-08 |
Method and system for correlating optical images with scanning electron microscopy images Grant 11,244,442 - Lee , et al. February 8, 2 | 2022-02-08 |
Repeater defect detection Grant 11,204,332 - Shifrin , et al. December 21, 2 | 2021-12-21 |
Crawling Welding Robot And Method Of Controlling The Same App 20210291289 - FENG; Xiaobing ;   et al. | 2021-09-23 |
Previous layer nuisance reduction through oblique illumination Grant 10,818,005 - Zhong , et al. October 27, 2 | 2020-10-27 |
Method and apparatus for generating heatmap Grant 10,783,673 - Gao , et al. Sept | 2020-09-22 |
Repeater Defect Detection App 20200240928 - Shifrin; Eugene ;   et al. | 2020-07-30 |
Generating high resolution images from low resolution images for semiconductor applications Grant 10,648,924 - Zhang , et al. | 2020-05-12 |
Repeater defect detection Grant 10,648,925 - Shifrin , et al. | 2020-05-12 |
Systems and methods for detecting defects on a wafer Grant 10,605,744 - Chen , et al. | 2020-03-31 |
Dynamic care areas for defect detection Grant 10,600,175 - Brauer , et al. | 2020-03-24 |
Nuisance reduction using location-based attributes Grant 10,600,177 - Brauer , et al. | 2020-03-24 |
Visual feedback for inspection algorithms and filters Grant 10,599,944 - Lee , et al. | 2020-03-24 |
Automatic recipe stability monitoring and reporting Grant 10,514,685 - Lee , et al. Dec | 2019-12-24 |
Method and System for Correlating Optical Images with Scanning Electron Microscopy Images App 20190333206 - Lee; Hucheng ;   et al. | 2019-10-31 |
Previous Layer Nuisance Reduction Through Oblique Illumination App 20190279357 - Zhong; Jingshan ;   et al. | 2019-09-12 |
Method and system for correlating optical images with scanning electron microscopy images Grant 10,410,338 - Lee , et al. Sept | 2019-09-10 |
Adaptive local threshold and color filtering Grant 10,395,359 - Huang , et al. A | 2019-08-27 |
Intra-die defect detection Grant 10,393,671 - Thattaisundaram , et al. A | 2019-08-27 |
High sensitivity repeater defect detection Grant 10,395,358 - Brauer , et al. A | 2019-08-27 |
System and method for defining care areas in repeating structures of design data Grant 10,339,262 - Huang , et al. | 2019-07-02 |
Methods and systems for monitoring a non-defect related characteristic of a patterned wafer Grant 10,324,046 - Fu , et al. | 2019-06-18 |
Method and Apparatus For Generating Heatmap App 20190180480 - GAO; Lisheng ;   et al. | 2019-06-13 |
Nuisance Reduction Using Location-Based Attributes App 20190050974 - Brauer; Bjorn ;   et al. | 2019-02-14 |
Image based specimen process control Grant 10,181,185 - Park , et al. Ja | 2019-01-15 |
Repeater Defect Detection App 20180348147 - Shifrin; Eugene ;   et al. | 2018-12-06 |
Wafer Inspection Using Difference Images App 20180342051 - Sezginer; Abdurrahman ;   et al. | 2018-11-29 |
Apparatus and methods for finding a best aperture and mode to enhance defect detection Grant 10,132,760 - Kolchin , et al. November 20, 2 | 2018-11-20 |
Defect detection and classification based on attributes determined from a standard reference image Grant 10,127,652 - Gao , et al. November 13, 2 | 2018-11-13 |
Dynamic Care Areas for Defect Detection App 20180276808 - Brauer; Bjorn ;   et al. | 2018-09-27 |
Systems And Methods For Detecting Defects On A Wafer App 20180202943 - Chen; Lu ;   et al. | 2018-07-19 |
Optical die to database inspection Grant 10,012,599 - Wells , et al. July 3, 2 | 2018-07-03 |
Sub-pixel alignment of inspection to design Grant 9,996,942 - Bhattacharyya , et al. June 12, 2 | 2018-06-12 |
High Sensitivity Repeater Defect Detection App 20180130199 - Brauer; Bjorn ;   et al. | 2018-05-10 |
Optical die to database inspection Grant 9,915,625 - Gao , et al. March 13, 2 | 2018-03-13 |
Systems and methods for detecting defects on a wafer Grant 9,880,107 - Chen , et al. January 30, 2 | 2018-01-30 |
Detecting defects on a wafer using defect-specific and multi-channel information Grant 9,846,930 - Wu , et al. December 19, 2 | 2017-12-19 |
Alignment of inspection to design using built in targets Grant 9,830,421 - Bhattacharyya , et al. November 28, 2 | 2017-11-28 |
Apparatus And Methods For Finding A Best Aperture And Mode To Enhance Defect Detection App 20170307545 - Kolchin; Pavel ;   et al. | 2017-10-26 |
System and Method for Defining Care Areas in Repeating Structures of Design Data App 20170286589 - Huang; Junqing ;   et al. | 2017-10-05 |
Adaptive Local Threshold and Color Filtering App 20170287128 - Huang; Junqing ;   et al. | 2017-10-05 |
Apparatus and methods for finding a best aperture and mode to enhance defect detection Grant 9,726,617 - Kolchin , et al. August 8, 2 | 2017-08-08 |
Defect detection using structural information Grant 9,727,047 - Luo , et al. August 8, 2 | 2017-08-08 |
Detecting defects on a wafer using defect-specific information Grant 9,721,337 - Wu , et al. August 1, 2 | 2017-08-01 |
Context-based inspection for dark field inspection Grant 9,715,725 - Zhang , et al. July 25, 2 | 2017-07-25 |
Image Based Specimen Process Control App 20170200264 - Park; Allen ;   et al. | 2017-07-13 |
Adaptive local threshold and color filtering Grant 9,704,234 - Huang , et al. July 11, 2 | 2017-07-11 |
Generating High Resolution Images From Low Resolution Images For Semiconductor Applications App 20170193680 - Zhang; Jing ;   et al. | 2017-07-06 |
Optical Die to Database Inspection App 20170191948 - Gao; Lisheng ;   et al. | 2017-07-06 |
Design Based Sampling and Binning for Yield Critical Defects App 20170103517 - Kurada; Satya ;   et al. | 2017-04-13 |
Detecting defects on wafers based on 2D scatter plots of values determined for output generated using different optics modes Grant 9,619,876 - Huang , et al. April 11, 2 | 2017-04-11 |
Detecting Defects on a Wafer Using Defect-Specific and Multi-Channel Information App 20170091925 - Wu; Kenong ;   et al. | 2017-03-30 |
Selecting one or more parameters for inspection of a wafer Grant 9,601,393 - Lee , et al. March 21, 2 | 2017-03-21 |
Based sampling and binning for yield critical defects Grant 9,563,943 - Kurada , et al. February 7, 2 | 2017-02-07 |
Detecting defects on a wafer using defect-specific and multi-channel information Grant 9,552,636 - Wu , et al. January 24, 2 | 2017-01-24 |
Wafer and reticle inspection systems and methods for selecting illumination pupil configurations Grant 9,523,646 - Chen , et al. December 20, 2 | 2016-12-20 |
Intra-Die Defect Detection App 20160321800 - Thattaisundaram; Govindarajan ;   et al. | 2016-11-03 |
Optical Die to Database Inspection App 20160290934 - Wells; Keith ;   et al. | 2016-10-06 |
Sub-Pixel Alignment of Inspection to Design App 20160275672 - Bhattacharyya; Santosh ;   et al. | 2016-09-22 |
Wafer And Reticle Inspection Systems And Methods For Selecting Illumination Pupil Configurations App 20160266047 - Chen; Grace H. ;   et al. | 2016-09-15 |
Scratch filter for wafer inspection Grant 9,442,077 - Huang , et al. September 13, 2 | 2016-09-13 |
Design Based Sampling and Binning for Yield Critical Defects App 20160225138 - Kurada; Satya ;   et al. | 2016-08-04 |
Visual Feedback for Inspection Algorithms and Filters App 20160210526 - Lee; Hucheng ;   et al. | 2016-07-21 |
Alignment of Inspection to Design Using Built in Targets App 20160188784 - Bhattacharyya; Santosh ;   et al. | 2016-06-30 |
Wafer and reticle inspection systems and methods for selecting illumination pupil configurations Grant 9,347,891 - Chen , et al. May 24, 2 | 2016-05-24 |
Defect Detection Using Structural Information App 20160104600 - Luo; Qing ;   et al. | 2016-04-14 |
Based sampling and binning for yield critical defects Grant 9,310,320 - Kurada , et al. April 12, 2 | 2016-04-12 |
Detecting Defects on a Wafer Using Defect-Specific Information App 20160071256 - Wu; Kenong ;   et al. | 2016-03-10 |
Detecting Defects on a Wafer Using Defect-Specific and Multi-Channel Information App 20160027165 - Wu; Kenong ;   et al. | 2016-01-28 |
Tuning wafer inspection recipes using precise defect locations Grant 9,224,660 - Kulkarni , et al. December 29, 2 | 2015-12-29 |
Automatic Recipe Stability Monitoring and Reporting App 20150362908 - Lee; Hucheng ;   et al. | 2015-12-17 |
Detecting defects on a wafer using defect-specific information Grant 9,189,844 - Wu , et al. November 17, 2 | 2015-11-17 |
Wafer inspection using free-form care areas Grant 9,171,364 - Wu , et al. October 27, 2 | 2015-10-27 |
Defect Detection And Classification Based On Attributes Determined From A Standard Reference Image App 20150221076 - Gao; Lisheng ;   et al. | 2015-08-06 |
Detecting defects on a wafer using defect-specific and multi-channel information Grant 9,092,846 - Wu , et al. July 28, 2 | 2015-07-28 |
Context-Based Inspection for Dark Field Inspection App 20150178907 - Zhang; Yong ;   et al. | 2015-06-25 |
Detecting defects on a wafer Grant 9,053,527 - Lang , et al. June 9, 2 | 2015-06-09 |
Method and System for Correlating Optical Images with Scanning Electron Microscopy Images App 20150125065 - Lee; Hucheng ;   et al. | 2015-05-07 |
Detecting IC Reliability Defects App 20150120220 - Wu; Joanne ;   et al. | 2015-04-30 |
Region based virtual fourier filter Grant 8,989,479 - Gao , et al. March 24, 2 | 2015-03-24 |
Tuning Wafer Inspection Recipes Using Precise Defect Locations App 20150062571 - Kulkarni; Ashok V. ;   et al. | 2015-03-05 |
Scratch Filter for Wafer Inspection App 20150063677 - Huang; Junqing ;   et al. | 2015-03-05 |
Adaptive Local Threshold and Color Filtering App 20150043804 - Huang; Junqing ;   et al. | 2015-02-12 |
Wafer And Reticle Inspection Systems And Methods For Selecting Illumination Pupil Configurations App 20150015874 - Chen; Grace H. ;   et al. | 2015-01-15 |
Wafer Inspection Using Free-Form Care Areas App 20140376802 - Wu; Kenong ;   et al. | 2014-12-25 |
Apparatus And Methods For Finding A Best Aperture And Mode To Enhance Defect Detection App 20140354983 - Kolchin; Pavel ;   et al. | 2014-12-04 |
Design Based Sampling and Binning for Yield Critical Defects App 20140307947 - Kurada; Satya ;   et al. | 2014-10-16 |
Detecting Defects on a Wafer App 20140270474 - Huang; Junqing ;   et al. | 2014-09-18 |
Detecting Defects on a Wafer Using Defect-Specific and Multi-Channel Information App 20140219544 - Wu; Kenong ;   et al. | 2014-08-07 |
Detecting defects on a wafer Grant 8,775,101 - Huang , et al. July 8, 2 | 2014-07-08 |
Detecting Defects on a Wafer App 20140185919 - Lang; Jun ;   et al. | 2014-07-03 |
Detecting Defects on a Wafer Using Defect-Specific Information App 20140105482 - Wu; Kenong ;   et al. | 2014-04-17 |
Systems and Methods for Detecting Defects on a Wafer App 20130250287 - Chen; Lu ;   et al. | 2013-09-26 |
Computer-implemented methods and systems for classifying defects on a specimen Grant 8,532,949 - Teh , et al. September 10, 2 | 2013-09-10 |
Systems and methods for detecting defects on a wafer Grant 8,467,047 - Chen , et al. June 18, 2 | 2013-06-18 |
Detecting Defects On A Wafer App 20130035876 - Huang; Junqing ;   et al. | 2013-02-07 |
Systems and Methods for Detecting Defects on a Wafer App 20120268735 - Chen; Lu ;   et al. | 2012-10-25 |
Systems and methods for detecting defects on a wafer Grant 8,223,327 - Chen , et al. July 17, 2 | 2012-07-17 |
Region Based Virtual Fourier Filter App 20120141013 - Gao; Lisheng ;   et al. | 2012-06-07 |
Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle Grant 8,111,900 - Wu , et al. February 7, 2 | 2012-02-07 |
Selecting One or More Parameters for Inspection of a Wafer App 20110320149 - Lee; Chris ;   et al. | 2011-12-29 |
Adaptive signature detection Grant 8,059,886 - Gao , et al. November 15, 2 | 2011-11-15 |
Computer-implemented methods, carrier media, and systems for selecting polarization settings for an inspection system Grant 8,049,877 - Wallingford , et al. November 1, 2 | 2011-11-01 |
Adaptive Signature Detection App 20110170766 - Gao; Yong ;   et al. | 2011-07-14 |
Computer-implemented Methods For Detecting And/or Sorting Defects In A Design Pattern Of A Reticle App 20100226562 - Wu; Kenong ;   et al. | 2010-09-09 |
Systems And Methods For Detecting Defects On A Wafer App 20100188657 - Chen; Lu ;   et al. | 2010-07-29 |
Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle Grant 7,729,529 - Wu , et al. June 1, 2 | 2010-06-01 |
Computer-implemented Methods, Carrier Media, And Systems For Selecting Polarization Settings For An Inspection System App 20090284733 - Wallingford; Richard ;   et al. | 2009-11-19 |
Control method and system for a trackless autonomous crawling all-position arc welding robot with wheels and permanent magnet caterpillar belts Grant 7,498,542 - Pan , et al. March 3, 2 | 2009-03-03 |
Automatic supervised classifier setup tool for semiconductor defects Grant 7,359,544 - Gao , et al. April 15, 2 | 2008-04-15 |
Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle App 20060291714 - Wu; Kenong ;   et al. | 2006-12-28 |
Flexible hybrid defect classification for semiconductor manufacturing Grant 7,142,992 - Huet , et al. November 28, 2 | 2006-11-28 |
Flexible Hybrid Defect Classification For Semiconductor Manufacturing App 20060265145 - Huet; Patrick ;   et al. | 2006-11-23 |
Control method and system for a trackless autonomous crawling all-position arc welding robot with wheels and permanent magnet caterpillar belts App 20060144835 - Pan; Jiluan ;   et al. | 2006-07-06 |
Computer-implemented methods and systems for classifying defects on a specimen App 20060082763 - Teh; Cho Huak ;   et al. | 2006-04-20 |
Automatic supervised classifier setup tool for semiconductor defects App 20040156540 - Gao, Lisheng ;   et al. | 2004-08-12 |