Gao; Juwen
Patent Applications and Registrations
Patent applications and USPTO patent grants for Gao; Juwen.The latest application filed is for "rapid flush purging during atomic layer deposition".
Company Profile
9.31.37
- Gao; Juwen - San Jose CA
- - San Jose CA US
- Gao; Juwen - Fremont CA
Patent Activity
| Patent | Date |
|---|---|
| Tungsten feature fill with nucleation inhibition Grant 11,410,883 - Chandrashekar , et al. August 9, 2 | 2022-08-09 |
| Rapid Flush Purging During Atomic Layer Deposition App 20220186370 - Nannapaneni; Pragna ; et al. | 2022-06-16 |
| Metal fill process for three-dimensional vertical NAND wordline Grant 11,348,795 - Schloss , et al. May 31, 2 | 2022-05-31 |
| Feature Fill With Nucleation Inhibition App 20220102208 - Chandrashekar; Anand ; et al. | 2022-03-31 |
| Atomic Layer Deposition On 3d Nand Structures App 20210335617 - Deng; Ruopeng ; et al. | 2021-10-28 |
| Tungsten Feature Fill App 20210327754 - Chandrashekar; Anand ; et al. | 2021-10-21 |
| Multi-layer Feature Fill App 20210313183 - Ba; Xiaolan ; et al. | 2021-10-07 |
| Metal-containing Passivation For High Aspect Ratio Etch App 20210242032 - COLINJIVADI; Karthik S. ; et al. | 2021-08-05 |
| Tungsten feature fill Grant 11,075,115 - Chandrashekar , et al. July 27, 2 | 2021-07-27 |
| Metal Fill Process For Three-dimensional Vertical Nand Wordline App 20200211853 - Schloss; Lawrence ; et al. | 2020-07-02 |
| Feature Fill With Nucleation Inhibition App 20200185273 - Chandrashekar; Anand ; et al. | 2020-06-11 |
| Feature fill with nucleation inhibition Grant 10,580,695 - Chandrashekar , et al. | 2020-03-03 |
| Tungsten for wordline applications Grant 10,529,722 - Danek , et al. J | 2020-01-07 |
| Tungsten Feature Fill With Nucleation Inhibition App 20190206731 - Chandrashekar; Anand ; et al. | 2019-07-04 |
| Tungsten feature fill with nucleation inhibition Grant 10,256,142 - Chandrashekar , et al. | 2019-04-09 |
| Tungsten Feature Fill App 20190019725 - Chandrashekar; Anand ; et al. | 2019-01-17 |
| Tungsten feature fill Grant 10,103,058 - Chandrashekar , et al. October 16, 2 | 2018-10-16 |
| Feature Fill With Nucleation Inhibition App 20180277431 - Chandrashekar; Anand ; et al. | 2018-09-27 |
| Tungsten For Wordline Applications App 20180219014 - Danek; Michal ; et al. | 2018-08-02 |
| Feature fill with nucleation inhibition Grant 9,997,405 - Chandrashekar , et al. June 12, 2 | 2018-06-12 |
| Ternary tungsten boride nitride films and methods for forming same Grant 9,969,622 - Lei , et al. May 15, 2 | 2018-05-15 |
| Tungsten for wordline applications Grant 9,953,984 - Danek , et al. April 24, 2 | 2018-04-24 |
| Tungsten Feature Fill App 20170278749 - Chandrashekar; Anand ; et al. | 2017-09-28 |
| Tungsten feature fill Grant 9,653,353 - Chandrashekar , et al. May 16, 2 | 2017-05-16 |
| Methods of preparing tungsten and tungsten nitride thin films using tungsten chloride precursor Grant 9,595,470 - Bamnolker , et al. March 14, 2 | 2017-03-14 |
| Tungsten For Wordline Applications App 20160233220 - Danek; Michal ; et al. | 2016-08-11 |
| Tungsten Feature Fill App 20160190008 - Chandrashekar; Anand ; et al. | 2016-06-30 |
| Methods and apparatuses for atomic layer cleaning of contacts and vias Grant 9,362,163 - Danek , et al. June 7, 2 | 2016-06-07 |
| Feature Fill With Nucleation Inhibition App 20160093528 - Chandrashekar; Anand ; et al. | 2016-03-31 |
| Tungsten Feature Fill With Nucleation Inhibition App 20160071764 - Chandrashekar; Anand ; et al. | 2016-03-10 |
| Tungsten feature fill Grant 9,240,347 - Chandrashekar , et al. January 19, 2 | 2016-01-19 |
| Methods Of Preparing Tungsten And Tungsten Nitride Thin Films Using Tungsten Chloride Precursor App 20150325475 - Bamnolker; Hanna ; et al. | 2015-11-12 |
| Methods of forming tensile tungsten films and compressive tungsten films Grant 9,034,760 - Chen , et al. May 19, 2 | 2015-05-19 |
| Methods of improving tungsten contact resistance in small critical dimension features Grant 8,975,184 - Chen , et al. March 10, 2 | 2015-03-10 |
| Tungsten Feature Fill App 20150056803 - Chandrashekar; Anand ; et al. | 2015-02-26 |
| Methods And Apparatuses For Atomic Layer Cleaning Of Contacts And Vias App 20150037972 - Danek; Michal ; et al. | 2015-02-05 |
| Systems and methods for selective tungsten deposition in vias Grant 8,778,797 - Gao , et al. July 15, 2 | 2014-07-15 |
| Tungsten barrier and seed for copper filled TSV Grant 8,709,948 - Danek , et al. April 29, 2 | 2014-04-29 |
| Ternary Tungsten Boride Nitride Films And Methods For Forming Same App 20140027664 - Lei; Wei ; et al. | 2014-01-30 |
| Methods Of Improving Tungsten Contact Resistance In Small Critical Dimension Features App 20140030889 - Chen; Feng ; et al. | 2014-01-30 |
| Methods Of Forming Tensile Tungsten Films And Compressive Tungsten Films App 20140011358 - Chen; Feng ; et al. | 2014-01-09 |
| Subtractive patterning to define circuit components Grant 08617982 - | 2013-12-31 |
| Subtractive patterning to define circuit components Grant 8,617,982 - Danek , et al. December 31, 2 | 2013-12-31 |
| Tungsten Feature Fill App 20130302980 - Chandrashekar; Anand ; et al. | 2013-11-14 |
| Tungsten Feature Fill With Nucleation Inhibition App 20130171822 - Chandrashekar; Anand ; et al. | 2013-07-04 |
| Method for improving adhesion of low resistivity tungsten/tungsten nitride layers Grant 8,207,062 - Gao , et al. June 26, 2 | 2012-06-26 |
| Subtractive Patterning To Define Circuit Components App 20120080793 - Danek; Michal ; et al. | 2012-04-05 |
| Systems And Methods For Selective Tungsten Deposition In Vias App 20120077342 - Gao; Juwen ; et al. | 2012-03-29 |
| Methods for improving uniformity and resistivity of thin tungsten films Grant 8,101,521 - Gao , et al. January 24, 2 | 2012-01-24 |
| Tungsten Barrier And Seed For Copper Filled Tsv App 20110221044 - Danek; Michal ; et al. | 2011-09-15 |
| Method For Improving Adhesion Of Low Resistivity Tungsten/tungsten Nitride Layers App 20110059608 - Gao; Juwen ; et al. | 2011-03-10 |
| Reducing silicon attack and improving resistivity of tungsten nitride film Grant 7,754,604 - Wongsenakhum , et al. July 13, 2 | 2010-07-13 |
| Deposition of tungsten nitride Grant 7,691,749 - Levy , et al. April 6, 2 | 2010-04-06 |
| Methods for improving uniformity and resistivity of thin tungsten films Grant 7,655,567 - Gao , et al. February 2, 2 | 2010-02-02 |
| Reducing silicon attack and improving resistivity of tungsten nitride film App 20080045010 - Wongsenakhum; Panya ; et al. | 2008-02-21 |
| Method of forming low-resistivity tungsten interconnects Grant 7,262,125 - Wongsenakhum , et al. August 28, 2 | 2007-08-28 |
| Method for reducing tungsten film roughness and improving step coverage Grant 7,141,494 - Lee , et al. November 28, 2 | 2006-11-28 |
| Deposition of tungsten nitride App 20060094238 - Levy; Karl B. ; et al. | 2006-05-04 |
| Deposition of tungsten nitride Grant 7,005,372 - Levy , et al. February 28, 2 | 2006-02-28 |
| Method for reducing tungsten film roughness and improving step coverage App 20050031786 - Lee, Sang-Hyeob ; et al. | 2005-02-10 |
| Method of forming low-resistivity tungsten interconnects App 20040202786 - Wongsenakhum, Panya ; et al. | 2004-10-14 |
| Deposition of tungsten nitride App 20040142557 - Levy, Karl B. ; et al. | 2004-07-22 |
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