Gantvarg; Eugene

Patent Applications and Registrations

Patent applications and USPTO patent grants for Gantvarg; Eugene.The latest application filed is for "chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion".

Company Profile

0.23.11

Gantvarg; Eugene - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 8,079,894 - Tolles , et al. December 20, 2	2011-12-20
Chemical Mechanical Polishing System Having Multiple Polishing Stations And Providing Relative Linear Polishing Motion App 20100035526 - Tolles; Robert D. ; et al.	2010-02-11
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 7,614,939 - Tolles , et al. November 10, 2	2009-11-10
Chemical Mechanical Polishing System Having Multiple Polishing Stations And Providing Relative Linear Polishing Motion App 20070238399 - Tolles; Robert D. ; et al.	2007-10-11
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 7,255,632 - Tolles , et al. August 14, 2	2007-08-14
Polishing apparatus having a trough Grant 7,238,090 - Tolles , et al. July 3, 2	2007-07-03
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion App 20060194525 - Tolles; Robert D. ; et al.	2006-08-31
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 7,097,544 - Tolles , et al. August 29, 2	2006-08-29
Method of controlling carrier head with multiple chambers App 20050142995 - Perlov, Ilya ; et al.	2005-06-30
Method of controlling carrier head with multiple chambers Grant 6,896,584 - Perlov , et al. May 24, 2	2005-05-24
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion App 20050048880 - Tolles, Robert D. ; et al.	2005-03-03
Method of controlling carrier head with multiple chambers App 20040063385 - Perlov, Ilya ; et al.	2004-04-01
Carrier head with a flexible membrane to form multiple chambers Grant 6,648,740 - Perlov , et al. November 18, 2	2003-11-18
Carrier head with a flexible membrane to form multiple chambers App 20030022609 - Perlov, Ilya ; et al.	2003-01-30
Carrier head with a flexible membrane Grant 6,506,104 - Perlov , et al. January 14, 2	2003-01-14
Method and apparatus for improved substrate handling App 20020170672 - Perlov, Ilya ; et al.	2002-11-21
Method and apparatus for improved substrate handling Grant 6,468,353 - Perlov , et al. October 22, 2	2002-10-22
Method and apparatus for orienting substrates App 20020111710 - Perlov, Ilya ; et al.	2002-08-15
Method and apparatus for orienting substrates Grant 6,393,337 - Perlov , et al. May 21, 2	2002-05-21
Pod door opener App 20020006322 - Perlov, Ilya ; et al.	2002-01-17
Carrier head with a flexible membrane for a chemical mechanical polishing system App 20010041526 - Perlov, Ilya ; et al.	2001-11-15
Carousel wafer transfer system Grant 6,287,386 - Perlov , et al. September 11, 2	2001-09-11
Apparatus and method for aligning a substrate on a support member Grant 6,146,463 - Yudovsky , et al. November 14, 2	2000-11-14
System for chemical mechanical polishing having multiple polishing stations Grant 6,126,517 - Tolles , et al. October 3, 2	2000-10-03
Carrier head with a flexible membrane for a chemical mechanical polishing system Grant 6,106,378 - Perlov , et al. August 22, 2	2000-08-22
Washing transfer station in a system for chemical mechanical polishing Grant 6,086,457 - Perlov , et al. July 11, 2	2000-07-11
Underwater wafer storage and wafer picking for chemical mechanical polishing Grant 6,080,046 - Shendon , et al. June 27, 2	2000-06-27
Conditioner head in a substrate polisher and method Grant 6,036,583 - Perlov , et al. March 14, 2	2000-03-14
Carrier head with a flexible membrane for a chemical mechanical polishing system Grant 5,964,653 - Perlov , et al. October 12, 1	1999-10-12
Carousel wafer transfer system Grant 5,951,770 - Perlov , et al. September 14, 1	1999-09-14
Mechanical fastener to hold a polishing pad on a platen in a chemical mechanical polishing system Grant 5,931,724 - Perlov , et al. August 3, 1	1999-08-03
Apparatus for moving a cassette Grant 5,893,795 - Perlov , et al. April 13, 1	1999-04-13
Radially oscillating carousel processing system for chemical mechanical polishing Grant 5,804,507 - Perlov , et al. September 8, 1	1998-09-08
Continuous processing system for chemical mechanical polishing Grant 5,738,574 - Tolles , et al. April 14, 1	1998-04-14

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