| Patent | Date |
|---|
Methods For Depositing Coatings On Aerospace Components
App 20220298920 - MELNIK; Yuriy ; et al. | 2022-09-22 |
Position and temperature monitoring of ALD platen susceptor
Grant 11,430,680 - Ravid , et al. August 30, 2 | 2022-08-30 |
Methods for depositing coatings on aerospace components
Grant 11,384,648 - Melnik , et al. July 12, 2 | 2022-07-12 |
Particle Coating Methods and Apparatus
App 20220186372 - Gangakhedkar; Kaushal ; et al. | 2022-06-16 |
Rotary Reactor For Uniform Particle Coating With Thin Films
App 20220064794 - Neikirk; Colin C. ; et al. | 2022-03-03 |
Particle coating methods and apparatus
Grant 11,242,599 - Gangakhedkar , et al. February 8, 2 | 2022-02-08 |
Apparatus and Methods for Wafer Chucking on a Susceptor for ALD
App 20210384063 - Yudovsky; Joseph ; et al. | 2021-12-09 |
Rotary reactor for uniform particle coating with thin films
Grant 11,180,851 - Neikirk , et al. November 23, 2 | 2021-11-23 |
Fine leveling of large carousel based susceptor
Grant 11,180,846 - Gangakhedkar November 23, 2 | 2021-11-23 |
Rotary reactor for uniform particle coating with thin films
Grant 11,174,552 - Neikirk , et al. November 16, 2 | 2021-11-16 |
Apparatus and methods for wafer chucking on a susceptor for ALD
Grant 11,094,577 - Yudovsky , et al. August 17, 2 | 2021-08-17 |
Apparatus and methods for wafer rotation in carousel susceptor
Grant 10,861,736 - Gangakhedkar , et al. December 8, 2 | 2020-12-08 |
Contour Pocket and Hybrid Susceptor for Wafer Uniformity
App 20200312702 - Gangakhedkar; Kaushal ; et al. | 2020-10-01 |
Microwave and induction heat treatment of ceramic coatings
Grant 10,774,006 - Gangakhedkar , et al. September 15, 2 | 2020-09-15 |
Methods of minimizing particles on wafer from plasma spray coatings
Grant 10,766,824 - Gangakhedkar , et al. Sep | 2020-09-08 |
Methods For Depositing Coatings On Aerospace Components
App 20200240018 - MELNIK; Yuriy ; et al. | 2020-07-30 |
Contour pocket and hybrid susceptor for wafer uniformity
Grant 10,685,864 - Gangakhedkar , et al. | 2020-06-16 |
Methods for depositing coatings on aerospace components
Grant 10,633,740 - Melnik , et al. | 2020-04-28 |
Fine Leveling of Large Carousel Based Susceptor
App 20200115792 - Gangakhedkar; Kaushal | 2020-04-16 |
Particle Coating Methods and Apparatus
App 20200024736 - Gangakhedkar; Kaushal ; et al. | 2020-01-23 |
Rotary Reactor For Uniform Particle Coating With Thin Films
App 20190376182 - Neikirk; Colin C. ; et al. | 2019-12-12 |
Rotary Reactor for Uniform Particle Coating with Thin Films
App 20190376181 - Neikirk; Colin C. ; et al. | 2019-12-12 |
Fine leveling of large carousel based susceptor
Grant 10,501,844 - Gangakhedkar Dec | 2019-12-10 |
Reactor For Applying A Coating On Internal Surfaces Of Components
App 20190284692 - MELNIK; Yuriy ; et al. | 2019-09-19 |
Methods For Depositing Coatings On Aerospace Components
App 20190284686 - MELNIK; Yuriy ; et al. | 2019-09-19 |
Position And Temperature Monitoring Of ALD Platen Susceptor
App 20190244842 - Ravid; Abraham ; et al. | 2019-08-08 |
Integrated two-axis lift-rotation motor center pedestal in multi-wafer carousel ALD
Grant 10,351,956 - Yudovsky , et al. July 16, 2 | 2019-07-16 |
Apparatus And Methods For Wafer Rotation In Carousel Susceptor
App 20190189498 - Gangakhedkar; Kaushal ; et al. | 2019-06-20 |
Anti-wetting Coating
App 20190169444 - Gangakhedkar; Kaushal | 2019-06-06 |
Position and temperature monitoring of ALD platen susceptor
Grant 10,312,120 - Ravid , et al. | 2019-06-04 |
Methods Of Minimizing Particles On Wafer From Plasma Spray Coatings
App 20190135704 - GANGAKHEDKAR; Kaushal ; et al. | 2019-05-09 |
Apparatus and methods for wafer rotation in carousel susceptor
Grant 10,262,888 - Gangakhedkar , et al. | 2019-04-16 |
Microwave And Induction Heat Treatment Of Ceramic Coatings
App 20180327325 - Gangakhedkar; Kaushal ; et al. | 2018-11-15 |
Lateral plasma/radical source
Grant 10,121,655 - Subramani , et al. November 6, 2 | 2018-11-06 |
Apparatus And Methods For Wafer Chucking On A Susceptor For Ald
App 20180211863 - Yudovsky; Joseph ; et al. | 2018-07-26 |
Apparatus and methods for wafer chucking on a susceptor for ALD
Grant 9,922,860 - Yudovsky , et al. March 20, 2 | 2018-03-20 |
Fine Leveling Of Large Carousel Based Susceptor
App 20180023191 - Gangakhedkar; Kaushal | 2018-01-25 |
Contour Pocket And Hybrid Susceptor For Wafer Uniformity
App 20170352575 - Gangakhedkar; Kaushal ; et al. | 2017-12-07 |
Apparatus And Methods For Wafer Rotation In Carousel Susceptor
App 20170287770 - Gangakhedkar; Kaushal ; et al. | 2017-10-05 |
Lateral Plasma/Radical Source
App 20170148626 - Subramani; Anantha K. ; et al. | 2017-05-25 |
Apparatus and methods for injector to substrate gap control
Grant 9,617,640 - Yudovsky , et al. April 11, 2 | 2017-04-11 |
Position And Temperature Monitoring Of ALD Platen Susceptor
App 20160027675 - Ravid; Abraham ; et al. | 2016-01-28 |
Apparatus And Methods For Wafer Chucking On A Susceptor For ALD
App 20160020132 - Yudovsky; Joseph ; et al. | 2016-01-21 |
Apparatus And Methods For Carousel Atomic Layer Deposition
App 20150376786 - Yudovsky; Joseph ; et al. | 2015-12-31 |
Apparatus And Methods For Differential Pressure Chucking Of Substrates
App 20150376790 - Yudovsky; Joseph ; et al. | 2015-12-31 |
Apparatus And Methods For Injector To Substrate Gap Control
App 20150345022 - Yudovsky; Joseph ; et al. | 2015-12-03 |
Integrated Two-Axis Lift-Rotation Motor Center Pedestal In Multi-Wafer Carousel ALD
App 20150236566 - Yudovsky; Joseph ; et al. | 2015-08-20 |
Automatic Probe Configuration Station And Method Therefor
App 20120319713 - Nguyen; Kent ; et al. | 2012-12-20 |
Continuous linear scanning of large flat panel media
Grant 7,468,611 - Nguyen , et al. December 23, 2 | 2008-12-23 |
Continuous Linear Scanning Of Large Flat Panel Media
App 20080094081 - Nguyen; Kent ; et al. | 2008-04-24 |
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