GanapathiSubramanian; Mahadevan
Patent Applications and Registrations
Patent applications and USPTO patent grants for GanapathiSubramanian; Mahadevan.The latest application filed is for "safe separation for nano imprinting".
- GanapathiSubramanian; Mahadevan - Cupertino CA
- GanapathiSubramanian; Mahadevan - Cedar Park TX US
- Ganapathisubramanian; Mahadevan - Austin TX
| Patent | Date |
|---|---|
| Safe separation for nano imprinting Grant 11,020,894 - Im , et al. June 1, 2 | 2021-06-01 |
| Asymmetric template shape modulation for partial field imprinting Grant 10,578,964 - Ganapathisubramanian , et al. | 2020-03-03 |
| Mold, imprint apparatus, and method of manufacturing article Grant 10,409,156 - Choi , et al. Sept | 2019-09-10 |
| Safe Separation for Nano Imprinting App 20190061228 - Im; Se-Hyuk ; et al. | 2019-02-28 |
| Large area imprint lithography Grant 9,616,614 - Choi , et al. April 11, 2 | 2017-04-11 |
| Chucking system with recessed support feature Grant 9,529,274 - GanapathiSubramanian , et al. December 27, 2 | 2016-12-27 |
| Mold, Imprint Apparatus, And Method Of Manufacturing Article App 20160236400 - Choi; Byung-Jin ; et al. | 2016-08-18 |
| Dual zone template chuck Grant 9,164,375 - Ganapathisubramanian , et al. October 20, 2 | 2015-10-20 |
| Asymmetric Template Shape Modulation for Partial Field Imprinting App 20150183151 - Ganapathisubramanian; Mahadevan ; et al. | 2015-07-02 |
| Safe Separation For Nano Imprinting App 20150165671 - Im; Se-Hyuk ; et al. | 2015-06-18 |
| Chucking System With Recessed Support Feature App 20150091230 - GanapathiSubramanian; Mahadevan ; et al. | 2015-04-02 |
| Safe separation for nano imprinting Grant 8,968,620 - Im , et al. March 3, 2 | 2015-03-03 |
| Chucking system with recessed support feature Grant 8,913,230 - GanapathiSubramanian , et al. December 16, 2 | 2014-12-16 |
| Large Area Imprint Lithography App 20130214452 - Choi; Byung-Jin ; et al. | 2013-08-22 |
| Separation in an imprint lithography process Grant 8,309,008 - Choi , et al. November 13, 2 | 2012-11-13 |
| Energy sources for curing in an imprint lithography system Grant 8,237,133 - Ganapathisubramanian , et al. August 7, 2 | 2012-08-07 |
| Substrate alignment Grant 8,231,821 - Choi , et al. July 31, 2 | 2012-07-31 |
| Imprint lithography system and method Grant 8,215,946 - GanapathiSubramanian , et al. July 10, 2 | 2012-07-10 |
| Safe Deparation For Nano Imprinting App 20110260361 - Im; Se-Hyuk ; et al. | 2011-10-27 |
| Bifurcated contact printing technique Grant 7,906,058 - GanapathiSubramanian , et al. March 15, 2 | 2011-03-15 |
| Chucking System With Recessed Support Feature App 20110001954 - GanapathiSubramanian; Mahadevan ; et al. | 2011-01-06 |
| Dual Zone Template Chuck App 20100320645 - Ganapathisubramanian; Mahadevan ; et al. | 2010-12-23 |
| Technique for separating a mold from solidified imprinting material Grant 7,803,308 - GanapathiSubramanian , et al. September 28, 2 | 2010-09-28 |
| Substrate Alignment App 20100109202 - Choi; Byung-Jin ; et al. | 2010-05-06 |
| Separation in an Imprint Lithography Process App 20100110409 - Choi; Byung-Jin ; et al. | 2010-05-06 |
| Energy Sources for Curing in an Imprint Lithography System App 20100090130 - Ganapathisubramanian; Mahadevan ; et al. | 2010-04-15 |
| Imprint Lithography System And Method App 20100072652 - GanapathiSubramanian; Mahadevan ; et al. | 2010-03-25 |
| Method for expelling gas positioned between a substrate and a mold Grant 7,641,840 - Choi , et al. January 5, 2 | 2010-01-05 |
| Adaptive shape substrate support method Grant 7,504,268 - GanapathiSubramanian , et al. March 17, 2 | 2009-03-17 |
| Adaptive shape substrate support system Grant 7,307,697 - GanapathiSubramanian , et al. December 11, 2 | 2007-12-11 |
| Method For Expelling Gas Positioned Between A Substrate And A Mold App 20070228589 - Choi; Byung-Jin ; et al. | 2007-10-04 |
| Bifurcated contact printing technique App 20070126150 - GanapathiSubramanian; Mahadevan ; et al. | 2007-06-07 |
| Adaptive shape substrate support method App 20050263077 - GanapathiSubramanian, Mahadevan ; et al. | 2005-12-01 |
| Adaptive shape substrate support system App 20050264134 - GanapathiSubramanian, Mahadevan ; et al. | 2005-12-01 |
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