Patent | Date |
---|
Methods for forming thin protective and optical layers on substrates Grant 10,526,708 - Savas , et al. J | 2020-01-07 |
Exhaust manifold in a CVD reactor Grant 10,294,562 - Galewski , et al. | 2019-05-21 |
Plasma generating units for processing a substrate Grant 10,049,859 - Savas , et al. August 14, 2 | 2018-08-14 |
Methods For Forming Thin Protective And Optical Layers On Substrates App 20180202046 - Savas; Stephen E. ;   et al. | 2018-07-19 |
Method for depositing a multi-layer moisture barrier on electronic devices and electronic devices protected by a multi-layer moisture barrier Grant 9,831,466 - Savas , et al. November 28, 2 | 2017-11-28 |
Exhaust Manifold In A Cvd Reactor App 20170283946 - Galewski; Carl ;   et al. | 2017-10-05 |
Apparatus And Method For Forming Thin Protective And Optical Layers On Substrates App 20160289837 - Savas; Stephen E. ;   et al. | 2016-10-06 |
Methods for plasma processing Grant 9,443,702 - Savas , et al. September 13, 2 | 2016-09-13 |
Apparatus and method for dielectric deposition Grant 9,359,674 - Savas , et al. June 7, 2 | 2016-06-07 |
Method for deposition of high-performance coatings and encapsulated electronic devices Grant 9,299,956 - Savas , et al. March 29, 2 | 2016-03-29 |
Methods For Plasma Processing App 20150270109 - Savas; Stephen E. ;   et al. | 2015-09-24 |
Methods for plasma processing Grant 9,096,932 - Savas , et al. August 4, 2 | 2015-08-04 |
Methods for plasma processing Grant 9,096,933 - Savas , et al. August 4, 2 | 2015-08-04 |
Apparatus And Method For Dielectric Deposition App 20140314965 - Savas; Stephen Edward ;   et al. | 2014-10-23 |
Methods For Plasma Processing App 20140220262 - Savas; Stephen E. ;   et al. | 2014-08-07 |
Methods For Plasma Processing App 20140212601 - Savas; Stephen E. ;   et al. | 2014-07-31 |
Apparatus and method for dielectric deposition Grant 8,765,232 - Savas , et al. July 1, 2 | 2014-07-01 |
Methods for plasma processing Grant 8,697,197 - Savas , et al. April 15, 2 | 2014-04-15 |
Apparatus And Method For Forming Thin Protective And Optical Layers On Substrates App 20130337657 - Savas; Stephen E. ;   et al. | 2013-12-19 |
Method For Deposition Of High-performance Coatings And Encapsulated Electronic Devices App 20130334511 - Savas; Stephen E. ;   et al. | 2013-12-19 |
Apparatus And Method For Dielectric Deposition App 20120225218 - Savas; Stephen Edward ;   et al. | 2012-09-06 |
Methods for Plasma Processing App 20110006040 - Savas; Stephen Edward ;   et al. | 2011-01-13 |
Plasma Generating Units for Processing a Substrate App 20110005681 - Savas; Stephen Edward ;   et al. | 2011-01-13 |
Apparatus for Plasma Processing App 20110005682 - Savas; Stephen Edward ;   et al. | 2011-01-13 |
Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition Grant 6,897,119 - Sneh , et al. May 24, 2 | 2005-05-24 |
Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition Grant 6,638,859 - Sneh , et al. October 28, 2 | 2003-10-28 |
Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition App 20030027431 - Sneh, Ofer ;   et al. | 2003-02-06 |
Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition Grant 6,503,330 - Sneh , et al. January 7, 2 | 2003-01-07 |
Method of copper interconnect formation using atomic layer copper deposition Grant 6,368,954 - Lopatin , et al. April 9, 2 | 2002-04-09 |
Gas phase doping of semiconductor material in a cold-wall radiantly heated reactor under reduced pressure Grant 5,324,684 - Kermani , et al. June 28, 1 | 1994-06-28 |