Galburt; Daniel N.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Galburt; Daniel N..The latest application filed is for "method and system for operating an air gauge at programmable or constant standoff".

Company Profile

0.34.28

Galburt; Daniel N. - Wilton CT
Galburt; Daniel N - Wilton CT
Galburt; Daniel N. - Norwalk CT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Fluid gauge proximity sensor and method of operating same using a modulated fluid flow Grant RE42,650 - Galburt , et al. August 30, 2	2011-08-30
Method and system for operating an air gauge at programmable or constant standoff Grant 7,797,985 - Galburt , et al. September 21, 2	2010-09-21
Method and System for Operating an Air Gauge at Programmable or Constant Standoff App 20090000354 - GALBURT; Daniel N. ; et al.	2009-01-01
Method and system for operating an air gauge at programmable or constant standoff Grant 7,437,911 - Galburt , et al. October 21, 2	2008-10-21
Levitated reticle-masking blade stage Grant 7,372,548 - Carter , et al. May 13, 2	2008-05-13
Lithographic apparatus and device manufacturing method utilizing a metrology system with sensors Grant 7,369,214 - Galburt May 6, 2	2008-05-06
Drive for reticle-masking blade stage Grant 7,359,037 - Carter , et al. April 15, 2	2008-04-15
System and method for patterning a flexible substrate in a lithography tool Grant 7,292,308 - Galburt , et al. November 6, 2	2007-11-06
Patterned mask holding device and method using two holding systems Grant 7,196,775 - Galburt March 27, 2	2007-03-27
Lithographic apparatus and device manufacturing method utilizing a metrology system App 20070035714 - Galburt; Daniel N.	2007-02-15
Actuator coil cooling system Grant 7,176,593 - Galburt February 13, 2	2007-02-13
Lithographic tool with dual isolation system and method for configuring the same Grant 7,164,463 - Galburt , et al. January 16, 2	2007-01-16
Lithographic tool with dual isolation system and method for configuring the same Grant 7,158,213 - Galburt , et al. January 2, 2	2007-01-02
Fluid gauge proximity sensor and method of operating same using a modulated fluid flow Grant 7,134,321 - Galburt , et al. November 14, 2	2006-11-14
High-resolution gas gauge proximity sensor Grant 7,124,624 - Gajdeczko , et al. October 24, 2	2006-10-24
Method and apparatus for cooling a reticle during lithographic exposure Grant 7,105,836 - del Puerto , et al. September 12, 2	2006-09-12
Flexure-supported split reaction mass Grant 7,075,623 - Galburt , et al. July 11, 2	2006-07-11
Method and system for operating an air gauge at programmable or constant standoff App 20060123888 - Galburt; Daniel N. ; et al.	2006-06-15
System to increase throughput in a dual substrate stage double exposure lithography system Grant 7,053,990 - Galburt , et al. May 30, 2	2006-05-30
Method to increase throughput in a dual substrate stage double exposure lithography system Grant 7,050,156 - Galburt , et al. May 23, 2	2006-05-23
Removable reticle window and support frame using magnetic force Grant 7,042,554 - Galburt May 9, 2	2006-05-09
Lithographic tool with dual isolation system and method for configuring the same App 20060092394 - Galburt; Daniel N. ; et al.	2006-05-04
Gas gauge proximity sensor with a modulated gas flow Grant 7,021,121 - Ebert , et al. April 4, 2	2006-04-04
High-resolution gas gauge proximity sensor Grant 7,010,958 - Gajdeczko , et al. March 14, 2	2006-03-14
Patterned mask holding device and method using two holding systems App 20060038973 - Galburt; Daniel N.	2006-02-23
Levitated reticle-masking blade stage App 20060023195 - Carter; Frederick M. ; et al.	2006-02-02
Fluid gauge proximity sensor and method of operating same using a modulated fluid flow App 20060016247 - Galburt; Daniel N. ; et al.	2006-01-26
Method, system, and apparatus for management of reaction loads in a lithography system Grant 6,989,889 - Galburt January 24, 2	2006-01-24
Gas gauge proximity sensor with a modulated gas flow App 20050274173 - Ebert, Earl W. ; et al.	2005-12-15
High-resolution gas gauge proximity sensor App 20050268698 - Gajdeczko, Boguslaw F. ; et al.	2005-12-08
Actuator coil cooling system App 20050231048 - Galburt, Daniel N.	2005-10-20
Removable reticle window and support frame using magnetic force App 20050231707 - Galburt, Daniel N.	2005-10-20
System and method for patterning a flexible substrate in a lithography tool App 20050211919 - Galburt, Daniel N. ; et al.	2005-09-29
System, method, and apparatus for a magnetically levitated and driven reticle-masking blade stage mechanism Grant 6,950,175 - Galburt , et al. September 27, 2	2005-09-27
Actuator coil cooling system Grant 6,946,761 - Galburt September 20, 2	2005-09-20
Levitated and driven reticle-masking blade stage App 20050200830 - Carter, Frederick M. ; et al.	2005-09-15
Method, system, and apparatus for management of reaction loads in a lithography system App 20050185163 - Galburt, Daniel N.	2005-08-25
Removable reticle window and support frame using magnetic force Grant 6,912,043 - Galburt June 28, 2	2005-06-28
Magnetically levitated and driven reticle-masking blade stage mechanism having six degrees freedom of motion Grant 6,906,789 - Carter , et al. June 14, 2	2005-06-14
Flexure-supported split reaction mass App 20050103967 - Galburt, Daniel N. ; et al.	2005-05-19
Method, system, and apparatus for management of reaction loads in a lithography system Grant 6,885,435 - Galburt April 26, 2	2005-04-26
System to increase throughput in a dual substrate stage double exposure lithography system App 20040257551 - Galburt, Daniel N. ; et al.	2004-12-23
System, method, and apparatus for a magnetically levitated and driven reticle-masking blade stage mechanism App 20040239283 - Galburt, Daniel N. ; et al.	2004-12-02
Magnetically Levitated And Driven Reticle-masking Blade Stage Mechanism Having Six Degrees Of Freedom Of Motion App 20040239911 - Carter, Frederick M. ; et al.	2004-12-02
Actuator coil cooling system App 20040207273 - Galburt, Daniel N.	2004-10-21
Method, system, and apparatus for management of reaction loads in a lithography system App 20040207830 - Galburt, Daniel N.	2004-10-21
Method, system, and apparatus for management of reaction loads in a lithography system Grant 6,784,978 - Galburt August 31, 2	2004-08-31
Removable reticle window and support frame using magnetic force App 20040135987 - Galburt, Daniel N.	2004-07-15
Apparatus, system, and method for precision positioning and alignment of a lens in an optical system Grant 6,760,167 - Meehan , et al. July 6, 2	2004-07-06
High-resolution gas gauge proximity sensor App 20040118183 - Gajdeczko, Boguslaw F. ; et al.	2004-06-24
Method and apparatus for cooling a reticle during lithographic exposure App 20040079518 - del Puerto, Santiago ; et al.	2004-04-29
Apparatus, system, and method for precision positioning and alignment of a lens in an optical system App 20030202260 - Meehan, Michael F. ; et al.	2003-10-30
Method, system, and apparatus for management of reaction loads in a lithography system App 20030174304 - Galburt, Daniel N.	2003-09-18
Lithographic tool with dual isolation system and method for configuring the same App 20030164931 - Galburt, Daniel N. ; et al.	2003-09-04
Lithographic tool with dual isolation system and method for configuring the same App 20020118346 - Galburt, Daniel N. ; et al.	2002-08-29
Apparatus, system, and method for precision positioning and alignment of a lens in an optical system App 20010033437 - Meehan, Michael F. ; et al.	2001-10-25
Dynamically adjustable high resolution adjustable slit Grant 6,097,474 - McCullough , et al. August 1, 2	2000-08-01
Method of controlling illumination field to reduce line width variation Grant 6,013,401 - McCullough , et al. January 11, 2	2000-01-11
On-axix mask and wafer alignment system Grant 5,966,216 - Galburt , et al. October 12, 1	1999-10-12
Wafer stage with reference surface Grant 5,285,142 - Galburt , et al. February 8, 1	1994-02-08
Microlithographic apparatus Grant 4,952,858 - Galburt August 28, 1	1990-08-28
Universal edged-based wafer alignment apparatus Grant 4,907,035 - Galburt , et al. March 6, 1	1990-03-06

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