Galburt; Daniel

Patent Applications and Registrations

Patent applications and USPTO patent grants for Galburt; Daniel.The latest application filed is for "system to increase throughput in a dual substrate stage double exposure lithography system".

Company Profile

0.8.5

Galburt; Daniel - Wilton CT
Galburt; Daniel - Norwalk CT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and system for improved trajectory planning and execution Grant 7,389,155 - Galburt , et al. June 17, 2	2008-06-17
System to increase throughput in a dual substrate stage double exposure lithography system Grant 6,965,427 - Galburt , et al. November 15, 2	2005-11-15
System to increase throughput in a dual substrate stage double exposure lithography system App 20050248747 - Galburt, Daniel ; et al.	2005-11-10
System to increase throughput in a dual substrate stage double exposure lithography system App 20050162636 - Galburt, Daniel ; et al.	2005-07-28
Method and system for improved trajectory planning and execution App 20050077484 - Galburt, Daniel ; et al.	2005-04-14
Method to increase throughput in a dual substrate stage double exposure lithography system Grant 6,876,439 - Galburt , et al. April 5, 2	2005-04-05
Position correction in Y of mask object shift due to Z offset and non-perpendicular illumination Grant 6,853,440 - Van De Pasch , et al. February 8, 2	2005-02-08
Method, system, and computer program product for improved trajectory planning and execution Grant 6,845,287 - Galburt , et al. January 18, 2	2005-01-18
System and method to increase throughput in a dual substrate stage double exposure lithography system App 20040239902 - Galburt, Daniel ; et al.	2004-12-02
System and method to increase throughput in a dual substrate stage double exposure lithography system Grant 6,781,674 - Galburt , et al. August 24, 2	2004-08-24
Method, system, and computer program product for improved trajectory planning and execution App 20040098160 - Galburt, Daniel ; et al.	2004-05-20
Electro-magnetic alignment apparatus Grant 4,506,205 - Trost , et al. March 19, 1	1985-03-19
Electro-magnetic apparatus Grant 4,506,204 - Galburt March 19, 1	1985-03-19

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