GAGE; Christopher
Patent Applications and Registrations
Patent applications and USPTO patent grants for GAGE; Christopher.The latest application filed is for "ceramic pedestal with multi-layer heater for enhanced thermal uniformity".
- GAGE; Christopher - Campbell CA
| Patent | Date |
|---|---|
| Ceramic Pedestal With Multi-layer Heater For Enhanced Thermal Uniformity App 20210398829 - GAGE; Christopher | 2021-12-23 |
| Minimum contact area wafer clamping with gas flow for rapid wafer cooling Grant 8,454,294 - Gage , et al. June 4, 2 | 2013-06-04 |
| Transferring heat in loadlocks Grant 8,288,288 - Gage , et al. October 16, 2 | 2012-10-16 |
| Edge removal of films using externally generated plasma species Grant 8,100,081 - Henri , et al. January 24, 2 | 2012-01-24 |
| Minimum Contact Area Wafer Clamping With Gas Flow For Rapid Wafer Cooling App 20110318142 - Gage; Christopher ; et al. | 2011-12-29 |
| Minimum contact area wafer clamping with gas flow for rapid wafer cooling Grant 8,033,771 - Gage , et al. October 11, 2 | 2011-10-11 |
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