Gaff; Keith William

Patent Applications and Registrations

Patent applications and USPTO patent grants for Gaff; Keith William.The latest application filed is for "power switching system for esc with array of thermal control elements".

Company Profile

3.27.25

Gaff; Keith William - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Edge seal configurations for a lower electrode assembly Grant 10,892,197 - Gaff , et al. January 12, 2	2021-01-12
Power switching system for ESC with array of thermal control elements Grant 10,770,363 - Gaff , et al. Sep	2020-09-08
Multi-plane heater for semiconductor substrate support Grant 10,690,414 - Gaff , et al.	2020-06-23
Method of determining thermal stability of a substrate support assembly Grant 10,437,236 - Waldmann , et al. O	2019-10-08
Auto-correction of electrostatic chuck temperature non-uniformity Grant 10,381,248 - Wu , et al. A	2019-08-13
Power Switching System For Esc With Array Of Thermal Control Elements App 20180374763 - Gaff; Keith William ; et al.	2018-12-27
Edge Seal Configurations For A Lower Electrode Assembly App 20180366379 - GAFF; Keith William ; et al.	2018-12-20
Edge seal for lower electrode assembly Grant 10,090,211 - Gaff , et al. October 2, 2	2018-10-02
Adjusting substrate temperature to improve CD uniformity Grant 10,056,225 - Gaff , et al. August 21, 2	2018-08-21
Power switching system for ESC with array of thermal control elements Grant 10,049,948 - Gaff , et al. August 14, 2	2018-08-14
Edge Seal For Lower Electrode Assembly App 20180106371 - Schaefer; David ; et al.	2018-04-19
Edge seal for lower electrode assembly Grant 9,869,392 - Schaefer , et al. January 16, 2	2018-01-16
Edge seal for lower electrode assembly Grant 9,859,142 - Schaefer , et al. January 2, 2	2018-01-02
Method Of Determining Thermal Stability Of A Substrate Support Assembly App 20170322546 - Waldmann; Ole ; et al.	2017-11-09
Method of determining thermal stability of a substrate support assembly Grant 9,716,022 - Waldmann , et al. July 25, 2	2017-07-25
Multi-plane Heater For Semiconductor Substrate Support App 20170167790 - Gaff; Keith William ; et al.	2017-06-15
Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control element Grant 9,543,171 - Waldmann , et al. January 10, 2	2017-01-10
Method and apparatus for chuck thermal calibration Grant 9,530,679 - Gaff , et al. December 27, 2	2016-12-27
Auto-correction Of Electrostatic Chuck Temperature Non-uniformity App 20160372352 - Wu; Benny ; et al.	2016-12-22
Lower electrode assembly of plasma processing chamber Grant 9,412,555 - Augustino , et al. August 9, 2	2016-08-09
Auto-correction Of Malfunctioning Thermal Control Element In A Temperature Control Plate Of A Semiconductor Substrate Support Assembly App 20150364388 - Waldmann; Ole ; et al.	2015-12-17
Edge Seal For Lower Electrode Assembly App 20150187614 - Gaff; Keith William ; et al.	2015-07-02
Method Of Determining Thermal Stability Of A Substrate Support Assembly App 20150168962 - Waldmann; Ole ; et al.	2015-06-18
Power Switching System For Esc With Array Of Thermal Control Elements App 20140154819 - Gaff; Keith William ; et al.	2014-06-05
Adjusting Substrate Temperature To Improve Cd Uniformity App 20140110060 - Gaff; Keith William ; et al.	2014-04-24
Adjusting substrate temperature to improve CD uniformity Grant 8,642,480 - Gaff , et al. February 4, 2	2014-02-04
Heating plate with diode planar heater zones for semiconductor processing Grant 8,624,168 - Gaff , et al. January 7, 2	2014-01-07
Edge Seal For Lower Electrode Assembly App 20130340942 - Schaefer; David ; et al.	2013-12-26
Thermal plate with planar thermal zones for semiconductor processing Grant 8,587,113 - Gaff , et al. November 19, 2	2013-11-19
Thermal Plate With Planar Thermal Zones For Semiconductor Processing App 20130269368 - GAFF; Keith William ; et al.	2013-10-17
Method and Apparatus for Chuck Thermal Calibration App 20130235506 - Gaff; Keith William ; et al.	2013-09-12
Thermal plate with planar thermal zones for semiconductor processing Grant 8,461,674 - Gaff , et al. June 11, 2	2013-06-11
Method and apparatus for chuck thermal calibration Grant 8,449,174 - Gaff , et al. May 28, 2	2013-05-28
Edge Seal For Lower Electrode Assembly App 20130097840 - Schaefer; David ; et al.	2013-04-25
Thermal Plate With Planar Thermal Zones For Semiconductor Processing App 20130072035 - Gaff; Keith William ; et al.	2013-03-21
Heating Plate With Diode Planar Heater Zones For Semiconductor Processing App 20130068750 - Gaff; Keith William ; et al.	2013-03-21
Adjusting Substrate Temperature To Improve Cd Uniformity App 20110143462 - Gaff; Keith William ; et al.	2011-06-16
Method and Apparatus for Chuck Thermal Calibration App 20100309604 - Gaff; Keith William ; et al.	2010-12-09
Method and apparatus for chuck thermal calibration Grant 7,802,917 - Gaff , et al. September 28, 2	2010-09-28
Lower Electrode Assembly Of Plasma Processing Chamber App 20100108261 - Augustino; Jason ; et al.	2010-05-06
Method and apparatus for chuck thermal calibration App 20070030621 - Gaff; Keith William ; et al.	2007-02-08

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