| Patent | Date |
|---|
Electrostatic Chuck With Ceramic Monolithic Body
App 20220148903 - WANG; Feng ; et al. | 2022-05-12 |
Electrostatic Chuck Design For Cooling-gas Light-up Prevention
App 20210296099 - Matyushkin; Alexander ; et al. | 2021-09-23 |
Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity
Grant 11,069,553 - Matyushkin , et al. July 20, 2 | 2021-07-20 |
Electrostatically Clamped Edge Ring
App 20210166965 - KIMBALL; Christopher ; et al. | 2021-06-03 |
Electrostatic chuck design for cooling-gas light-up prevention
Grant 11,024,532 - Matyushkin , et al. June 1, 2 | 2021-06-01 |
Electrostatically clamped edge ring
Grant 10,923,380 - Kimball , et al. February 16, 2 | 2021-02-16 |
Systems and methods for correcting non-uniformities in plasma processing of substrates
Grant 10,872,748 - Singh , et al. December 22, 2 | 2020-12-22 |
Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode
Grant 10,804,129 - Kimball , et al. October 13, 2 | 2020-10-13 |
Edge ring dimensioned to extend lifetime of elastomer seal in a plasma processing chamber
Grant 10,804,081 - Chhatre , et al. October 13, 2 | 2020-10-13 |
Substrate support with thermal zones for semiconductor processing
Grant 10,720,346 - Singh , et al. | 2020-07-21 |
Systems And Methods For Correcting Non-uniformities In Plasma Processing Of Substrates
App 20190371576 - SINGH; Harmeet ; et al. | 2019-12-05 |
Multi-plate Electrostatic Chucks With Ceramic Baseplates
App 20190267218 - Wang; Feng ; et al. | 2019-08-29 |
Component of a substrate support assembly producing localized magnetic fields
Grant 10,388,493 - Singh , et al. A | 2019-08-20 |
Substrate supports with multi-layer structure including independent operated heater zones
Grant 10,236,193 - Singh , et al. | 2019-03-19 |
Electrostatic Chuck Design For Cooling-gas Light-up Prevention
App 20190006225 - Matyushkin; Alexander ; et al. | 2019-01-03 |
Electrostatic Chuck Assembly Incorporating A Gasket For Distributing Rf Power To A Ceramic Embedded Electrode
App 20180277412 - KIMBALL; Christopher ; et al. | 2018-09-27 |
Electrostatic chuck design for cooling-gas light-up prevention
Grant 10,083,853 - Matyushkin , et al. September 25, 2 | 2018-09-25 |
ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough
Grant 10,002,782 - Kimball , et al. June 19, 2 | 2018-06-19 |
Electrostatically Clamped Edge Ring
App 20180166312 - KIMBALL; Christopher ; et al. | 2018-06-14 |
Substrate Support With Varying Depths Of Areas Between Mesas And Corresponding Temperature Dependent Method Of Fabricating
App 20180148835 - Erickson; Ann ; et al. | 2018-05-31 |
Electrostatically clamped edge ring
Grant 9,922,857 - Kimball , et al. March 20, 2 | 2018-03-20 |
Electrostatic Chuck With Features For Preventing Electrical Arcing And Light-up And Improving Process Uniformity
App 20180012785 - Matyushkin; Alexander ; et al. | 2018-01-11 |
Substrate Supports With Multi-layer Structure Including Independent Operated Heater Zones
App 20170229327 - Singh; Harmeet ; et al. | 2017-08-10 |
Heating plate with heating zones for substrate processing and method of use thereof
Grant 9,646,861 - Singh , et al. May 9, 2 | 2017-05-09 |
Electrostatic Chuck Design For Cooling-gas Light-up Prevention
App 20170110356 - Matyushkin; Alexander ; et al. | 2017-04-20 |
Substrate Support With Thermal Zones For Semiconductor Processing
App 20160300741 - Singh; Harmeet ; et al. | 2016-10-13 |
Heating plate with planar heater zones for semiconductor processing
Grant 9,392,643 - Singh , et al. July 12, 2 | 2016-07-12 |
Esc Assembly Including An Electrically Conductive Gasket For Uniform Rf Power Delivery Therethrough
App 20160111314 - Kimball; Christopher ; et al. | 2016-04-21 |
Electrostatic chuck including declamping electrode and method of declamping
Grant 9,101,038 - Singh , et al. August 4, 2 | 2015-08-04 |
Edge Ring Dimensioned To Extend Lifetime Of Elastomer Seal In A Plasma Processing Chamber
App 20150179412 - Chhatre; Ambarish ; et al. | 2015-06-25 |
Electrostatic Chuck Including Declamping Electrode And Method Of Declamping
App 20150181683 - Singh; Harmeet ; et al. | 2015-06-25 |
Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis
Grant 9,012,243 - Kimura , et al. April 21, 2 | 2015-04-21 |
Controlling Cd And Cd Uniformity With Trim Time And Temperature On A Wafer By Wafer Basis
App 20150053347 - Kimura; Yoshie ; et al. | 2015-02-26 |
Heating plate with planar heater zones for semiconductor processing
Grant 8,884,194 - Singh , et al. November 11, 2 | 2014-11-11 |
Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis
Grant 8,852,964 - Kimura , et al. October 7, 2 | 2014-10-07 |
Controlling Cd And Cd Uniformity With Trim Time And Temperature On A Wafer By Wafer Basis
App 20140220709 - Kimura; Yoshie ; et al. | 2014-08-07 |
Heating Plate With Planar Heater Zones For Semiconductor Processing
App 20140096909 - Singh; Harmeet ; et al. | 2014-04-10 |
Heating Plate With Planar Heater Zones For Semiconductor Processing
App 20140047705 - Singh; Harmeet ; et al. | 2014-02-20 |
Heating Plate With Planar Heater Zones For Semiconductor Processing
App 20140045337 - Singh; Harmeet ; et al. | 2014-02-13 |
Heating plate with planar heating zones for semiconductor processing
Grant 8,637,794 - Singh , et al. January 28, 2 | 2014-01-28 |
Component Of A Substrate Support Assembly Producing Localized Magnetic Fields
App 20130072025 - Singh; Harmeet ; et al. | 2013-03-21 |
Heating Plate With Planar Heating Zones For Semiconductor Processing
App 20110092072 - Singh; Harmeet ; et al. | 2011-04-21 |
Apparatus for determining a temperature of a substrate and methods therefor
Grant 7,578,616 - Gaff , et al. August 25, 2 | 2009-08-25 |
In-situ wafer temperature measurement and control
Grant 7,560,007 - Gaff July 14, 2 | 2009-07-14 |
Apparatus for determining a temperature of a substrate and methods therefor
Grant 7,497,614 - Gaff , et al. March 3, 2 | 2009-03-03 |
In-situ wafer temperature measurement and control
App 20080064126 - Gaff; Keith | 2008-03-13 |
Apparatus For Determining A Temperature Of A Substrate And Methods Therefor
App 20080019418 - Gaff; Keith ; et al. | 2008-01-24 |
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