| Patent | Date |
|---|
Arrangement for generating extreme ultraviolet radiation from a plasma generated by an energy beam with high conversion efficiency and minimum contamination
Grant 7,599,470 - Kloepfel , et al. October 6, 2 | 2009-10-06 |
Device and method for generating extreme ultraviolet (EUV) radiation
Grant 7,476,884 - Gaebel , et al. January 13, 2 | 2009-01-13 |
Arrangement for providing target material for the generation of short-wavelength electromagnetic radiation
Grant 7,405,413 - Hergenhan , et al. July 29, 2 | 2008-07-29 |
Arrangement for providing a reproducible target flow for the energy beam-induced generation of short-wavelength electromagnetic radiation
Grant 7,372,057 - Gaebel , et al. May 13, 2 | 2008-05-13 |
Arrangement For Generating Extreme Ultraviolet Radiation From A Plasma Generated By An Energy Beam With High Conversion Efficiency And Minimum Contamination
App 20080067456 - KLOEPFEL; DIETHARD ; et al. | 2008-03-20 |
Collector mirror for plasma-based, short-wavelength radiation sources
Grant 7,329,014 - Balogh , et al. February 12, 2 | 2008-02-12 |
Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasma
Grant 7,274,030 - Hergenhan , et al. September 25, 2 | 2007-09-25 |
Method and arrangement for the plasma-based generation of intensive short-wavelength radiation
Grant 7,250,621 - Gaebel , et al. July 31, 2 | 2007-07-31 |
Radiation source for the generation of short-wavelength radiation
Grant 7,233,013 - Hergenhan , et al. June 19, 2 | 2007-06-19 |
Arrangement for the generation of a pulsed laser beam of high average output
Grant 7,218,651 - Hergenhan , et al. May 15, 2 | 2007-05-15 |
Method and arrangement for the plasma-based generation of soft x-radiation
Grant 7,161,163 - Gaebel , et al. January 9, 2 | 2007-01-09 |
Arrangement for the stabilization of the radiation emission of a plasma
Grant 7,122,814 - Hergenhan , et al. October 17, 2 | 2006-10-17 |
Collector mirror for plasma-based, short-wavelength radiation sources
App 20060227826 - Balogh; Istvan ; et al. | 2006-10-12 |
Plasma radiation source
App 20060226377 - Hergenhan; Guido ; et al. | 2006-10-12 |
Radiation source for the generation of short-wavelength radiation
App 20060219959 - Hergenhan; Guido ; et al. | 2006-10-05 |
Device and method for generating extreme ultraviolet (EUV) radiation
App 20060192157 - Gaebel; Kai ; et al. | 2006-08-31 |
Arrangement for the generation of a pulsed laser beam of high average output
App 20060140232 - Hergenhan; Guido ; et al. | 2006-06-29 |
Arrangement for providing a reproducible target flow for the energy beam-induced generation of short-wavelength electromagnetic radiation
App 20060043319 - Gaebel; Kai ; et al. | 2006-03-02 |
Arrangement for the generation of intensive short-wave radiation based on a plasma
Grant 6,995,382 - Ziener , et al. February 7, 2 | 2006-02-07 |
Arrangement for providing target material for the generation of short-wavelength electromagnetic radiation
App 20060024216 - Hergenhan; Guido ; et al. | 2006-02-02 |
Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasma
App 20050274912 - Hergenhan, Guido ; et al. | 2005-12-15 |
Method and arrangement for the plasma-based generation of intensive short-wavelength radiation
App 20050258768 - Gaebel, Kai ; et al. | 2005-11-24 |
Method and arrangement for the plasma-based generation of soft x-radiation
App 20050169429 - Gaebel, Kai ; et al. | 2005-08-04 |
Radiation source for generating extreme ultraviolet radiation
Grant 6,882,704 - Schriever , et al. April 19, 2 | 2005-04-19 |
Arrangement for the stabilization of the radiation emission of a plasma
App 20040195529 - Hergenhan, Guido ; et al. | 2004-10-07 |
Arrangement for the generation of intensive short-wave radiation based on a plasma
App 20040159802 - Ziener, Christian ; et al. | 2004-08-19 |
Radiation source for generating extreme ultraviolet radiation
App 20040135517 - Schriever, Guido ; et al. | 2004-07-15 |
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