| Patent | Date |
|---|
MEMS device including a chip carrier
Grant 8,203,190 - Goodelle , et al. June 19, 2 | 2012-06-19 |
Proof-mass with supporting structure on integrated circuit-MEMS platform and method of fabricating the same
Grant 8,094,980 - Diamond , et al. January 10, 2 | 2012-01-10 |
Mems Device And Method Of Fabricating The Same
App 20100264499 - Goodelle; Jason P. ; et al. | 2010-10-21 |
Method of fabricating MEMS device
Grant 7,763,488 - Goodelle , et al. July 27, 2 | 2010-07-27 |
Proof-mass with supporting structure on integrated circuit-MEMS platform and method of fabricating the same
App 20100147076 - Diamond; Brett M. ; et al. | 2010-06-17 |
Proof-mass with supporting structure on integrated circuit-MEMS platform
Grant 7,640,805 - Diamond , et al. January 5, 2 | 2010-01-05 |
Proof-mass with supporting structure on integrated circuit-MEMS platform and method of fabricating the same
App 20080142914 - Diamond; Brett M. ; et al. | 2008-06-19 |
MEMS device and method of fabricating the same
App 20070278601 - Goodelle; Jason P. ; et al. | 2007-12-06 |
MEMS membrane based sensor
Grant 7,223,366 - Hauan , et al. May 29, 2 | 2007-05-29 |
MEMS digital-to-acoustic transducer with error cancellation
Grant 7,215,527 - Neumann, Jr. , et al. May 8, 2 | 2007-05-08 |
Multi-metal layer MEMS structure and process for making the same
Grant 7,202,101 - Gabriel , et al. April 10, 2 | 2007-04-10 |
Systems and methods for facilitating research and development
Grant 7,130,802 - Mehregany , et al. October 31, 2 | 2006-10-31 |
Process for forming and acoustically connecting structures on a substrate
Grant 7,049,051 - Gabriel , et al. May 23, 2 | 2006-05-23 |
MEMS digital-to-acoustic transducer with error cancellation
Grant 7,019,955 - Loeb , et al. March 28, 2 | 2006-03-28 |
Multi-metal layer MEMS structure and process for making the same
Grant 6,943,448 - Gabriel , et al. September 13, 2 | 2005-09-13 |
MEMS digital-to-acoustic transducer with error cancellation
App 20050061770 - Neumann, John J. JR. ; et al. | 2005-03-24 |
MEMS digital-to-acoustic transducer with error cancellation
App 20050013455 - Loeb, Wayne A. ; et al. | 2005-01-20 |
Multi-metal layer MEMS structure and process for making the same
App 20050000932 - Gabriel, Kaigham J. ; et al. | 2005-01-06 |
MEMS digital-to-acoustic transducer with error cancellation
Grant 6,829,131 - Loeb , et al. December 7, 2 | 2004-12-07 |
MEMS membrane based sensor
App 20040197227 - Hauan, Steinar ; et al. | 2004-10-07 |
Process for forming and acoustically connecting structures on a substrate
App 20040146810 - Gabriel, Kaigham J. ; et al. | 2004-07-29 |
Multi-metal layer MEMS structure and process for making the same
App 20040145056 - Gabriel, Kaigham J. ; et al. | 2004-07-29 |
Multiple membrane structure and method of manufacture
App 20030210799 - Gabriel, Kaigham J. ; et al. | 2003-11-13 |
Method and apparatus to retrieve information from a network
Grant 6,584,468 - Gabriel , et al. June 24, 2 | 2003-06-24 |
Minimally invasive sensing system for measuring rigidity of anatomical matter
App 20030055360 - Zeleznik, Matthew A. ; et al. | 2003-03-20 |
Method and apparatus for reconstruction of soundwaves from digital signals
App 20030044029 - Gabriel, Kaigham J. ; et al. | 2003-03-06 |
Thin film shape memory alloy and method for producing
Grant 4,864,824 - Gabriel , et al. September 12, 1 | 1989-09-12 |
Item identification tag for rapid inventory data acquisition system
Grant 4,862,160 - Ekchian , et al. August 29, 1 | 1989-08-29 |
Micro-electrostatic motor
Grant 4,754,185 - Gabriel , et al. June 28, 1 | 1988-06-28 |
Shape memory alloy actuator
Grant 4,700,541 - Gabriel , et al. October 20, 1 | 1987-10-20 |
Rapid inventory data acquistion system
Grant 4,673,932 - Ekchian , et al. June 16, 1 | 1987-06-16 |
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