loadpatents
Patent applications and USPTO patent grants for Futatsuya; Hiroki.The latest application filed is for "apparatus for manufacturing a photomask".
Patent | Date |
---|---|
Semiconductor device manufacturing method Grant 8,349,541 - Setta , et al. January 8, 2 | 2013-01-08 |
Semiconductor device manufacturing method Grant 8,349,540 - Setta , et al. January 8, 2 | 2013-01-08 |
Apparatus for manufacturing a photomask Grant 8,316,328 - Futatsuya , et al. November 20, 2 | 2012-11-20 |
Apparatus For Manufacturing A Photomask App 20120206700 - Futatsuya; Hiroki ;   et al. | 2012-08-16 |
Apparatus for performing a manufacturing method of a photomask Grant 8,185,848 - Futatsuya , et al. May 22, 2 | 2012-05-22 |
Method For Manufacturing A Photomask App 20120005636 - Futatsuya; Hiroki ;   et al. | 2012-01-05 |
Semiconductor Device Manufacturing Method App 20110312186 - SETTA; Yuji ;   et al. | 2011-12-22 |
Method for manufacturing a photomask Grant 8,037,427 - Futatsuya , et al. October 11, 2 | 2011-10-11 |
Method For Manufacturing A Photomask App 20110159417 - Futatsuya; Hiroki ;   et al. | 2011-06-30 |
Method for manufacturing a photomask Grant 7,926,003 - Futatsuya , et al. April 12, 2 | 2011-04-12 |
Method For Manufacturing A Photomask App 20090293039 - FUTATSUYA; Hiroki ;   et al. | 2009-11-26 |
Method and equipment for simulation Grant 7,577,556 - Futatsuya , et al. August 18, 2 | 2009-08-18 |
Method for manufacturing a photomask Grant 7,562,334 - Futatsuya , et al. July 14, 2 | 2009-07-14 |
Photomask fabrication method Grant 7,519,943 - Futatsuya April 14, 2 | 2009-04-14 |
Simulation method and semiconductor device fabrication method App 20070198965 - Futatsuya; Hiroki | 2007-08-23 |
Semiconductor device manufacturing method App 20070178411 - Setta; Yuji ;   et al. | 2007-08-02 |
Method for manufacturing photomask and method for manufacturing semiconductor device using photomask App 20060222964 - Futatsuya; Hiroki ;   et al. | 2006-10-05 |
Proximity effect correction apparatus, proximity effect correction method, storage medium, and computer program product Grant 7,047,516 - Futatsuya May 16, 2 | 2006-05-16 |
Method and equipment for simulation App 20050050490 - Futatsuya, Hiroki ;   et al. | 2005-03-03 |
Light intensity simulation method, program product, and designing method of photomask Grant 6,862,726 - Futatsuya , et al. March 1, 2 | 2005-03-01 |
Light intensity simulation method, program product, and designing method of photomask App 20040025138 - Futatsuya, Hiroki ;   et al. | 2004-02-05 |
Proximity effect correction apparatus, proximity effect correction method, storage medium , and computer program product App 20030170551 - Futatsuya, Hiroki | 2003-09-11 |
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