Fushimi; Akihito
Patent Applications and Registrations
Patent applications and USPTO patent grants for Fushimi; Akihito.The latest application filed is for "etching method and plasma processing apparatus".
- Fushimi; Akihito - Miyagi JP
- Fushimi; Akihito - Kurokawa-gun JP
| Patent | Date |
|---|---|
| Etching method and plasma processing apparatus Grant 11,373,895 - Ariyoshi , et al. June 28, 2 | 2022-06-28 |
| Etching Method And Plasma Processing Apparatus App 20210005503 - ARIYOSHI; Fumiaki ; et al. | 2021-01-07 |
| Plasma processing apparatus Grant 10,410,902 - Sasaki , et al. Sept | 2019-09-10 |
| Plasma processing apparatus and plasma processing method Grant 10,141,164 - Sasaki , et al. Nov | 2018-11-27 |
| Plasma Processing Apparatus App 20180204757 - FUSHIMI; Akihito | 2018-07-19 |
| Plasma Processing Apparatus App 20180204756 - Sasaki; Yasuharu ; et al. | 2018-07-19 |
| Method of adsorbing target object on mounting table and plasma processing apparatus Grant 9,953,854 - Sasaki , et al. April 24, 2 | 2018-04-24 |
| Method Of Adsorbing Target Object On Mounting Table And Plasma Processing Apparatus App 20150135514 - Sasaki; Yasuharu ; et al. | 2015-05-21 |
| Plasma Processing Apparatus And Plasma Processing Method App 20150090692 - SASAKI; Yasuharu ; et al. | 2015-04-02 |
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