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Method of producing silicon single crystal Grant 9,938,634 - Sakurada , et al. April 10, 2 | 2018-04-10 |
Epitaxial wafer and manufacturing method thereof Grant 9,425,345 - Hoshi , et al. August 23, 2 | 2016-08-23 |
Quartz glass crucible, method for producing the same, and method for producing silicon single crystal Grant 9,376,336 - Kimura , et al. June 28, 2 | 2016-06-28 |
Silicon wafer and method for producing the same Grant 9,337,013 - Fusegawa , et al. May 10, 2 | 2016-05-10 |
Method Of Producing Silicon Single Crystal App 20160068992 - SAKURADA; Masahiro ;   et al. | 2016-03-10 |
Epitaxial Wafer And Manufacturing Method Thereof App 20140374861 - Hoshi; Ryoji ;   et al. | 2014-12-25 |
Silicon Wafer And Method For Producing The Same App 20140103492 - Fusegawa; Izumi ;   et al. | 2014-04-17 |
Quartz Glass Crucible, Method For Producing The Same, And Method For Producing Silicon Single Crystal App 20130174777 - Kimura; Akihiro ;   et al. | 2013-07-11 |
Method of manufacturing single crystal Grant 8,147,611 - Sakurada , et al. April 3, 2 | 2012-04-03 |
Method for determining distance between reference member and melt surface, method for controlling location of melt surface using the same, and apparatus for production silicon single crystal Grant 8,085,985 - Urano , et al. December 27, 2 | 2011-12-27 |
Method for producing a silicon single crystal and a silicon single crystal Grant 7,909,930 - Hoshi , et al. March 22, 2 | 2011-03-22 |
Quartz Glass Crucible for Pulling Silicon Single Crystal and Method of Manufacturing Quartz Glass Crucible for Pulling Silicon Single Crystal App 20100139549 - Sakurada; Masahiro ;   et al. | 2010-06-10 |
Method of Manufacturing Single Crystal App 20100126409 - Sakurada; Masahiro ;   et al. | 2010-05-27 |
Method For Determining Distance Between Reference Member And Melt Surface, Method For Controlling Location Of Melt Surface Using The Same, And Apparatus For Producing Silicon Single Crystal App 20090232359 - Urano; Masahiko ;   et al. | 2009-09-17 |
Soi wafer and a method for producing the same Grant 7,407,866 - Sakurada , et al. August 5, 2 | 2008-08-05 |
Method for producing a single crystal and silicon single crystal wafer Grant 7,326,395 - Fusegawa , et al. February 5, 2 | 2008-02-05 |
Method for Producing a Silicon Single Crystal and a Silicon Single Crystal App 20070266930 - Hoshi; Ryoji ;   et al. | 2007-11-22 |
Silicon single crystal wafer, an epitaxial wafer and a method for producing a silicon single crystal Grant 7,294,196 - Sakurada , et al. November 13, 2 | 2007-11-13 |
Graphite heater for producing single crystal, apparatus for producing single crystal, and method for producing single crystal Grant 7,258,744 - Sakurada , et al. August 21, 2 | 2007-08-21 |
Method for producing single crystal and single crystal Grant 7,226,507 - Mitamura , et al. June 5, 2 | 2007-06-05 |
Method Of Manufacturing Silicon Single Crystal, Silicon Single Crystal And Silicon Wafer App 20070101926 - FUSEGAWA; Izumi ;   et al. | 2007-05-10 |
Method of producing P-doped silicon single crystal and P-doped N-type silicon single crystal wafer Grant 7,214,268 - Sakurada , et al. May 8, 2 | 2007-05-08 |
Method of manufacturing silicon single crystal, silicon single crystal and silicon wafer Grant 7,179,330 - Fusegawa , et al. February 20, 2 | 2007-02-20 |
SOI wafer and a method for producing an SOI wafer Grant 7,129,123 - Sakurada , et al. October 31, 2 | 2006-10-31 |
Process for producing single crystal and silicon crystal wafer App 20060236919 - Fusegawa; Izumi ;   et al. | 2006-10-26 |
Method for producing single crystal and single crystal App 20060174819 - Mitamura; Nobuaki ;   et al. | 2006-08-10 |
Soi wafer and production method therefor App 20060113594 - Sakurada; Masahiro ;   et al. | 2006-06-01 |
Process for producing p doped silicon single crystal and p doped n type silicon single crystal wafer App 20060065184 - Sakurada; Masahiro ;   et al. | 2006-03-30 |
Silicon single crystal wafer and epitaxial wafer, and method for producing silicon single crystal App 20050252441 - Sakurada, Masahiro ;   et al. | 2005-11-17 |
Graphite heater for producing single crystal, single crystal productin system and single crystal productin method App 20050205004 - Sakurada, Masahiro ;   et al. | 2005-09-22 |
Method for producing silicon single crystal and, silicon single crystal and silicon wafer App 20050160966 - Fusegawa, Izumi ;   et al. | 2005-07-28 |
Silicon single crystal wafer and method for producing silicon single crystal Grant 6,913,646 - Sakurada , et al. July 5, 2 | 2005-07-05 |
Silicon single crystal wafer and method for manufacturing the same Grant 6,893,499 - Fusegawa , et al. May 17, 2 | 2005-05-17 |
Soi wafer and method for manufacturing soi wafer App 20050064632 - Sakurada, Masahiro ;   et al. | 2005-03-24 |
Apparatus and method for producing silicon semiconductor single crystal Grant 6,764,548 - Hoshi , et al. July 20, 2 | 2004-07-20 |
Silicon wafer and method for producing silicon single crystal Grant 6,632,411 - Hoshi , et al. October 14, 2 | 2003-10-14 |
Apparatus for growing single crystal, method for producing single crystal utilizing the apparatus and single crystal Grant 6,632,280 - Hoshi , et al. October 14, 2 | 2003-10-14 |
Silicon single crystal wafer and method for producing silicon single crystal App 20030116082 - Sakurada, Masahiro ;   et al. | 2003-06-26 |
Silicon single crystal wafer and method for manufacturing the same App 20030106484 - Fusegawa, Izumi ;   et al. | 2003-06-12 |
Apparatus and method for producing silicon semiconductor single crystal App 20030089300 - Hoshi, Ryoji ;   et al. | 2003-05-15 |
Apparatas For Growing Jingle Crystal, Method For Producing Jingle Crystal Utilizing The Apparatas And Jingle Crystal App 20030070605 - Hoshi, Ryoji ;   et al. | 2003-04-17 |
Silicon wafer and method for producing silicon single crystal App 20020157598 - Hoshi, Ryoji ;   et al. | 2002-10-31 |
Method for preparing silicon single crystal and silicon single crystal App 20020157600 - Fusegawa, Izumi ;   et al. | 2002-10-31 |
Heat treatment of Si single crystal Grant 5,834,322 - Fusegawa , et al. November 10, 1 | 1998-11-10 |
Method for testing electrical properties of silicon single crystal Grant 5,534,112 - Fusegawa , et al. July 9, 1 | 1996-07-09 |
Method of growing silicon single crystals Grant 5,501,172 - Murai , et al. March 26, 1 | 1996-03-26 |
Apparatus for supplying granular raw material for a semiconductor single crystal pulling apparatus Grant 5,462,010 - Takano , et al. October 31, 1 | 1995-10-31 |
Single crystal pulling apparatus Grant 5,373,805 - Takano , et al. December 20, 1 | 1994-12-20 |
Single crystal pulling apparatus Grant 5,361,721 - Takano , et al. November 8, 1 | 1994-11-08 |
Method and apparatus for producing silicon single crystal Grant 5,248,378 - Oda , et al. September 28, 1 | 1993-09-28 |
Method for heat processing of silicon Grant 5,110,404 - Fusegawa , et al. May 5, 1 | 1992-05-05 |
Apparatus for Czochralski single crystal growing Grant 4,956,153 - Yamagishi , et al. September 11, 1 | 1990-09-11 |