Patent | Date |
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Light Irradiation Type Heat Treatment Method And Heat Treatment Apparatus App 20220189799 - UEDA; Akitsugu ;   et al. | 2022-06-16 |
Light irradiation type heat treatment method and heat treatment apparatus Grant 11,322,375 - Ueda , et al. May 3, 2 | 2022-05-03 |
Heat treatment method and heat treatment apparatus for managing dummy wafer Grant 11,289,344 - Ueno , et al. March 29, 2 | 2022-03-29 |
Light irradiation type heat treatment method and heat treatment apparatus Grant 11,282,708 - Ueda , et al. March 22, 2 | 2022-03-22 |
Light Irradiation Type Heat Treatment Apparatus App 20220076970 - UEDA; Akitsugu ;   et al. | 2022-03-10 |
Light Irradiation Type Heat Treatment Method App 20220037164 - OMORI; Mao ;   et al. | 2022-02-03 |
Heat Treatment Method And Heat Treatment Apparatus Of Light Irradiation Type App 20210327771 - Kitazawa; Takahiro ;   et al. | 2021-10-21 |
Light Irradiation Type Heat Treatment Method App 20210272823 - OMORI; Mao ;   et al. | 2021-09-02 |
Heat treatment method and heat treatment apparatus for managing dummy wafer Grant 11,024,524 - Ueno , et al. June 1, 2 | 2021-06-01 |
Heat treatment method for managing dummy wafer Grant 11,024,521 - Ueno , et al. June 1, 2 | 2021-06-01 |
Light-irradiation Thermal Treatment Apparatus App 20210159099 - YAMADA; Takahiro ;   et al. | 2021-05-27 |
Light Irradiation Type Thermal Processing Apparatus App 20210151335 - MIYAKE; Hiroshi ;   et al. | 2021-05-20 |
Light-irradiation heat treatment method and heat treatment apparatus Grant 11,004,693 - Fuse May 11, 2 | 2021-05-11 |
Light-irradiation heat treatment method and heat treatment apparatus Grant 10,978,319 - Aoyama , et al. April 13, 2 | 2021-04-13 |
Light-irradiation thermal treatment apparatus Grant 10,950,472 - Yamada , et al. March 16, 2 | 2021-03-16 |
Heat Treatment Apparatus Of Light Irradiation Type And Method For Cleaning Heat Treatment Apparatus App 20210051771 - FUSE; Kazuhiko | 2021-02-18 |
Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light Grant 10,879,072 - Fuse , et al. December 29, 2 | 2020-12-29 |
Light Irradiation Type Heat Treatment Method And Heat Treatment Apparatus App 20200328083 - Ueda; Akitsugu ;   et al. | 2020-10-15 |
Light-irradiation heat treatment method and heat treatment apparatus Grant 10,790,171 - Aoyama , et al. September 29, 2 | 2020-09-29 |
Method of adjusting measurement position of radiation thermometer and heat treatment apparatus Grant 10,784,127 - Fuse , et al. Sept | 2020-09-22 |
Heat treatment method for dopant introduction Grant 10,777,415 - Fuse , et al. Sept | 2020-09-15 |
Light Irradiation Type Heat Treatment Method And Heat Treatment Apparatus App 20200286756 - UEDA; Akitsugu ;   et al. | 2020-09-10 |
Light irradiation type heat treatment apparatus and heat treatment method Grant 10,643,869 - Kitazawa , et al. | 2020-05-05 |
Dopant introduction method and thermal treatment method Grant 10,643,850 - Tanimura , et al. | 2020-05-05 |
Heat treatment method and heat treatment apparatus of light irradiation type Grant 10,636,676 - Ono , et al. | 2020-04-28 |
Heat Treatment Method For Managing Dummy Wafer App 20200098600 - Ueno; Tomohiro ;   et al. | 2020-03-26 |
Heat Treatment Method And Heat Treatment Apparatus For Managing Dummy Wafer App 20200098601 - Ueno; Tomohiro ;   et al. | 2020-03-26 |
Heat Treatment Method And Heat Treatment Apparatus For Managing Dummy Wafer App 20200090949 - Ueno; Tomohiro ;   et al. | 2020-03-19 |
Light-irradiation heat treatment method and heat treatment apparatus Grant 10,580,667 - Aoyama , et al. | 2020-03-03 |
Thermal processing apparatus and thermal processing method through light irradiation Grant 10,573,569 - Furukawa , et al. Feb | 2020-02-25 |
Light-irradiation Heat Treatment Method And Heat Treatment Apparatus App 20190311924 - AOYAMA; Takayuki ;   et al. | 2019-10-10 |
Light irradiation type heat treatment method and heat treatment apparatus Grant 10,424,483 - Aoyama , et al. Sept | 2019-09-24 |
Method Of Heat-treating Polysilicon App 20190267250 - Tanimura; Hideaki ;   et al. | 2019-08-29 |
Heat Treatment Method For Dopant Introduction App 20190244817 - FUSE; Kazuhiko ;   et al. | 2019-08-08 |
Heat Treatment Susceptor And Heat Treatment Apparatus App 20190237355 - FUSE; Kazuhiko | 2019-08-01 |
Method and apparatus for light-irradiation heat treatment Grant 10,347,512 - Tanimura , et al. July 9, 2 | 2019-07-09 |
Heat Treatment Method And Heat Treatment Apparatus For Heating Substrate By Irradiating Substrate With Light App 20190206687 - FUSE; Kazuhiko ;   et al. | 2019-07-04 |
Thermal Processing Apparatus And Thermal Processing Method Through Light Irradiation App 20190181058 - FURUKAWA; Masashi ;   et al. | 2019-06-13 |
Heat Treatment Method And Heat Treatment Apparatus App 20190164789 - AOYAMA; Takayuki ;   et al. | 2019-05-30 |
Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light Grant 10,276,385 - Fuse , et al. | 2019-04-30 |
Light Irradiation Type Heat Treatment Method And Heat Treatment Apparatus App 20190109007 - AOYAMA; Takayuki ;   et al. | 2019-04-11 |
Light-irradiation Heat Treatment Method And Heat Treatment Apparatus App 20190027385 - AOYAMA; Takayuki ;   et al. | 2019-01-24 |
Light irradiation type heat treatment method and heat treatment apparatus Grant 10,181,404 - Aoyama , et al. Ja | 2019-01-15 |
Light irradiation type heat treatment apparatus Grant 10,153,184 - Fuse , et al. Dec | 2018-12-11 |
Heat treatment method and heat treatment device Grant 10,128,135 - Fuse November 13, 2 | 2018-11-13 |
Dopant introduction method and heat treatment method Grant 10,121,664 - Fuse , et al. November 6, 2 | 2018-11-06 |
Light-irradiation heat treatment method and heat treatment apparatus Grant 10,121,683 - Aoyama , et al. November 6, 2 | 2018-11-06 |
Method Of Adjusting Measurement Position Of Radiation Thermometer And Heat Treatment Apparatus App 20180269085 - Fuse; Kazuhiko ;   et al. | 2018-09-20 |
Heat Treatment Method And Heat Treatment Apparatus Of Light Irradiation Type App 20180254224 - KITAZAWA; Takahiro ;   et al. | 2018-09-06 |
Heat Treatment Method And Heat Treatment Apparatus Of Light Irradiation Type App 20180240681 - ONO; Yukio ;   et al. | 2018-08-23 |
Light Irradiation Type Heat Treatment Apparatus And Heat Treatment Method App 20180240689 - Kitazawa; Takahiro ;   et al. | 2018-08-23 |
Dopant Introduction Method And Heat Treatment Method App 20180166281 - Fuse; Kazuhiko ;   et al. | 2018-06-14 |
Dopant Introduction Method And Thermal Treatment Method App 20180144939 - TANIMURA; Hideaki ;   et al. | 2018-05-24 |
Heat Treatment Method And Heat Treatment Device App 20180076061 - FUSE; Kazuhiko | 2018-03-15 |
Light-irradiation Thermal Treatment Apparatus App 20180076062 - YAMADA; Takahiro ;   et al. | 2018-03-15 |
Light-irradiation Heat Treatment Method And Heat Treatment Apparatus App 20180005848 - AOYAMA; TAKAYUKI ;   et al. | 2018-01-04 |
Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light Grant 9,805,932 - Fuse , et al. October 31, 2 | 2017-10-31 |
Light Irradiation Type Heat Treatment Method And Heat Treatment Apparatus App 20170309489 - AOYAMA; Takayuki ;   et al. | 2017-10-26 |
Apparatus and method for light-irradiation heat treatment Grant 9,799,517 - Tanimura , et al. October 24, 2 | 2017-10-24 |
Light irradiation type heat treatment method and heat treatment apparatus Grant 9,741,576 - Aoyama , et al. August 22, 2 | 2017-08-22 |
Heat Treatment Susceptor And Heat Treatment Apparatus App 20170221749 - FUSE; Kazuhiko | 2017-08-03 |
Thermal Processing Apparatus And Thermal Processing Method Through Light Irradiation App 20170178979 - FURUKAWA; Masashi ;   et al. | 2017-06-22 |
Heat Treatment Apparatus For Heating Substrate By Irradiation With Flash Light App 20170140976 - ABE; Makoto ;   et al. | 2017-05-18 |
Light-irradiation Heat Treatment Method And Heat Treatment Apparatus App 20170062249 - AOYAMA; Takayuki ;   et al. | 2017-03-02 |
Light Irradiation Type Heat Treatment Method And Heat Treatment Apparatus App 20170062223 - AOYAMA; Takayuki ;   et al. | 2017-03-02 |
Method And Apparatus For Light-irradiation Heat Treatment App 20170011923 - TANIMURA; Hideaki ;   et al. | 2017-01-12 |
Apparatus And Method For Light-irradiation Heat Treatment App 20170011922 - TANIMURA; Hideaki ;   et al. | 2017-01-12 |
Light Irradiation Type Heat Treatment Apparatus App 20160351424 - FUSE; Kazuhiko ;   et al. | 2016-12-01 |
Light-irradiation Heat Treatment Method And Heat Treatment Apparatus App 20160336195 - FUSE; Kazuhiko | 2016-11-17 |
Heat Treatment Method And Heat Treatment Apparatus For Heating Substrate By Irradiating Substrate With Light App 20160293424 - FUSE; Kazuhiko ;   et al. | 2016-10-06 |
Heat Treatment Method And Heat Treatment Apparatus For Heating Substrate By Irradiating Substrate With Light App 20160247692 - FUSE; Kazuhiko ;   et al. | 2016-08-25 |
Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light Grant 9,343,313 - Fuse , et al. May 17, 2 | 2016-05-17 |
Heat treatment method and heat treatment apparatus of thin film Grant 8,852,966 - Kiyama , et al. October 7, 2 | 2014-10-07 |
Heat Treatment Apparatus For Heating Substrate By Irradiation With Flash Light App 20140169772 - ABE; Makoto ;   et al. | 2014-06-19 |
Heat treatment method for growing silicide Grant 8,664,116 - Fuse , et al. March 4, 2 | 2014-03-04 |
Heat treatment method for promoting crystallization of high dielectric constant film Grant 8,623,750 - Fuse , et al. January 7, 2 | 2014-01-07 |
Heat Treatment Method For Growing Silicide App 20130078802 - FUSE; Kazuhiko ;   et al. | 2013-03-28 |
Heat Treatment Method For Promoting Crystallization Of High Dielectric Constant Film App 20130078786 - FUSE; Kazuhiko ;   et al. | 2013-03-28 |
Heat Treatment Method And Heat Treatment Apparatus Of Thin Film App 20130078744 - KIYAMA; Hiroki ;   et al. | 2013-03-28 |
Heat Treatment Method And Heat Treatment Apparatus For Heating Substrate By Irradiating Substrate With Light App 20120244725 - FUSE; Kazuhiko ;   et al. | 2012-09-27 |
Surface voltmeter Grant 7,795,886 - Kono , et al. September 14, 2 | 2010-09-14 |
Surface voltmeter and surface voltage measurement method Grant 7,598,746 - Kono , et al. October 6, 2 | 2009-10-06 |
Surface voltmeter App 20080238434 - Kono; Motohiro ;   et al. | 2008-10-02 |
Surface voltmeter and surface voltage measurement method App 20070216418 - Kono; Motohiro ;   et al. | 2007-09-20 |