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Patent applications and USPTO patent grants for Furuya; Naokazu.The latest application filed is for "plasma processing apparatus".
Patent | Date |
---|---|
Exhaust device for processing apparatus provided with multiple blades Grant 11,315,770 - Nagaseki , et al. April 26, 2 | 2022-04-26 |
Plasma Processing Apparatus App 20210313151 - TOHARA; Takashi ;   et al. | 2021-10-07 |
Exhaust Device, Processing Apparatus, And Exhausting Method App 20210296102 - NAGASEKI; Kazuya ;   et al. | 2021-09-23 |
Power feed member and substrate processing apparatus Grant 10,943,766 - Ito , et al. March 9, 2 | 2021-03-09 |
Plasma Spraying Apparatus And Spraying Control Method App 20190256962 - Kobayashi; Yoshiyuki ;   et al. | 2019-08-22 |
Exhaust Device, Processing Apparatus, And Exhausting Method App 20190172689 - NAGASEKI; Kazuya ;   et al. | 2019-06-06 |
Power Feed Member And Substrate Processing Apparatus App 20180374679 - Ito; Shunichi ;   et al. | 2018-12-27 |
Plasma processing apparatus Grant 9,589,771 - Hosaka , et al. March 7, 2 | 2017-03-07 |
Plasma processing apparatus Grant 9,011,635 - Hosaka , et al. April 21, 2 | 2015-04-21 |
Plasma Processing Apparatus App 20120222817 - HOSAKA; Yuki ;   et al. | 2012-09-06 |
Plasma Processing Apparatus App 20120222814 - HOSAKA; Yuki ;   et al. | 2012-09-06 |
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