Furuse; Muneo
Patent Applications and Registrations
Patent applications and USPTO patent grants for Furuse; Muneo.The latest application filed is for "plasma processing apparatus and plasma processing method".
- Furuse; Muneo - Kudamatsu N/A JP
- Furuse; Muneo - Kudamatsu-shi JP
| Patent | Date |
|---|---|
| Plasma processing apparatus and plasma processing method Grant 8,569,177 - Ohashi , et al. October 29, 2 | 2013-10-29 |
| Plasma Processing Apparatus And Plasma Processing Method App 20130189800 - OHASHI; Tomohiro ; et al. | 2013-07-25 |
| Plasma processing apparatus and method for operating the same Grant 8,197,704 - Hashimoto , et al. June 12, 2 | 2012-06-12 |
| Cleaning method Grant 8,024,831 - Ikenaga , et al. September 27, 2 | 2011-09-27 |
| Cleaning apparatus Grant 8,006,340 - Ikenaga , et al. August 30, 2 | 2011-08-30 |
| Cleaning Method App 20100294315 - Ikenaga; Kazuyuki ; et al. | 2010-11-25 |
| Plasma Processing Apparatus And Method For Operating The Same App 20100206845 - Hashimoto; Takahisa ; et al. | 2010-08-19 |
| Plasma processing apparatus App 20100050938 - Tetsuka; Tsutomu ; et al. | 2010-03-04 |
| Cleaning apparatus and cleaning method App 20100050349 - Ikenaga; Kazuyuki ; et al. | 2010-03-04 |
| Etching Process Apparatus And Member For Etching Process Chamber App 20090183835 - FURUSE; Muneo ; et al. | 2009-07-23 |
| Device and method for detecting foreign material on the surface of plasma processing apparatus Grant 7,526,948 - Yamamoto , et al. May 5, 2 | 2009-05-05 |
| Plasma Processing Apparatus App 20080314321 - FURUSE; Muneo ; et al. | 2008-12-25 |
| Plasma etching equipment App 20080236744 - Furuse; Muneo ; et al. | 2008-10-02 |
| Plasma Processing Apparatus App 20080236494 - KAWAGUCHI; TADAYOSHI ; et al. | 2008-10-02 |
| Plasma etching apparatus and method for forming inner wall of plasma processing chamber App 20070215278 - Furuse; Muneo ; et al. | 2007-09-20 |
| Vacuum processing apparatus App 20070044914 - Matano; Katsuji ; et al. | 2007-03-01 |
| Device and method for detecting foreign material on the surface of plasma processing apparatus App 20070032088 - Yamamoto; Hideyuki ; et al. | 2007-02-08 |
| Member for plasma processing apparatus and plasma processing apparatus App 20060157198 - Furuse; Muneo ; et al. | 2006-07-20 |
| Plasma processing apparatus, protecting layer therefor and installation of protecting layer Grant 7,052,731 - Koroyasu , et al. May 30, 2 | 2006-05-30 |
| Plasma processing apparatus App 20050199183 - Arai, Masatsugu ; et al. | 2005-09-15 |
| Plasma processing apparatus App 20050193951 - Furuse, Muneo ; et al. | 2005-09-08 |
| Plasma etching method Grant 6,914,005 - Furuse , et al. July 5, 2 | 2005-07-05 |
| Method for coating internal surface of plasma processing chamber App 20050112289 - Trickett, Douglas M. ; et al. | 2005-05-26 |
| Method for coating internal surface of plasma processing chamber App 20050084617 - Trickett, Douglas M. ; et al. | 2005-04-21 |
| Method for coating internal surface of plasma processing chamber Grant 6,875,477 - Trickett , et al. April 5, 2 | 2005-04-05 |
| Method for monitoring plasma processing apparatus App 20050051270 - Sasaki, Ichiro ; et al. | 2005-03-10 |
| Plasma processing apparatus App 20050051089 - Tauchi, Susumu ; et al. | 2005-03-10 |
| Plasma processing apparatus, protecting layer therefor and installation of protecting layer App 20050045107 - Koroyasu, Kunihiko ; et al. | 2005-03-03 |
| Plasma processing apparatus Grant 6,837,937 - Tauchi , et al. January 4, 2 | 2005-01-04 |
| Apparatus and method for monitoring plasma processing apparatus Grant 6,796,269 - Sasaki , et al. September 28, 2 | 2004-09-28 |
| Method for coating internal surface of plasma processing chamber App 20040151841 - Trickett, Douglas M. ; et al. | 2004-08-05 |
| Plasma processing apparatus App 20040040507 - Tauchi, Susumu ; et al. | 2004-03-04 |
| Plasma processing method and plasma processing apparatus App 20030201256 - Tauchi, Susumu ; et al. | 2003-10-30 |
| Plasma etching method App 20030166343 - Furuse, Muneo ; et al. | 2003-09-04 |
| Plasma processing apparatus, protecting layer therefor and installation of protecting layer App 20030159778 - Koroyasu, Kunihiko ; et al. | 2003-08-28 |
| Apparatus and method for monitoring plasma processing apparatus App 20030102083 - Sasaki, Ichiro ; et al. | 2003-06-05 |
| Plasma processing method and apparatus Grant 6,158,383 - Watanabe , et al. December 12, 2 | 2000-12-12 |
| Microwave plasma processing method and apparatus Grant 5,804,033 - Kanai , et al. September 8, 1 | 1998-09-08 |
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