loadpatents
name:-0.0069711208343506
name:-0.0038759708404541
name:-0.0010130405426025
FURUKAWAHARA; Kazunori Patent Filings

FURUKAWAHARA; Kazunori

Patent Applications and Registrations

Patent applications and USPTO patent grants for FURUKAWAHARA; Kazunori.The latest application filed is for "substrate processing apparatus".

Company Profile
0.3.5
  • FURUKAWAHARA; Kazunori - Nagaoka-shi JP
  • Furukawahara; Kazunori - Nagaoka JP
  • Furukawahara; Kazunori - Tama JP
  • Furukawahara; Kazunori - Tokyo JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Substrate Processing Apparatus
App 20170309457 - FURUKAWAHARA; Kazunori
2017-10-26
Apparatus and method for pre-baking substrate upstream of process chamber
Grant 9,349,620 - Kamata , et al. May 24, 2
2016-05-24
Apparatus and Method for Pre-Baking Substrate Upstream of Process Chamber
App 20160013084 - Kamata; Keisuke ;   et al.
2016-01-14
Liquid material vaporization apparatus for semiconductor processing apparatus
Grant 7,833,353 - Furukawahara , et al. November 16, 2
2010-11-16
Method of detecting occurrence of sticking of substrate
Grant 7,712,370 - Furukawahara , et al. May 11, 2
2010-05-11
Exhaust Gas Trap For Semiconductor Processes
App 20100006025 - Furukawahara; Kazunori
2010-01-14
Liquid Material Vaporization Apparatus For Semiconductor Processing Apparatus
App 20080173240 - FURUKAWAHARA; Kazunori ;   et al.
2008-07-24
Method Of Detecting Occurrence Of Sticking Of Substrate
App 20080148857 - Furukawahara; Kazunori ;   et al.
2008-06-26

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