Patent | Date |
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Cobalt Complex, Method For Manufacturing Same, And Method For Manufacturing Cobalt-containing Thin Film App 20220017553 - OIKE; Hiroyuki ;   et al. | 2022-01-20 |
Europium complex Grant 10,988,494 - Araki , et al. April 27, 2 | 2021-04-27 |
Europium Complex App 20200354389 - ARAKI; Keisuke ;   et al. | 2020-11-12 |
Substituted cyclopentadienyl cobalt complex and method for production thereof, and cobalt-containing thin film and method for production thereof Grant 10,336,782 - Koiso , et al. | 2019-07-02 |
Substituted Cyclopentadienyl Cobalt Complex And Method For Production Thereof, And Cobalt-containing Thin Film And Method For Production Thereof App 20180362568 - KOISO; Naoyuki ;   et al. | 2018-12-20 |
Ruthenium compound, method of producing the same, method of producing ruthenium-containing thin film using the same, and ruthenium-containing thin film Grant 8,748,644 - Furukawa , et al. June 10, 2 | 2014-06-10 |
Ruthenium complex mixture, method of producing the same, composition for film formation, ruthenium-containing film, and method of producing the same Grant 8,742,153 - Maniwa , et al. June 3, 2 | 2014-06-03 |
Ruthenium Complex Mixture, Method Of Producing The Same, Composition For Film Formation, Ruthenium-containing Film, And Method Of Producing The Same App 20120227625 - Maniwa; Atsushi ;   et al. | 2012-09-13 |
Imide Complex, Method For Producing The Same, Metal-containing Thin Film And Method For Producing The Same App 20110087039 - TADA; Ken-ichi ;   et al. | 2011-04-14 |
Imide complex, method for producing the same, metal-containing thin film and method for producing the same Grant 7,906,668 - Tada , et al. March 15, 2 | 2011-03-15 |
Metal-containing compound, its production method, metal-containing thin film, and its formation method Grant 7,816,549 - Tada , et al. October 19, 2 | 2010-10-19 |
Metal-containing Compound, Its Production Method, Metal-containing Thin Film, And Its Formation Method App 20100105936 - Tada; Ken-ichi ;   et al. | 2010-04-29 |
Imide Complex, Method For Producing The Same, Metal-containing Thin Film And Method For Producing The Same App 20100010248 - Tada; Ken-ichi ;   et al. | 2010-01-14 |
Titanium complexes, their production methods, titanium-containing thin films, and their formation methods Grant 7,632,958 - Tada , et al. December 15, 2 | 2009-12-15 |
Tantalum compound, method for producing same, tantalum-containing thin film and method for forming same Grant 7,592,471 - Sekimoto , et al. September 22, 2 | 2009-09-22 |
Tantalum Compound, Method For Producing Same, Tantalum-containing Thin Film And Method For Forming Same App 20090043119 - Sekimoto; Kenichi ;   et al. | 2009-02-12 |
Titanium Complexes, Their Production Methods, Titanium-containing Thin Films, And Their Formation Methods App 20090036697 - Tada; Ken-ichi ;   et al. | 2009-02-05 |
Bismuth compound, process of producing the same, and process of producing a film Grant 6,916,944 - Furukawa , et al. July 12, 2 | 2005-07-12 |
Novel bismuth compound, process of producing the same, and process of producing a film App 20040204483 - Furukawa, Taishi ;   et al. | 2004-10-14 |
Ruthenium complex, process for producing the same and process for producing thin film Grant 6,605,735 - Kawano , et al. August 12, 2 | 2003-08-12 |
Ruthenium Complex, Process For Producing The Same And Process For Producing Thin Film App 20030088116 - Kawano, Kazuhisa ;   et al. | 2003-05-08 |