| Patent | Date |
|---|
Method of forming later insulating films for MTJ
Grant 10,910,215 - Watanabe , et al. February 2, 2 | 2021-02-02 |
Hard Mask And Hard Mask Forming Method
App 20200266063 - TOSHIMA; Hiroyuki ; et al. | 2020-08-20 |
Hard Mask And Semiconductor Device Manufacturing Method
App 20200227273 - TOSHIMA; Hiroyuki ; et al. | 2020-07-16 |
Film-forming Device
App 20200071815 - TOSHIMA; Hiroyuki ; et al. | 2020-03-05 |
Substrate processing apparatus
Grant 10,468,237 - Gomi , et al. No | 2019-11-05 |
Method for forming copper film
Grant 10,189,230 - Toshima , et al. Ja | 2019-01-29 |
Substrate Processing Apparatus
App 20180315585 - Gomi; Atsushi ; et al. | 2018-11-01 |
Method and processing apparatus for performing pre-treatment to form copper wiring in recess formed in substrate
Grant 10,068,798 - Toshima , et al. September 4, 2 | 2018-09-04 |
Substrate processing apparatus
Grant 10,049,860 - Gomi , et al. August 14, 2 | 2018-08-14 |
Method of Forming Insulating Film
App 20180012756 - WATANABE; Naoki ; et al. | 2018-01-11 |
Method For Forming Copper Film
App 20180001597 - TOSHIMA; Hiroyuki ; et al. | 2018-01-04 |
Method And Processing Apparatus For Performing Pre-treatment To Form Copper Wiring In Recess Formed In Substrate
App 20170372951 - TOSHIMA; Hiroyuki ; et al. | 2017-12-28 |
Method for Forming Perpendicular Magnetization Type Magnetic Tunnel Junction Element and Apparatus for Producing Perpendicular Magnetization Type Magnetic Tunnel Junction Element
App 20170317273 - KITADA; Toru ; et al. | 2017-11-02 |
Vacuum-processing apparatus, vacuum-processing method, and storage medium
Grant 9,790,590 - Furukawa , et al. October 17, 2 | 2017-10-17 |
Dual-target sputter deposition with controlled phase difference between target powers
Grant 9,567,667 - Furukawa , et al. February 14, 2 | 2017-02-14 |
Film forming apparatus and film forming method
Grant 9,551,060 - Gomi , et al. January 24, 2 | 2017-01-24 |
Method of supplying cobalt to recess
Grant 9,362,167 - Shimada , et al. June 7, 2 | 2016-06-07 |
Processing Apparatus
App 20160071707 - FURUKAWA; Shinji ; et al. | 2016-03-10 |
Film Forming Apparatus And Film Forming Method
App 20160032446 - GOMI; Atsushi ; et al. | 2016-02-04 |
Method of Supplying Cobalt to Recess
App 20150243556 - SHIMADA; Atsushi ; et al. | 2015-08-27 |
Substrate Processing Apparatus
App 20150235815 - Gomi; Atsushi ; et al. | 2015-08-20 |
Vacuum-Processing Apparatus, Vacuum-Processing Method, and Storage Medium
App 20150187546 - Furukawa; Shinji ; et al. | 2015-07-02 |
Film Forming Apparatus
App 20150114835 - GOMI; Atsushi ; et al. | 2015-04-30 |
Image processing apparatus, method, and recording medium for extracting images from a composite image file
Grant 9,001,236 - Furukawa April 7, 2 | 2015-04-07 |
Dual-target Sputter Deposition With Controlled Phase Difference Between Target Powers
App 20150075971 - FURUKAWA; Shinji ; et al. | 2015-03-19 |
Method of manufacturing magnetoresistive element, sputter deposition chamber, apparatus for manufacturing magnetoresistive element having sputter deposition chamber, program and storage medium
Grant 8,932,438 - Tsunekawa , et al. January 13, 2 | 2015-01-13 |
Vacuum heating/cooling apparatus and manufacturing method of magnetoresistance element
Grant 8,837,924 - Tsunekawa , et al. September 16, 2 | 2014-09-16 |
Film forming apparatus
Grant 8,715,417 - Furukawa , et al. May 6, 2 | 2014-05-06 |
Film Forming Apparatus
App 20130133571 - FURUKAWA; Shinji ; et al. | 2013-05-30 |
Film forming apparatus
Grant 8,377,210 - Furukawa , et al. February 19, 2 | 2013-02-19 |
Vacuum Heating/cooling Apparatus And Manufacturing Method Of Magnetoresistance Element
App 20120193071 - Tsunekawa; Koji ; et al. | 2012-08-02 |
Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
Grant 8,147,924 - Watanabe , et al. April 3, 2 | 2012-04-03 |
Image Processing Apparatus, Method Thereof, And Recording Medium
App 20120008013 - FURUKAWA; Shinji | 2012-01-12 |
Image processing apparatus including image extraction unit, method thereof, and recording medium
Grant 8,049,793 - Furukawa November 1, 2 | 2011-11-01 |
Film Forming Apparatus
App 20110192344 - FURUKAWA; Shinji ; et al. | 2011-08-11 |
Method Of Manufacturing Magnetoresistive Element, Sputter Deposition Chamber, Apparatus For Manufacturing Magnetoresistive Element Having Sputter Deposition Chamber, Program And Storage Medium
App 20110139606 - TSUNEKAWA; Koji ; et al. | 2011-06-16 |
Film forming apparatus
Grant 7,935,187 - Furukawa , et al. May 3, 2 | 2011-05-03 |
Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
Grant 7,824,497 - Watanabe , et al. November 2, 2 | 2010-11-02 |
Image Processing Apparatus, Method Thereof, And Recording Medium
App 20100253808 - FURUKAWA; Shinji | 2010-10-07 |
Image processing apparatus, method thereof, and recording medium
Grant 7,750,953 - Furukawa July 6, 2 | 2010-07-06 |
Manufacturing apparatus of magnetoresistance elements
Grant 7,731,825 - Kitada , et al. June 8, 2 | 2010-06-08 |
Film forming apparatus
Grant 7,625,450 - Furukawa , et al. December 1, 2 | 2009-12-01 |
Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
App 20090151634 - WATANABE; Naoki ; et al. | 2009-06-18 |
Manufacturing Method And Manufacturing Apparatus Of Magnetoresistance Elements
App 20090139855 - Kitada; Toru ; et al. | 2009-06-04 |
Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
App 20090011140 - Watanabe; Naoki ; et al. | 2009-01-08 |
Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
App 20080216744 - WATANABE; Naoki ; et al. | 2008-09-11 |
Film Forming Apparatus
App 20080178796 - Furukawa; Shinji ; et al. | 2008-07-31 |
Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
App 20080178804 - WATANABE; Naoki ; et al. | 2008-07-31 |
Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
App 20070234958 - WATANABE; Naoki ; et al. | 2007-10-11 |
Manufacturing Method And Manufacturing Apparatus Of Magnetoresistance Elements
App 20060060466 - Kitada; Toru ; et al. | 2006-03-23 |
Film forming apparatus
App 20050115830 - Furukawa, Shinji ; et al. | 2005-06-02 |
Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
App 20050103271 - Watanabe, Naoki ; et al. | 2005-05-19 |
System for depositing a film
Grant 6,872,285 - Furukawa , et al. March 29, 2 | 2005-03-29 |
Image processing apparatus, method thereof, and recording medium
App 20040141211 - Furukawa, Shinji | 2004-07-22 |
Multilayer film deposition apparatus, and method and apparatus for manufacturing perpendicular-magnetic-recording media
Grant 6,740,209 - Shibamoto , et al. May 25, 2 | 2004-05-25 |
Miniature motor
App 20040007929 - Wakita, Tadayuki ; et al. | 2004-01-15 |
Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
App 20030200927 - Watanabe, Naoki ; et al. | 2003-10-30 |
System for depositing a film
App 20030062260 - Furukawa, Shinji ; et al. | 2003-04-03 |
Multilayer film deposition apparatus, and method and apparatus for manufacturing perpendicular-magnetic-recording media
App 20030019739 - Shibamoto, Masahiro ; et al. | 2003-01-30 |
Magnetic recording disk, and method and system for manufacturing a magnetic recording disk
App 20010033457 - Furukawa, Shinji ; et al. | 2001-10-25 |
Method and apparatus for manufacturing a magnetic recording disk, and in-line type substrate processing apparatus
App 20010021412 - Watanabe, Naoki ; et al. | 2001-09-13 |
Thin-film magnetic material and process of production thereof
Grant 5,181,020 - Furukawa , et al. January 19, 1 | 1993-01-19 |
Fine amorphous metal wires
Grant 4,657,604 - Ogasawara , et al. April 14, 1 | 1987-04-14 |
| 