loadpatents
Patent applications and USPTO patent grants for Furuichi; Masatoshi.The latest application filed is for "substrate transfer system and substrate processing system".
Patent | Date |
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Substrate transfer system, substrate processing system, and substrate transfer robot Grant 9,620,405 - Furuichi , et al. April 11, 2 | 2017-04-11 |
Substrate transfer system and substrate processing system Grant 9,570,336 - Furuichi , et al. February 14, 2 | 2017-02-14 |
Substrate Transfer System And Substrate Processing System App 20160148830 - FURUICHI; Masatoshi ;   et al. | 2016-05-26 |
Substrate transfer system and substrate processing system Grant 9,293,355 - Furuichi , et al. March 22, 2 | 2016-03-22 |
Conveying system Grant 9,272,413 - Furuichi , et al. March 1, 2 | 2016-03-01 |
Transfer robot and substrate processing apparatus Grant 9,266,234 - Furuichi February 23, 2 | 2016-02-23 |
Substrate transfer system, substrate processing system, and substrate transfer robot Grant 9,252,035 - Furuichi , et al. February 2, 2 | 2016-02-02 |
Substrate transfer system, substrate processing system, and substrate transfer robot Grant 9,252,036 - Furuichi , et al. February 2, 2 | 2016-02-02 |
Substrate Transfer System, Substrate Processing System, And Substrate Transfer Robot App 20150332947 - FURUICHI; Masatoshi ;   et al. | 2015-11-19 |
Substrate Transfer System, Substrate Processing System, And Substrate Transfer Robot App 20150332946 - FURUICHI; Masatoshi ;   et al. | 2015-11-19 |
Substrate Transfer System, Substrate Processing System, And Substrate Transfer Robot App 20150332945 - FURUICHI; Masatoshi ;   et al. | 2015-11-19 |
Suction Pad, Robot Hand And Robot App 20150246447 - FURUICHI; Masatoshi ;   et al. | 2015-09-03 |
Suction structure, robot hand and robot Grant 9,108,320 - Furuichi August 18, 2 | 2015-08-18 |
Robot with plurality of belts and intermediate pulley Grant 9,028,197 - Furuichi , et al. May 12, 2 | 2015-05-12 |
Transfer robot Grant 8,992,160 - Furuichi March 31, 2 | 2015-03-31 |
Suction Structure, Robot Hand And Robot App 20150015014 - FURUICHI; Masatoshi | 2015-01-15 |
Suction Structure, Robot Hand And Robot App 20150008691 - FURUICHI; Masatoshi ;   et al. | 2015-01-08 |
Suction Structure, Robot Hand And Robot App 20150008688 - FURUICHI; Masatoshi ;   et al. | 2015-01-08 |
Gear unit and robot Grant 8,833,196 - Furuichi , et al. September 16, 2 | 2014-09-16 |
Transfer robot and equipment front end module including transfer robot with vent part Grant 8,807,911 - Furuichi , et al. August 19, 2 | 2014-08-19 |
Substrate Transfer System And Substrate Processing System App 20140133942 - FURUICHI; Masatoshi ;   et al. | 2014-05-15 |
Guide Jig App 20130326868 - HISAKI; Yoshihiro ;   et al. | 2013-12-12 |
Transfer Robot And Equipment Front End Module Including Transfer Robot App 20130323002 - FURUICHI; Masatoshi ;   et al. | 2013-12-05 |
Carrier Device App 20130209200 - FURUICHI; Masatoshi ;   et al. | 2013-08-15 |
Carrier Device App 20130209201 - FURUICHI; Masatoshi ;   et al. | 2013-08-15 |
Transfer Robot App 20130195598 - FURUICHI; Masatoshi | 2013-08-01 |
Conveying System App 20130195584 - FURUICHI; Masatoshi ;   et al. | 2013-08-01 |
Robot App 20130195600 - FURUICHI; Masatoshi ;   et al. | 2013-08-01 |
Robot App 20130195599 - Furuichi; Masatoshi ;   et al. | 2013-08-01 |
Transmission Mechanism, Substrate Positioning Device And Robot App 20130195586 - FURUICHI; Masatoshi | 2013-08-01 |
Substrate transport hand and substrate transport robot Grant 8,444,194 - Furuichi May 21, 2 | 2013-05-21 |
Gear Unit And Robot App 20130074651 - FURUICHI; Masatoshi ;   et al. | 2013-03-28 |
Transfer Robot And Substrate Processing Apparatus App 20130078060 - FURUICHI; Masatoshi | 2013-03-28 |
Substrate Transport Hand And Substrate Transport Robot App 20110243690 - FURUICHI; Masatoshi | 2011-10-06 |
Cable handling structure for linear axis, and substrate transfer device equipped with the same Grant 7,956,286 - Furuichi June 7, 2 | 2011-06-07 |
Cable Handling Structure For Linear Axis, And Substrate Transfer Device Equipped With The Same App 20090223697 - FURUICHI; Masatoshi | 2009-09-10 |
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