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name:-0.0066709518432617
name:-0.00042104721069336
Furter; Gerd Patent Filings

Furter; Gerd

Patent Applications and Registrations

Patent applications and USPTO patent grants for Furter; Gerd.The latest application filed is for "projection exposure apparatus and exposure method".

Company Profile
0.5.2
  • Furter; Gerd - Ellwangen DE
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Catadioptric objective comprising two intermediate images
Grant 6,600,608 - Shafer , et al. July 29, 2
2003-07-29
Projection exposure system having a reflective reticle
Grant 6,590,718 - Furter , et al. July 8, 2
2003-07-08
Projection exposure apparatus and exposure method
Grant 6,512,573 - Furter January 28, 2
2003-01-28
Projection exposure apparatus and exposure method
App 20020039180 - Furter, Gerd
2002-04-04
Projection exposure system having a reflective reticle
App 20010022691 - Furter, Gerd ;   et al.
2001-09-20
High-resolution high-apertured objective
Grant 5,880,891 - Furter March 9, 1
1999-03-09
Maximum aperture catadioptric reduction objective for microlithography
Grant 5,742,436 - Furter April 21, 1
1998-04-21

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