| Patent | Date |
|---|
RF measurement system and method
Grant 11,410,832 - Funk , et al. August 9, 2 | 2022-08-09 |
Methods and systems for focus ring thickness determinations and feedback control
Grant 11,393,663 - Funk , et al. July 19, 2 | 2022-07-19 |
RF Measurement System and Method
App 20210407771 - Funk; Merritt ; et al. | 2021-12-30 |
RF Voltage and Current (V-I) Sensors and Measurement Methods
App 20210407770 - Moses; Justin ; et al. | 2021-12-30 |
RF Voltage and Current (V-I) Sensors and Measurement Methods
App 20210407775 - Moses; Justin ; et al. | 2021-12-30 |
Power Generation Systems and Methods for Plasma Stability and Control
App 20210343504 - Funk; Merritt ; et al. | 2021-11-04 |
Power generation systems and methods for plasma stability and control
Grant 11,094,507 - Funk , et al. August 17, 2 | 2021-08-17 |
Modules, multi-stage systems, and related methods for radio frequency power amplifiers
Grant 11,050,394 - DuBose , et al. June 29, 2 | 2021-06-29 |
Power Generation Systems And Methods For Plasma Stability And Control
App 20210027992 - Funk; Merritt ; et al. | 2021-01-28 |
Process Control Enabled Vdc Sensor For Plasma Process
App 20210013005 - Funk; Merritt ; et al. | 2021-01-14 |
Modules, Multi-stage Systems, And Related Methods For Radio Frequency Power Amplifiers
App 20200395901 - DuBose; Chelsea ; et al. | 2020-12-17 |
Microwave plasma device
Grant 10,796,916 - Funk , et al. October 6, 2 | 2020-10-06 |
Methods And Systems For Focus Ring Thickness Determinations And Feedback Control
App 20200273678 - Funk; Merritt ; et al. | 2020-08-27 |
Methods and systems for controlling plasma performance
Grant 10,510,512 - Funk , et al. Dec | 2019-12-17 |
Multi-cell resonator microwave surface-wave plasma apparatus
Grant 10,424,462 - Funk , et al. Sept | 2019-09-24 |
Self-sustained non-ambipolar direct current (DC) plasma at low power
Grant 10,395,903 - Chen , et al. A | 2019-08-27 |
Non-ambipolar electric pressure plasma uniformity control
Grant 10,388,528 - Chen , et al. A | 2019-08-20 |
Low electron temperature, edge-density enhanced, surface-wave plasma (SWP) processing method and apparatus
Grant 10,375,812 - Zhao , et al. | 2019-08-06 |
Methods And Systems For Controlling Plasma Performance
App 20190228950 - Funk; Merritt ; et al. | 2019-07-25 |
Plasma generation and control using a DC ring
Grant 10,354,841 - Zhao , et al. July 16, 2 | 2019-07-16 |
Self-sustained Non-ambipolar Direct Current (dc) Plasma At Low Power
App 20180269041 - Chen; Zhiying ; et al. | 2018-09-20 |
Microwave Plasma Device
App 20180226255 - Funk; Merritt ; et al. | 2018-08-09 |
Self-sustained non-ambipolar direct current (DC) plasma at low power
Grant 9,978,568 - Chen , et al. May 22, 2 | 2018-05-22 |
Microwave surface-wave plasma device
Grant 9,947,515 - Funk , et al. April 17, 2 | 2018-04-17 |
Microwave plasma device
Grant 9,941,126 - Funk , et al. April 10, 2 | 2018-04-10 |
Microwave plasma device
Grant 9,934,974 - Zhao , et al. April 3, 2 | 2018-04-03 |
Method and system for high precision etching of substrates
Grant 9,881,804 - Zhao , et al. January 30, 2 | 2018-01-30 |
Dipole ring magnet assisted microwave radial line slot antenna plasma processing method and apparatus
Grant 9,852,893 - Chen , et al. December 26, 2 | 2017-12-26 |
Energetic negative ion impact ionization plasma
Grant 9,799,494 - Chen , et al. October 24, 2 | 2017-10-24 |
Microwave surface-wave plasma device
Grant 9,793,095 - Funk , et al. October 17, 2 | 2017-10-17 |
Plasma tuning rods in microwave resonator plasma sources
Grant 9,728,416 - Zhao , et al. August 8, 2 | 2017-08-08 |
Method and apparatus for providing an anisotropic and mono-energetic neutral beam by non-ambipolar electron plasma
Grant 9,668,332 - Chen , et al. May 30, 2 | 2017-05-30 |
Plasma Generation and Control Using a DC Ring
App 20160300738 - Zhao; Jianping ; et al. | 2016-10-13 |
Energetic Negative Ion Impact Ionization Plasma
App 20160293386 - Chen; Lee ; et al. | 2016-10-06 |
Pneumatic Counterbalance For Electrode Gap Control
App 20160293388 - Chen; Lee ; et al. | 2016-10-06 |
Dipole Ring Magnet Assisted Microwave Radial Line Slot Antenna Plasma Processing Method And Apparatus
App 20160293389 - Chen; Lee ; et al. | 2016-10-06 |
Non-ambipolar Electric Pressure Plasma Uniformity Control
App 20160268136 - Chen; Lee ; et al. | 2016-09-15 |
Scalable and uniformity controllable diffusion plasma source
Grant 9,431,218 - Zhao , et al. August 30, 2 | 2016-08-30 |
Method And System For High Precision Etching Of Substrates
App 20160218011 - Zhao; Jianping ; et al. | 2016-07-28 |
Low Electron Temperature, Edge-density Enhanced, Surface-wave Plasma (swp) Processing Method And Apparatus
App 20160212833 - Zhao; Jianping ; et al. | 2016-07-21 |
Radio frequency (RF) power coupling system utilizing multiple RF power coupling elements for control of plasma properties
Grant 9,396,900 - Lane , et al. July 19, 2 | 2016-07-19 |
Plasma tuning rods in microwave resonator processing systems
Grant 9,396,955 - Zhao , et al. July 19, 2 | 2016-07-19 |
Method And Apparatus For Providing An Anisotropic And Mono-energetic Neutral Beam By Non-ambipolar Electron Plasma
App 20160198559 - Chen; Lee ; et al. | 2016-07-07 |
Low electron temperature, edge-density enhanced, surface wave plasma (SWP) processing method and apparatus
Grant 9,301,383 - Zhao , et al. March 29, 2 | 2016-03-29 |
Method and apparatus for providing an anisotropic and mono-energetic neutral beam by non-ambipolar electron plasma
Grant 9,288,890 - Chen , et al. March 15, 2 | 2016-03-15 |
Electric Pressure Systems For Control Of Plasma Properties And Uniformity
App 20160056018 - Zhao; Jianping ; et al. | 2016-02-25 |
Electric pressure systems for control of plasma properties and uniformity
Grant 9,209,032 - Zhao , et al. December 8, 2 | 2015-12-08 |
Processing chamber integrated pressure control
Grant 9,151,286 - Funk , et al. October 6, 2 | 2015-10-06 |
Plasma tuning rods in microwave resonator plasma sources
Grant 9,111,727 - Zhao , et al. August 18, 2 | 2015-08-18 |
Low profile magnetic filter
Grant 9,111,873 - Chen , et al. August 18, 2 | 2015-08-18 |
Methods of electrical signaling in an ion energy analyzer
Grant 9,087,677 - Funk , et al. July 21, 2 | 2015-07-21 |
Multi-cell Resonator Microwave Surface-wave Plasma Apparatus
App 20150126046 - Funk; Merritt ; et al. | 2015-05-07 |
Low electron temperature microwave surface-wave plasma (SWP) processing method and apparatus
Grant 8,968,588 - Zhao , et al. March 3, 2 | 2015-03-03 |
Self-sustained Non-ambipolar Direct Current (dc) Plasma At Low Power
App 20150041432 - Chen; Zhiying ; et al. | 2015-02-12 |
Microwave Plasma Device
App 20140374025 - Zhao; Jianping ; et al. | 2014-12-25 |
Microwave Plasma Device
App 20140377966 - Funk; Merritt ; et al. | 2014-12-25 |
Processing System For Non-ambipolar Electron Plasma (nep) Treatment Of A Substrate With Sheath Potential
App 20140360670 - Chen; Lee ; et al. | 2014-12-11 |
Ion energy analyzer
Grant 8,847,159 - Chen , et al. September 30, 2 | 2014-09-30 |
Method And System Using Plasma Tuning Rods For Plasma Processing
App 20140262040 - Zhao; Jianping ; et al. | 2014-09-18 |
Scalable And Uniformity Controllable Diffusion Plasma Source
App 20140265846 - Zhao; Jianping ; et al. | 2014-09-18 |
Non-ambipolar Electric Pressure Plasma Uniformity Control
App 20140273538 - Chen; Lee ; et al. | 2014-09-18 |
Microwave Surface-Wave Plasma Device
App 20140262042 - Funk; Merritt ; et al. | 2014-09-18 |
Electric Pressure Systems For Control Of Plasma Properties And Uniformity
App 20140273485 - Zhao; Jianping ; et al. | 2014-09-18 |
Microwave Surface-Wave Plasma Device
App 20140262041 - Funk; Merritt ; et al. | 2014-09-18 |
Ion energy analyzer and methods of manufacturing the same
Grant 8,816,281 - Funk , et al. August 26, 2 | 2014-08-26 |
Plasma tuning rods in microwave processing systems
Grant 8,808,496 - Zhao , et al. August 19, 2 | 2014-08-19 |
Plasma source pumping and gas injection baffle
Grant 8,747,610 - Chen , et al. June 10, 2 | 2014-06-10 |
Variable capacitance chamber component incorporating ferroelectric materials and methods of manufacturing and using thereof
Grant 8,721,833 - Chen , et al. May 13, 2 | 2014-05-13 |
Low Profile Magnetic Filter
App 20140113454 - Chen; Lee ; et al. | 2014-04-24 |
Stable surface wave plasma source
Grant 8,669,705 - Chen , et al. March 11, 2 | 2014-03-11 |
Low Electron Temperature, Edge-density Enhanced, Surface Wave Plasma (swp) Processing Method And Apparatus
App 20130270997 - Zhao; Jianping ; et al. | 2013-10-17 |
Stable Surface Wave Plasma Source
App 20130264938 - Chen; Lee ; et al. | 2013-10-10 |
Plasma Source Pumping And Gas Injection Baffle
App 20130256268 - Chen; Lee ; et al. | 2013-10-03 |
Low Electron Temperature Microwave Surface-wave Plasma (swp) Processing Method And Apparatus
App 20130256272 - Zhao; Jianping ; et al. | 2013-10-03 |
Contact processing using multi-input/multi-output (MIMO) models
Grant 8,532,796 - Prager , et al. September 10, 2 | 2013-09-10 |
Plasma Tuning Rods In Microwave Resonator Plasma Sources
App 20130224961 - Zhao; Jianping ; et al. | 2013-08-29 |
Variable Capacitance Chamber Component Incorporating Ferroelectric Materials And Methods Of Manufacturing And Using Thereof
App 20130203258 - CHEN; Zhiying ; et al. | 2013-08-08 |
Variable Capacitance Chamber Component Incorporating A Semiconductor Junction And Methods Of Manufacturing And Using Thereof
App 20130200494 - CHEN; Zhiying ; et al. | 2013-08-08 |
Plasma Tuning Rods In Microwave Resonator Processing Systems
App 20130203261 - Zhao; Jianping ; et al. | 2013-08-08 |
Adaptive recipe selector
Grant 8,501,499 - Sundararajan , et al. August 6, 2 | 2013-08-06 |
Variable capacitance chamber component incorporating a semiconductor junction and methods of manufacturing and using thereof
Grant 8,486,798 - Chen , et al. July 16, 2 | 2013-07-16 |
Radio Frequency (rf) Power Coupling System Utilizing Multiple Rf Power Coupling Elements For Control Of Plasma Properties
App 20130119854 - Lane; Barton ; et al. | 2013-05-16 |
Processing Chamber Integrated Pressure Control
App 20130115110 - Funk; Merritt ; et al. | 2013-05-09 |
Stable surface wave plasma source
Grant 8,415,884 - Chen , et al. April 9, 2 | 2013-04-09 |
Plasma-Tuning Rods in Surface Wave Antenna (SWA) Sources
App 20130084706 - Zhao; Jianping ; et al. | 2013-04-04 |
Plasma Tuning Rods in Microwave Processing Systems
App 20130081762 - Zhao; Jianping ; et al. | 2013-04-04 |
Plasma Tuning Rods in Microwave Resonator Plasma Sources
App 20130082030 - Zhao; Jianping ; et al. | 2013-04-04 |
Apparatus and method for improving photoresist properties using a quasi-neutral beam
Grant 8,343,371 - Funk , et al. January 1, 2 | 2013-01-01 |
Plasma generation controlled by gravity-induced gas-diffusion separation (GIGDS) techniques
Grant 8,323,521 - Zhao , et al. December 4, 2 | 2012-12-04 |
Ion Energy Analyzer And Methods Of Manufacturing The Same
App 20120248311 - Funk; Merritt ; et al. | 2012-10-04 |
Contact Processing Using Multi-Input/Multi-Output (MIMO) Models
App 20120253497 - Prager; Daniel J. ; et al. | 2012-10-04 |
Ion Energy Analyzer
App 20120248310 - Chen; Lee ; et al. | 2012-10-04 |
Methods Of Electrical Signaling In An Ion Energy Analyzer
App 20120248322 - Funk; Merritt ; et al. | 2012-10-04 |
Adaptive Recipe Selector
App 20120252141 - Sundararajan; Radha ; et al. | 2012-10-04 |
Method and system for introducing process fluid through a chamber component
Grant 8,276,540 - Chen , et al. October 2, 2 | 2012-10-02 |
Creating metal gate structures using Lithography-Etch-Lithography-Etch (LELE) processing sequences
Grant 8,183,062 - Funk , et al. May 22, 2 | 2012-05-22 |
Method and system for performing a chemical oxide removal process
Grant 8,175,736 - Tomoyasu , et al. May 8, 2 | 2012-05-08 |
Method and system for introducing process fluid through a chamber component
App 20120098405 - CHEN; Lee ; et al. | 2012-04-26 |
Method and system for introducing process fluid through a chamber component
Grant 8,100,082 - Chen , et al. January 24, 2 | 2012-01-24 |
Method and system for controlling radical distribution
Grant 8,038,834 - Funk , et al. October 18, 2 | 2011-10-18 |
Creating multi-layer/multi-input/multi-output (MLMIMO) models for metal-gate structures
Grant 8,019,458 - Funk , et al. September 13, 2 | 2011-09-13 |
DC and RF hybrid processing system
Grant 7,993,937 - Chen , et al. August 9, 2 | 2011-08-09 |
Dynamic control of process chemistry for improved within-substrate process uniformity
Grant 7,988,813 - Chen , et al. August 2, 2 | 2011-08-02 |
Apparatus and Method for Improving Photoresist Properties Using a Quasi-Neutral Beam
App 20110174606 - Funk; Merritt ; et al. | 2011-07-21 |
Switchable Neutral Beam Source
App 20110177694 - Chen; Lee ; et al. | 2011-07-21 |
Multi-layer/multi-input/multi-output (MLMIMO) models and method for using
Grant 7,967,995 - Funk , et al. June 28, 2 | 2011-06-28 |
Method and apparatus for spacer-optimization (S-O)
Grant 7,939,450 - Yamashita , et al. May 10, 2 | 2011-05-10 |
DC and RF Hybrid Processing System
App 20110070665 - Chen; Lee ; et al. | 2011-03-24 |
Stable surface wave plasma source
App 20110057562 - CHEN; Lee ; et al. | 2011-03-10 |
Method and apparatus for creating a gate optimization evaluation library
Grant 7,899,637 - Yamashita , et al. March 1, 2 | 2011-03-01 |
Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models for metal-gate structures
Grant 7,894,927 - Funk , et al. February 22, 2 | 2011-02-22 |
Plasma Generation Controlled by Gravity-Induced Gas-Diffusion Separation (GIGDS) Techniques
App 20110039355 - Zhao; Jianping ; et al. | 2011-02-17 |
Method for plasma processing over wide pressure range
Grant 7,875,555 - Chen , et al. January 25, 2 | 2011-01-25 |
Real-time parameter tuning for etch processes
Grant 7,801,635 - Funk , et al. September 21, 2 | 2010-09-21 |
Creating Metal Gate Structures Using Lithography-Etch-Lithography-Etch (LELE) Processing Sequences
App 20100214545 - Funk; Merritt ; et al. | 2010-08-26 |
Neutral beam source and method for plasma heating
Grant 7,772,544 - Chen , et al. August 10, 2 | 2010-08-10 |
Method And System For Controlling Radical Distribution
App 20100193471 - FUNK; Merritt ; et al. | 2010-08-05 |
Method and apparatus for creating a Spacer-Optimization (S-O) library
Grant 7,765,077 - Yamashita , et al. July 27, 2 | 2010-07-27 |
Multi-plasma neutral beam source and method of operating
Grant 7,732,759 - Chen , et al. June 8, 2 | 2010-06-08 |
Method and system for controlling radical distribution
Grant 7,718,030 - Funk , et al. May 18, 2 | 2010-05-18 |
Method and apparatus for optimizing a gate channel
Grant 7,713,758 - Yamashita , et al. May 11, 2 | 2010-05-11 |
Apparatus and Method for Improving Photoresist Properties
App 20100081285 - Chen; Lee ; et al. | 2010-04-01 |
Dynamic temperature backside gas control for improved within-substrate process uniformity
Grant 7,674,636 - Sundararajan , et al. March 9, 2 | 2010-03-09 |
Creating Multi-Layer/Multi-Input/Multi-Output (MLMIMO) Models for Metal-Gate Structures
App 20100036514 - Funk; Merritt ; et al. | 2010-02-11 |
Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) Models for Metal-Gate Structures
App 20100036518 - Funk; Merritt ; et al. | 2010-02-11 |
Real-time parameter tuning using wafer thickness
Grant 7,642,102 - Funk , et al. January 5, 2 | 2010-01-05 |
Method for dynamic sensor configuration and runtime execution
Grant 7,636,608 - Funk , et al. December 22, 2 | 2009-12-22 |
Multi-plasma Neutral Beam Source And Method Of Operating
App 20090289179 - Chen; Lee ; et al. | 2009-11-26 |
Damage assessment of a wafer using optical metrology
Grant 7,623,978 - Lally , et al. November 24, 2 | 2009-11-24 |
Measuring a damaged structure formed on a wafer using optical metrology
Grant 7,619,731 - Lally , et al. November 17, 2 | 2009-11-17 |
Multi-Layer/Multi-Input/Multi-Output (MLMIMO) Models and Method for Using
App 20090242513 - Funk; Merritt ; et al. | 2009-10-01 |
Creating a library for measuring a damaged structure formed on a wafer using optical metrology
Grant 7,576,851 - Lally , et al. August 18, 2 | 2009-08-18 |
Method for flexing a substrate during processing
Grant 7,576,018 - Funk August 18, 2 | 2009-08-18 |
Method of using a wafer-thickness-dependant profile library
Grant 7,571,074 - Funk , et al. August 4, 2 | 2009-08-04 |
Dynamic metrology sampling with wafer uniformity control
Grant 7,567,700 - Funk , et al. July 28, 2 | 2009-07-28 |
Method for plasma processing over wide pressure range
App 20090142929 - CHEN; Lee ; et al. | 2009-06-04 |
Creating a virtual profile library
Grant 7,542,859 - Funk , et al. June 2, 2 | 2009-06-02 |
Method and system for low pressure plasma processing
App 20090095714 - CHEN; Lee ; et al. | 2009-04-16 |
Real-time parameter tuning using wafer temperature
Grant 7,517,708 - Deshpande , et al. April 14, 2 | 2009-04-14 |
Neutral beam source and method for plasma heating
App 20090090852 - Chen; Lee ; et al. | 2009-04-09 |
Processing system for producing a negative ion plasma
App 20090084501 - CHEN; Lee ; et al. | 2009-04-02 |
Method and Apparatus for Spacer-Optimization (S-O)
App 20090081815 - Yamashita; Asao ; et al. | 2009-03-26 |
Method and Apparatus for Creating a Spacer-Optimization (S-O) Library
App 20090082983 - Yamashita; Asao ; et al. | 2009-03-26 |
Dynamic metrology sampling for a dual damascene process
Grant 7,502,709 - Funk , et al. March 10, 2 | 2009-03-10 |
Refining a virtual profile library
Grant 7,487,053 - Funk , et al. February 3, 2 | 2009-02-03 |
Method for heating a chemically amplified resist layer carried on a rotating substrate
Grant 7,479,463 - Kulp , et al. January 20, 2 | 2009-01-20 |
Fault detection and classification (FDC) using a run-to-run controller
Grant 7,477,960 - Willis , et al. January 13, 2 | 2009-01-13 |
Method and Apparatus for Creating a Gate Optimization Evaluation Library
App 20080311688 - Yamashita; Asao ; et al. | 2008-12-18 |
Method and Apparatus for Optimizing a Gate Channel
App 20080311687 - Yamashita; Asao ; et al. | 2008-12-18 |
Method And System For Introducing Process Fluid Through A Chamber Component
App 20080282979 - Chen; Lee ; et al. | 2008-11-20 |
Method of using a wafer-temperature-dependent profile library
Grant 7,451,054 - Deshpande , et al. November 11, 2 | 2008-11-11 |
Process control using physical modules and virtual modules
Grant 7,451,011 - Funk , et al. November 11, 2 | 2008-11-11 |
Method For Flexing A Substrate During Processing
App 20080224364 - Funk; Merritt | 2008-09-18 |
Dynamic Control Of Process Chemistry For Improved Within-substrate Process Uniformity
App 20080223873 - Chen; Lee ; et al. | 2008-09-18 |
Dynamic Temperature Backside Gas Control For Improved Within-substrate Process Uniformity
App 20080227227 - Sundararajan; Radha ; et al. | 2008-09-18 |
Apparatus And Method For Heating A Layer Carried On A Rotating Substrate
App 20080220340 - Kulp; John ; et al. | 2008-09-11 |
Real-Time Parameter Tuning Using Wafer Temperature
App 20080182343 - Deshpande; Sachin ; et al. | 2008-07-31 |
Real-Time Parameter Tuning Using Wafer Thickness
App 20080183412 - Funk; Merritt ; et al. | 2008-07-31 |
Method of Using a Wafer-Thickness-Dependant Profile Library
App 20080183411 - Funk; Merritt ; et al. | 2008-07-31 |
Real-Time Parameter Tuning For Etch Processes
App 20080183312 - Funk; Merritt ; et al. | 2008-07-31 |
Method of Using a Wafer-Temperature-Dependant Profile Library
App 20080183413 - Deshpande; Sachin ; et al. | 2008-07-31 |
Method for processing data based on the data context
Grant 7,395,131 - Funk July 1, 2 | 2008-07-01 |
Measuring A Damaged Structure Formed On A Wafer Using Optical Metrology
App 20080137078 - LALLY; Kevin ; et al. | 2008-06-12 |
Iso/nested control for soft mask processing
Grant 7,328,418 - Yamashita , et al. February 5, 2 | 2008-02-05 |
Measuring a damaged structure formed on a wafer using optical metrology
Grant 7,324,193 - Lally , et al. January 29, 2 | 2008-01-29 |
Using a virtual profile library
Grant 7,305,322 - Funk , et al. December 4, 2 | 2007-12-04 |
Formula-based run-to-run control
Grant 7,292,906 - Funk , et al. November 6, 2 | 2007-11-06 |
Dynamic metrology sampling with wafer uniformity control
App 20070237383 - Funk; Merritt ; et al. | 2007-10-11 |
Creating a virtual profile library
App 20070239369 - Funk; Merritt ; et al. | 2007-10-11 |
Dynamic metrology sampling with wafer uniformity control
App 20070238201 - Funk; Merritt ; et al. | 2007-10-11 |
Refining a virtual profile library
App 20070239383 - Funk; Merritt ; et al. | 2007-10-11 |
Dynamic metrology sampling for a dual damascene process
App 20070231930 - Funk; Merritt ; et al. | 2007-10-04 |
Measuring a damaged structure formed on a wafer using optical metrology
App 20070229806 - Lally; Kevin ; et al. | 2007-10-04 |
Measuring a damaged structure formed on a wafer using optical metrology
App 20070229807 - Lally; Kevin ; et al. | 2007-10-04 |
Creating a library for measuring a damaged structure formed on a wafer using optical metrology
App 20070233404 - Lally; Kevin ; et al. | 2007-10-04 |
Damage assessment of a wafer using optical metrology
App 20070232045 - Lally; Kevin ; et al. | 2007-10-04 |
Using a virtual profile library
App 20070233426 - Funk; Merritt ; et al. | 2007-10-04 |
Wafer-to-wafer control using virtual modules
Grant 7,212,878 - Funk , et al. May 1, 2 | 2007-05-01 |
Method and system for controlling radical distribution
App 20070068625 - Funk; Merritt ; et al. | 2007-03-29 |
Feedforward, feedback wafer to wafer control method for an etch process
Grant 7,158,851 - Funk January 2, 2 | 2007-01-02 |
Method and apparatus for the monitoring and control of a semiconductor manufacturing process
Grant 7,123,980 - Funk , et al. October 17, 2 | 2006-10-17 |
Method and apparatus for monitoring tool performance
Grant 7,113,838 - Funk , et al. September 26, 2 | 2006-09-26 |
Iso/nested control for soft mask processing
App 20060195218 - Yamashita; Asao ; et al. | 2006-08-31 |
Fault detection and classification (FDC) using a run-to-run controller
App 20060184264 - Willis; James E. ; et al. | 2006-08-17 |
Process control using physical modules and virtual modules
App 20060042543 - Funk; Merritt ; et al. | 2006-03-02 |
Wafer-to-wafer control using virtual modules
App 20060047356 - Funk; Merritt ; et al. | 2006-03-02 |
Formula-based run-to-run control
App 20060015206 - Funk; Merritt ; et al. | 2006-01-19 |
Method and apparatus for the monitoring and control of a semiconductor manufacturing process
App 20050187649 - Funk, Merritt ; et al. | 2005-08-25 |
Method for dynamic sensor configuration and runtime execution
App 20050177269 - Funk, Merritt | 2005-08-11 |
Method and apparatus for monitoring tool performance
App 20050171627 - Funk, Merritt ; et al. | 2005-08-04 |
Method for processing data based on the data context
App 20050165731 - Funk, Merritt | 2005-07-28 |
Method and apparatus for automatic sensor installation
App 20050159911 - Funk, Merritt ; et al. | 2005-07-21 |
Method and apparatus for simplified system configuration
App 20050065630 - Funk, Merritt ; et al. | 2005-03-24 |
Method for interaction with status and control apparatus
App 20050047645 - Funk, Merritt ; et al. | 2005-03-03 |
Feedforward, feedback wafer to wafer control method for an etch process
App 20040267399 - Funk, Merritt | 2004-12-30 |
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